Plate Material: A (Aluminium Alloy), Bearing Type: M (Slide Bearing), Bore Size: 40mm, Port Thread Type: Rc (Or M5x0.8 for 12,16 Bore), Stroke: 75mm, Piping Port Location: Top/Side Ported, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)

Plate Material: Aluminium Alloy, Bore Size: 40mm, Port Thread Type: Rc (Or M5x0.8 for 12,16 Bore), Stroke: 25mm, Piping Port Location: Top/Side Ported, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -

Plate Material: Aluminium Alloy, Bore Size: 40mm, Port Thread Type: Rc (Or M5x0.8 for 12,16 Bore), Stroke: 200mm, Piping Port Location: Top/Side Ported, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -

Plate Material: Aluminium Alloy, Bore Size: 40mm, Port Thread Type: Rc (Or M5x0.8 for 12,16 Bore), Stroke: 75mm, Piping Port Location: Top/Side Ported, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Plate Material: A (Aluminium Alloy), Bearing Type: M (Slide Bearing), Bore Size: 40mm, Port Thread Type: Rc (Or M5x0.8 for 12,16 Bore), Stroke: 200mm, Piping Port Location: Top/Side Ported, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal

1

Round type) 1 2 JA T-bracket 32 50 T-bracket 32 50 MXH Mounting nut and rod end nut are included in the basic weight.

High Vacuum Angle Valve

VAC, 50/60 Hz XLA 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz U XL XL 5 24 VDC 6 12 VDC S type: Not available for AC.

Table of Contents

2 L MRHQ 0 10 20 30 40 50 60 0 50 100 150 Misc.

Aluminum High Vacuum Angle Valve

VAC, 50/60 Hz XLA 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz U XL XL 5 24 VDC 6 12 VDC S type: Not available for AC.

Table of Contents

Therefore, also check the allowable load for the selected conditions. 6.1 10 16 20 25 32 40 MX 0.8 6.1 1.1 0.8 6.1 10.8 3.7 10.8 4.9 3.7 10.8 40 50 40 50 40 50 17.6 MTS 11 17.6 16 11 17.6 MY1H 27.5 23 27.5 26 23 27.5 30 30 30 39.2 MY 39 39.2 50 39 39.2 20 50 39 50 50 50 50 20 20 CY The above values are the maximum allowable values for moment and load.

Free Mount Cylinder

Cylinder Pad (ZP02 to 50) Rod dia. (mm) 2 4 6 8 10 13 16 20 25 32 40 50 Bore size (mm) Pad (ZPT02 to 50-B4 to 10) Cylinder 4 6 8 10 13 16 20 25 32 40 50 Rod dia. (mm) Model Thread dia.

ISO Cylinder

20 8 M10 x 1.25 32 11 30 22 11 17 12 28 Bore size S (XC) Z ZZ 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 8 46 (52) 64 (70) 76 (82) 86 (92) 10 46 (50) 64 (68) 76 (80) 86 (90) 12 50 (53.5) 75 (78.5) 91 (94.5) 105 (108.5) 16 56 (59.5) 71.5 (75) 87 (90.5) 82 (85.5) 97.5 (101) 113 (116.5) 98 (101.5

Table of Contents

amount (mm) Plate displacement amount (mm) MGP MGPA16-250 MGPA16-250 0.35 MGPA -400 50 50 63 63 MGPA -400 50 63 0.6 0.3 50 50 63 63 MGPA -300 0.5 50 63 MGPA -300 MGPA16-150 MGPA16-150 MGPA16-100 MGPA16-75 0.25 0.4 MGP MGPA16-100 50 50 63 63 MGPA -200 50 63 MGPA -200 0.2 MGP MGPA16-75 0.3 0.15 50 50 63 63 MGPA -150 50 63 MGPA -150 50 63 MGPA -100 50 63 MGPA -50 0.2 50 50 63 63 MGPA -100 0.1

Table of Contents

, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion on both

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Flange size XMH Symbol Nil C XMH V V V V XYH V V V Type KF (NW) CF Applicable flange size 16, 25, 40, 50 16 (034), 40 (070) Size 16 25 40 50 XYH Nil KF (NW) 25, 40, 50 3.

Smooth Cylinder/Low Speed Cylinder

55 60 65 70 75 35 40 45 50 55 60 65 70 75 80 D 30 35 40 45 50 55 30 35 40 45 50 55 30 35 40 45 Mounting bolt part no.

High Vacuum Angle Valve

0 CE-compliant u Electrical entry y Rated voltage i Light/surge voltage suppressor CE-compliant 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC Nil Q CE-compliant Nil None S With surge voltage suppressor Z With light/surge voltage suppressor G Grommet (Lead wire length 300 mm) H Grommet (Lead wire length 600 mm) L L type plug connector

e-Rodless Actuator

D-M9P D-M9NV D-M9B D-M9N D-M9PV D-M9BV Auto switch part no.

Air Cylinder

8 10 46.5 7 12 M14 x 1.5 42.5 M32 x 2 1/4 88 188 With Rod Boot (mm) Bore size B3 e f h l ZZ (Both sides) 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 20 30 36 18 68 81 93 106 131 12.5 25 37.5 50 75 198 224 248 274 324 25 32 36 18 72 85 97 110 135 12.5 25 37.5 50 75 206 232 256 282

Rotary Actuator/Vane Type

(Rotation range of single flat (key) when mounting 2 stopper blocks on the other sides groove is the opposite side from and the setting range is within either right 50 or 60 against port A and B.) Four chamfers for wrench Long groove Stopper block Section A-A (Double vane) Section A-A (Single vane) 60 50 Note) For size 40, each stopper block comes with 2 holding screws.