VQ5000

Note2) For thread standard, refer to page 2-6-39.

VQ5000

Coil voltage 1.Type of actuation 2 position single 2 position double 3 position closed center 3 position exhaust center 3 position pressure center 3 position double check 100VAC (50/60Hz) 200VAC (50/60Hz) 110VAC (50/60Hz) 220VAC (50/60Hz) 24VDC 12VDC 1 2 3 4 5 6 1 2 3 4 5 6 2. Seal type 5. Light/Surge voltage suppressor Nil E With Without Metal seal Rubber seal 0 1 3. Function 6.

VS 8-2/VS 8-4

SOL.A 3A SOL.B 3B Station 3 SOL.A 4A SOL.B 4B Station 4 SOL.A 5A 10A COM 10B SOL.B 5B Station 5 SOL.A 6A SOL.B 6B Station 6 SOL.A 7A 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A 10B 10A COM 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B SOL.B 7B Station 7 Double wiring (connected to SOL. A and SOL.

Plug-in Unit

PW 0 0 0 1 1 1 9 9 9 PW LRUN 2 2 2 8 8 8 3 3 3 7 7 7 4 4 4 6 6 6 SD RD LERR. 5 5 5 L RUN SD RD x10 x1 24V 0V +24V 24G DA DB FG DG L ERR.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Polarity SOL.A 1A ( ) ( + ) SOL.B 1B ( ) ( + ) 1 station 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A SOL.A 2A ( ) ( + ) SOL.B 2B ( ) ( + ) 2 stations SOL.A 3A ( ) ( + ) SOL.B 3B ( ) ( + ) 3 stations SOL.A 4A ( ) ( + ) SOL.B 4B ( ) ( + ) 4 stations SOL.A 5A ( ) ( + ) 10A COM SOL.B 5B ( ) ( + ) 5 stations

SMC Electronic Switch Series Variations

ISA-2-7 ISAl-1 ISAl-2/ISAl-1 ISAl-3/ISAl-2 ISAl-4/ISAl-3 ISAl-5/ISAl-4 ISAl-6/ISAl-5 ISAl-6 No.

Table of Contents

Pressure 0.7 MPa PM: Raised up to 0.43 MPa 6 x 6 pcs. 6 x 10 pcs. 6 x 8 pcs. 6 x 10 pcs. 6 x 8 pcs. 6 x 10 pcs. 6 x 10 pcs. Flow rate Q (Nl) Flow rate Q (Nl) Tube 2,000 Tube 2,000 mm 500 mm 6 x 8 pcs. 6 x 8 pcs. 500 mm 500 mm mm 6 x 6 pcs. 6 x 6 pcs. 6 x 6 pcs. 6 x 6 pcs.

LEC-OM07605CN

4B SDI2BTOFB1 6 2A SRESB+ FG 2B SRESBTOFB2 7 5A SDO2B+ TOFCOM 8 5B SDO2B8B TOFB CN3 EM2 (B ) +24 V 7A M 0 V 7B 0 V .

Table of Contents

(Because barrel nipples are used for equipment connections.) 100 Standard dew point temperature and air flow rate Outlet air flow rate Purge air flow rate (l/min(ANR)) Flow rate by size Symbol Standard dew point (C) 5 50/12 50/6 3 25/6 25/3 10 100/2 20 200/5 30 300/7 50 60 75 100 Nil H 20 15 500/12 600/12 750/15 1000/19 Drain discharge method 500/6 600/6 750/8 100/1 200/2 300/3 1000/11

ZX

VJ10-20-4A-6 2 pcs. 5A 10 ZS ZP (For DC) 4A 20 VJ10 6 Lead wire length ZCU Nil 30 50 0.6 m 3 m 5 m (For 100 VAC) 1A 36 VJ10 6 AMJ (For 110 VAC) Note) If ordering switch with 5 m lead wire, specify both switch and lead wire with connector part numbers. Ordering example) ZX100-K150Z-ECN1 pc. VJ10-20-4A-6 2 pcs. ZS-10-5A-50 1 pc. 3A 36 VJ10 6 Misc.

Symbol: 15R4 (2 Port, N.O., Port 3 IN, Port 2 OUT), Function: Y (Standard w/Power Saving Circuit), Voltage: 5 (24VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM)

Symbol: 2 Port, N.O., Port 3 IN, Port 2 OUT, Function: Standard w/Power Saving Circuit, Voltage: 24VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Sub-plate Material/Port Size/ Reverse Mounting Prevention Pin: -, Lead Wire Length: -, CE Compliant: -

2

AD17-6-A AD27-6-A With bowl guard AD27-6C-A AD37-6-A AD47-6-A Normally open (N.O.)

Stability of suction position,

Pad diameter 32 to 50 Dimensions/With Set Screw: Vacuum Inlet Vertical Pad form Flat type with groove ZP3E-T32UMl-A10 ZP3E-T40UMl-A10 ZP3E-T50UMl-A10 6 M10 x 1 40 Seal washer Seal washer M10 x 1 31 31 6 Seal washer 6 M10 x 1 Width across flats 6 Width across flats 6 21.5 4.9 21 4.9 21 4.9 Width across flats 6 14.5 14.5 15 3 2 2.5 35 32 43 40 53 50 Weights [g] Weights [g] Weights [g] Pad material

0.4

mA), Holding 1.26 VA (6 mA) 200 VAC 5(R1) 1(P) 3(R2) Inrush 1.38 VA (6 mA), Holding 1.38 VA (6 mA) 220 VAC 4-position dual 3-port valve Note) 2(B) 4(A) VQZ (B) Note 1) Use dry air to prevent condensation when operating at low temperatures.

Vacuum System Peripherals:

Connection 3.2, 4 6, 8, 10, 12, 16 KQ2 Nylon, Soft nylon, Polyurethane M5, M6, R 1/8 to 1/2 From 100 kPa One-touch fittings One-touch fittings/Manifold Series KM Applicable tubing: Nylon, Soft nylon, Polyurethane Tubing O.D.: 4, 6, 8, 10, 12 Port A piping port Port B port size No. of port A Piping specifications Port A Port B Model Model 4 6 8 8 10 12 Rc Rc 6 8 10 6, R 6, R 6, R 8, R 8, R

IDX-OM-W023

. i-4 i-2-7 . i-4 i-2-8 . i-5 i-2-9 . i-5 i-3 . i-6 i-4 / . i-7 1 1-1 . 1-1 2 2-1 . 2-1 2-2 . 2-1 2-2-1 . 2-1 2-2-2 . 2-2 2-2-3 . 2-2 2-2-4 . 2-3 2-2-5 . 2-3 2-3 . 2-5 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 () . 4-1 1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 6 6-1 . 6-1 6-2 GWP . 6-3 6-3 . 6-4 6-4 . 6-5 6

IDX-OM-W053

GFCI 5. 6. 7. 13 1 13 R 13-2 IDFA6E-20-R 5A 30mA 13-3 1) 2) 3) 9.5mm M5 1.25mm 2 L N 6.5mm M3 1.25mm 2 6-3 14-3 13 2 14 T 14 T T 14-2, 14-3 14-1 1. 2. 3. GFCI 4. 5. GFCI 6. 7. 8. 9.

IDUS/IDFS

Use a circuit breaker having a sensitivity current of 30mA or less and a rated current of 5A.

Stainless Steel Heat

6 Series IDUS/IDFS Option Specification Refer to pages 1 and 5 for "How to Order" of options.