High Vacuum Angle Valve

Stainless steel 432 Made to Order XLF Series How to Order Valve 100 XLFR M9N A 1K X Flange type Symbol Nil KF(NW) K(DN) D Temperature specifications Symbol Nil 5 to 60C 5 to 150C H0 Seal material Symbol Nil FKM EPDM Barrel Perfluoro Type Seal material 1349-80 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 Compound No.

10

, 400, 450, 500, 600 Up to 1200 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 MB1 Up to 1800 CA2 Up to 1500 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 125 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800,

Aluminum High Vacuum Angle Valve

Stainless steel 432 Made to Order XLF Series How to Order Valve 100 XLFR M9N A 1K X Flange type Symbol Nil KF(NW) K(DN) D Temperature specifications Symbol Nil 5 to 60C 5 to 150C H0 Seal material Symbol Nil FKM EPDM Barrel Perfluoro Type Seal material 1349-80 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 Compound No.

Cylinder with Lock

, 200, 250, 300, 350, 400, 450, 500, 600 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Up to 2500 Cylinder model: MDWBD32-50-NW-M9BW * The manufacturing of intermediate strokes is possible.

Vacuum

Fluorine rubber How to Order ZPT Mounting thread (Applicalion: Fleler to Li$ e) Pad dia, (mm) 0 2 o 2 0 4 s 4 0 6 0 6 0 8 6 8 l 0 s 1 0 Vacuum enlry (Application: Reler to List O) U Flat type C Flat with rib D Deep type B Bellows type With standard bufter JO With butfer stroke 6mm (tot @2-s8l J10 With bufter stroke 1omm (tor o10-450) KE Non-rotation type with butfer stroke 6mm (for o2-o8)

Vacuum

Fluorine rubber How to Order ZPT Mounting thread (Applicalion: Fleler to Li$ e) Pad dia, (mm) 0 2 o 2 0 4 s 4 0 6 0 6 0 8 6 8 l 0 s 1 0 Vacuum enlry (Application: Reler to List O) U Flat type C Flat with rib D Deep type B Bellows type With standard bufter JO With butfer stroke 6mm (tot @2-s8l J10 With bufter stroke 1omm (tor o10-450) KE Non-rotation type with butfer stroke 6mm (for o2-o8)

Magnet: D (Built-in Magnet), Mounting: D (Double Clevis), Bore Size: 63mm, Thread: Rc, Stroke: 250mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: N (Pivot Bracket), Rod End Bracket: W (Double Knuckle Joint)

Magnet: D (Built-in Magnet), Mounting: D (Double Clevis), Bore Size: 63mm, Thread: Rc, Stroke: 150mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: N (Pivot Bracket), Rod End Bracket: W (Double Knuckle Joint)

Electric Actuator/Slider Type

Model L A B n D E Without With LEFS40 -150 564.5 594.5 156 328 4 150 LEFS40 -200 614.5 644.5 206 378 6 2 300 LEFS40 -250 664.5 694.5 256 428 6 2 300 LEFS40 -300 714.5 744.5 306 478 6 2 300 LEFS40 -350 764.5 794.5 356 528 8 3 450 LEFS40 -400 814.5 844.5 406 578 8 3 450 LEFS40 -450 864.5 894.5 456 628 8 3 450 LEFS40 -500 914.5 944.5 506 678 10 4 600 LEFS40 -550 964.5 994.5 556 728 10 4 600

Battery-less

, 500 i Auto switch compatibility (In-line only)*2 *3 *4 *5 50 to 800 25 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600, 650, 700, 750, 800 Nil None C With (Includes 1 mounting bracket) 50 to 1000 32 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600, 650, 700, 750, 800, 850, 900, 950, 1000 150 to 1200 40 150, 200, 250, 300, 350, 400, 450, 500, 550, 600, 650, 700, 750,

Electric Actuators

Refer to pages starting with 181 for mounting. 3-8H10 depth 10 30 A B Stroke Model LG1H202PC-500-F LG1H202PC-600-F LG1H202PC-700-F LG1H202PC-800-F LG1H202PC-900-F LG1H202PC-1000-F 350 450 550 650 750 850 370 470 570 670 770 870 500 600 700 800 900 1000 95 B 100 95 8-6.2 110 95 20 95 A Positioning Time Guide Positioning time Positioning time (sec.)

Integrated Controller

to 225 401 to 450 10 to 700 5 to 360 3 to 170 20 to 1100 12 to 750 6 to 400 3 to 225 24 to 1100 16 to 750 8 to 450 4 to 125 30 to 1200 20 to 1000 10 to 500 5 to 225 451 to 500 10 to 600 5 to 300 3 to 140 20 to 1100 12 to 750 6 to 400 3 to 225 24 to 1100 16 to 750 8 to 450 4 to 125 30 to 1200 20 to 1000 10 to 500 5 to 225 501 to 600 20 to 900 12 to 540 6 to 270 3 to 135 24 to 1100 16 to 750

Table of Contents

Refer to pages starting with 181 for mounting. 3-8H10 depth 10 30 A B Stroke Model LG1H202PC-500-F LG1H202PC-600-F LG1H202PC-700-F LG1H202PC-800-F LG1H202PC-900-F LG1H202PC-1000-F 350 450 550 650 750 850 370 470 570 670 770 870 500 600 700 800 900 1000 B 95 100 95 8-6.2 110 95 20 95 A Positioning Time Guide Positioning time Positioning time (sec.)

XM, XY

), CF KF (NW) KF (NW), CF KF (NW) KF (NW), K (DN), CF KF (NW), K (DN) Flange type Body: SCS13 (Conforms to Stainless steel 304) Bellows: Stainless steel 316L Bellows holder: Stainless steel 304.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

), CF KF (NW) KF (NW), CF KF (NW) KF (NW), K (DN), CF KF (NW), K (DN) Flange type Principle materials Body: SCS13 (Conforms to Stainless steel SUS304) Bellows: Stainless steel SUS316L Bellows holder: Stainless steel SUS304.

Table of Contents

, 500 350, 400, 450, 500, 600 75, 100, 125, 150, 350, 400, 450, 500, 600, 40 200, 250, 300 Ball bushing bearing 700, 800 MGCL 350, 400, 450, 500, 600, 50 700, 800, 900, 1000 Intermediate strokes and short strokes other than the above are produced upon receipt of order.

Magnet: Built-in Magnet, Mounting: Double Clevis, Bore Size: 40mm, Thread: Rc, Stroke: 450mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: Pivot Bracket, Rod End Bracket: Double Knuckle Joint, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Made to Order: -

Magnet: Built-in Magnet, Mounting: Double Clevis, Bore Size: 50mm, Thread: Rc, Stroke: 450mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: Pivot Bracket, Rod End Bracket: Double Knuckle Joint, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Made to Order: -

Cylinder (Tube) Inner Diameter(φ): 100, Stroke(mm): 450, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With rod detent function, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Valves: No, Operating Pressure(MPa): 0.08～1, Cushion: Air cushion, Port thread type

Magnet: D (Built-in Magnet), Mounting: D (Double Clevis), Bore Size: 100mm, Thread: Rc, Stroke: 450mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: N (Pivot Bracket), Rod End Bracket: W (Double Knuckle Joint)