Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

MY1H25 /32 /40 Z Stroke (LL) L 2 x 2 x B counterbore depth C LD through-hole 4 x MM depth M PA P (MY1HG) P (MY1HG) Guide center line PB PD (Hexagon socket head taper plug) (Hexagon socket head taper plug) PP QQ 16 12 LW P QW NW P G NC (Hexagon socket head taper plug) (Hexagon socket head taper plug) 16 Workpiece mounting center line Cylinder mounting center line PE PF PC View B View A GB

MY2

LD 3.4 5.5 9 LE 5 5 5 MM M4 x 0.7 M5 x 0.8 M6 x 1 N 20 25 40 NT 3.5 5.3 6.5 NH 2 3 4 NE 27 35.5 56.5 NC 14 21.3 32.4 Model MY2C16G MY2C25G MY2C40G NW 69.2 106.8 135.1 NV 3.4 5.5 6.6 PC 16.5 22.2 29 PD 32 48.7 60.5 PE 2.2 0.8 8.5 PH 21.3 31.8 38 PF 9.8 19.5 40.5 XX 12 14 23 Z 160 210 330 VV 10.5 15.3 29 SS 9.7 14 21.5 TT 12.5 19.3 35.4 UU 3 4.4 2 RW 22 34 45 QQ 16.4 20.4 25.5 QW 40 60 57

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

5 @2 %0 %1 %2 %3 %4 8-13-17 18 Series MY2 16, 25, 40 MY2C G Bore size Stroke Q + Stroke PG (LL) L 4-MM, depth M 4-B depth of counter bore C LA Workpiece mounting center line LD through hole PA Workpiece mounting center line Cylinder mounting center line PB PC MW LC LE Cylinder mounting center line QW PF NX 4 x 2-square nut J PD LB NH NT NW PE PE LW NV Courtesy of Steven Engineering, Inc.-

AR20-B to AR60-B

Example) AR30-03BG-NR-B-X425 Symbol Description Nq Body size 25 30 40 50 60 Symbol Description Nq Body size 20 25 30 40 50 60 Nw Pipe thread type Nil Rc N NPT F G + Nw Pipe thread type Nil Rc N NPT F G + 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + Ne Port size 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + Ne Port size Nil Without mounting option B*2 With bracket a Mounting Option *1 H With set nut (for

Cylinder with Lock

to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 801 to 900 901 to 1000 32 12.5 25 37.5 50 75 100 125 150 175 200 225 250 40 12.5 25 37.5 50 75 100 125 150 175 200 225 250 50 12.5 25 37.5 50 75 100 125 150 175 200 225 250 63 12.5 25 37.5 50 75 100 125 150 175 200 225 250 80 12.5 25 37.5 50 75 100 125 150 175 200 225 250 100 12.5 25 37.5 50 75 100 125 150 175 200 225

Series SV

SX3000-22-2 (M2 x 24) SV2000-21-1 (M3 x 30) Round head combination screw Manifold Specification Sheets 75 Series SV Valve Manifold Specifications Type 16: Cassette Base Manifold Replacement Parts Adding manifold bases (type 16) 1 Loosen the screws a (2 pcs. on one side) that hold the manifold base onto the DIN rail.

AR Series Modular Type Regulator

Nq Body size 10 20 25 30 40 Symbol Description Nw Pipe thread type Nil Metric thread (M5) V Rc V V V V N NPT V V V V F G V V V V + M5 M5 V 01 1/8 V 02 1/4 V V V V 03 3/8 V V V 04 1/2 V 06 3/4 V + Ne Port size a Mounting Nil Without mounting option V V V V V B Note 2) With bracket V V V V V H With set nut (for panel mount) Note 3) V V V V V + Option Note 1) Nr Nil Without pressure gauge

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

LE 4 5 6 NC 14 21.3 32.4 NT 3.5 5.3 6.5 NE 27 35.5 56.5 NH 2 3 4 NX 5.8 8.5 10.5 NW 48.2 71.8 82.1 NV 3.4 5.5 6.6 Model MY2H16G MY2H25G MY2H40G PF 3.5 5.5 17 Z 160 210 330 X 6 7.5 9 XX 12 14 23 Y 5 5 8 VV 10.5 15.3 29 TT 12.5 19.3 35.4 U 4 5 6 UU 3 4.4 2 SS 9.7 14 21.5 R 5 5 8 RR 5.3 8.5 11 RW 40 50 53.5 QW 40 60 57 PP 5.3 8 16 Q 152 198 312 QQ 16.4 20.4 25.5 PB 40 60 70 PA 40 60 100 PC

XLAQ/XLDQ

It is advisable to choose a model depending on its application, because an improved material compound (3310-75) which reduces the weight reduction ratio with O2 plasma is also available. 3 Response Time/Operation Time Kalrez Kalrez is a registered trademark of E. I. du Pont de Nemours and Company or its affiliates.

LEC-OM07605CN

EU2006/66/EC20[] Hg:(0.0005%), Cd:(0.002%), Pb:(0.004%) / 4 4.1 (IEC/EN 61800-5-2 ) STO(IEC/EN 61800-5-2: 2007 4.2.2.2 STO) LECSS2-TSTOSTO 4.2 4 4.2.1 LECSS2-T () 4.1.2 LECSS2-T ISO/EN ISO 13849-1 3 PL dIEC/EN 62061 SIL CL 2IEC/EN 61800-5-2 SIL 2 (STO) IEC/EN 61800-5-1IEC/EN 61800-3IEC/EN 60204-1 LECSS2-TMR-J3-D05()PLCs 4.1.3 LECSS2-T() 15 (1) (a) 75/60[AWG] 75/60 [AWG](1) L11L21

MY1

Cushion needle TT UU TT UU 10 G NW A GB MW 2-P (Hexagon socket head taper plug) N Z + Stroke WW WW P (Hexagon socket head taper plug) P (Hexagon socket head taper plug) XX XX P (Port) P (Port) Centralized piping 2-ZZ (Hexagon socket head taper plug) VV VV Centralized piping 2-ZZ (Hexagon socket head taper plug) S 1.1 WX 11.4 Bottom port (ZZ) (Applicable O-ring) Y 2-d Bore size (mm) 25 32

MY1

O-ring) Y 2 x 4 A B 6.0 C 3.5 CH 25 G 13.5 GA 8.5 GB 16.2 H 52 HH 27.7 J K 10 L 110 LD 3.6 LH 38 LL 35 LW 84 M 6.0 MM N 20 NC 14 NE 49.5 NH 16.5 Bore size (mm) 16 20 090 M5 x 0.8 M4 x 0.7 110 7.5 4.5 26 12.5 12.5 20.0 58 33.7 M6 x 1 12 130 4.8 39 45 88 7.5 M5 x 0.8 25 17 55.5 21.7 NW PA PB PG PP Q QQ QW RR SS TT UU VV W WW YW Z XX Bore size (mm) 16 20 07.5 11.5 56 60 40 50 94 100 3.5 4.5

Magnet: Built-in Magnet, Mounting: Double Clevis, Bore Size: 40mm, Thread: Rc, Stroke: 450mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: Pivot Bracket, Rod End Bracket: Double Knuckle Joint, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Made to Order: -

Magnet: Built-in Magnet, Mounting: Double Clevis, Bore Size: 40mm, Thread: Rc, Stroke: 500mm, Rod Boot: None, Cushion: Rubber Bumper, Pivot Bracket: Pivot Bracket, Rod End Bracket: Double Knuckle Joint, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Made to Order: -

Magnet: D (Built-in Magnet), Mounting: D (Double Clevis), Bore Size: 40mm, Thread: Rc, Stroke: 150mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: N (Pivot Bracket), Rod End Bracket: W (Double Knuckle Joint)

Magnet: D (Built-in Magnet), Mounting: D (Double Clevis), Bore Size: 40mm, Thread: Rc, Stroke: 500mm, Rod Boot: None, Cushion: N (Rubber Bumper), Pivot Bracket: N (Pivot Bracket), Rod End Bracket: W (Double Knuckle Joint)

Magnet: D (Built-in Magnet), Mounting: D (Double Clevis), Bore Size: 40mm, Thread: Rc, Stroke: 450mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: N (Pivot Bracket), Rod End Bracket: W (Double Knuckle Joint)

High Vacuum L Type Valve

XL1A16-2-101-XN1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

XL-OMV0002

XLC-16 XLC-25 XLC-40 XLC-50-1 XLC-63-1 XLC-80-1 XLC-100-1 XLC-160-1 16 25 40 50 63 80 100 160 560(5150) -5 Pa (abs) 110 l/s 1 5 14 45 80 160 200 300 800 10 (FKM) 1.310 Pam 3/S -11 (FKM) 1.310 KF(NW) KF(NW)K(DN) SUS316LSUS304FKM() 2 MPa (G) 0.30.6 0.40.6 cm 3 3 0.5MPa 38 91 430 280 500 1000 2300 3700 M5 Rc 1/8 Rc1/4 kg 0.28 0.46 1.1 1.4 2.3 4.0 8.7 14.5 1) 2) Y-VAC2 3) 1 7 XL-OMV0002

17

Applicable cylinder MY1B25 MY1B32 MY1B40 75 84 105 A B MY-S25 35 50 8 11.7 5 6 9.5 5.5 M6 x 1 MY1H A B MY-S32 45 64 11 6.6 M8 x 1.25 MY1 HT Side supports consist of a set of right and left supports. MY1 W Guide to Side Support Application MY2C For long stroke operation, the cylinder tube may be deflected depending on its own weight and the load.