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How to Order MHZ Bore size MHF MHS 3 D 20 16 to 25 M9N MHL Number of auto switches MHR Nil S 2 pcs. 1 pc.

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Wn 111 210 X-axis Xn Y-axis Yn Z-axis Zn Z Wa 0.88 kg 0 mm 5 mm 65 mm Y Wb 4.35 kg 0 mm 42.5 mm 150 mm Wc 0.795 kg 111 mm 42.5 mm 150 mm X Wd 0.5 kg 210 mm 42.5 mm 150 mm 65 150 n = a, b, c, d 3.

ISO Cylinder

151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 32 68 118 143 168 97 147 172 197 140 190 215 240 40 89 139 164 189 214 122 172 197 222 247 174 224 249 274 299 Boss-cut/Basic [mm] Bore size Stroke Item S ZZ 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 32

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Caution 5 150 100 200 300 1.

High Vacuum Angle Valve

How to Order [Option] XLGV M9N 16 A 1 G L Flange size 16, 25, 40 1 q e u r t XLGV M9N 50 A 1 G L Flange size 50, 63, 80 i w y o !0 !

NCQ8

Nil (Example) M9N 118in (3 m) . L M9NL 197in (5 m) .

Air Cylinder

25 25, 50, 75, 100, 125, 150 32 25, 50, 75, 100, 125, 150, 200 40 25, 50, 75, 100, 125, 150, 200, 250 Note 1) Other intermediate strokes can be manufactured upon receipt of order.

Smooth Cylinder/Low Speed Cylinder

Volume GR-L-005 5 g GR-L-010 10 g GR-L-150 150 g 3. Do not wipe off grease from the sliding part of the air cylinder.

Electric Actuator/Slider Type

communication 50 100 150 SSCNET#/H and SSCNET#products are compatible.

5

, 175, 200, 250, 300, 350, 400, 450, 500 1000 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 1000 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 1000 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 1000 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 1000 100 25, 50, 75, 100, 125

Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

Made to Order

) 150 (150) 130 (150) 12 53 (63) 63 (63) Note 1) ( ): Denotes the dimensions with auto switch.

Integrated Controller

50 100 150 200 250 300 350 400 30 50 100 150 200 250 300 350 400 450 500 Product weight [kg] 1.74 1.81 1.98 2.24 2.42 2.59 2.77 2.94 3.12 2.74 2.85 3.14 3.42 3.82 4.11 4.39 4.68 4.97 5.25 5.54 In-line Motor Series EQY16D Stroke [mm] 30 50 100 150 200 250 300 Product weight [kg] 0.72 0.76 0.87 1.01 1.12 1.23 1.34 Series EQY25D EQY32D Stroke [mm] 30 50 100 150 200 250 300 350 400 30 50 100

15

Model LEY25 (Top/Parallel) LEY25D (In-line) LEY32 (Top/Parallel) LEY32D (In-line) Stroke [mm] Note 1) 30, 50, 100, 150, 200, 250 300, 350, 400 30, 50, 100, 150, 200, 250 300, 350, 400, 450, 500 30, 50, 100, 150, 200, 250 300, 350, 400, 450, 500 LEF Note 2) Horizontal 18 50 50 30 60 60 30 60 60 Vertical 8 16 30 9 19 37 12 24 46 Work load [kg] LEJ Force [N] Note 3) (Set value: Rated torque

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Weight Product Weight: Top Mounting Type [kg] Series LEYG25M LEYG32M Stroke [mm] 30 50 100 150 200 250 300 30 50 100 150 200 250 300 Weight [kg] 1.7 1.9 2.2 2.6 3.0 3.3 3.6 3.1 3.4 4.0 4.7 5.3 5.7 6.2 Series LEYG25L LEYG32L Stroke [mm] 30 50 100 150 200 250 300 30 50 100 150 200 250 300 Weight [kg] 1.7 1.9 2.2 2.6 2.9 3.2 3.4 3.1 3.4 3.8 4.5 5.0 5.5 5.9 Product Weight: In-line Motor Type

Air Cylinder

, 50, 75, 100, 125, 150, 200 MB 40, 50, 63 25, 50, 75, 100, 125, 150, 200, 250, 300 Please consult with SMC for strokes which exceed the standard stroke length.

MHZ

0.5 MPa 0.5 MPa 6 MHY 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MPa 0.35 MPa 100 0.35 MPa 4 0.3 MPa 0.3 MPa MHW 50 2 L MRHQ 0 10 20 30 40 50 60 0 50 100 150 Misc.

MHZ

0.5 MPa 0.5 MPa 6 MHY 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MPa 0.35 MPa 100 0.35 MPa 4 0.3 MPa 0.3 MPa MHW 50 2 L MRHQ 0 10 20 30 40 50 60 0 50 100 150 Misc.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Mounting bolt C' D' 45 50 55 60 65 70 50 55 60 65 70 75 55 60 65 70 75 80 85 90 95 100 55 60 65 70 75 80 85 90 95 100 55 60 65 70 75 80 85 90 95 100 125 150 D 40 45 50 55 60 65 45 50 55 60 65 70 45 50 55 60 65 70 75 80 85 90 45 50 55 60 65 70 75 80 85 90 60 65 70 75 80 85 90 95 100 105 130 155 D 55 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 130 155 65 70

Compact Cylinder

10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B40-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 55 60 65 70 75 80 85 90 95 100 110 130 150 55 60 65 70 75 80 85 90 95 100 110 130 150 M6 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110 l x 130 l x 150 l M5 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110