Process Pump Series PA3000/5000/PAX1000 Series PB1000

Since the marked point is below the curve for 50l/min (ANR), the maximum rate will be about 50l/min (ANR).

PA3000/5000/PAX1000

Since the marked point is below the curve for 50l/min (ANR), the maximum rate will be about 50l/min (ANR).

Digital Flow Switches, Series PF2A, Series PF2W

SET MODE SD SG RD RS-232C COM S.STOP OUT1OUT2OUT3OUT4OUT5 AC100~240V Pulse counter M/C Flow control for each branch line For Air P.2 50l/min 10l/min 500l/min 200l/min 100l/min 12000l/min 6000l/min 3000l/min Flow rate measurement range l/min Integrated display type Remote type Output specifications Port size (Rc, NPT, G) 1/8 1/4 3/8 1/2 11/2 1 2 Switch output Analog output Accumulated pulse

Slider Type Ball Screw Drive/11-LEFS Series

[mm] Dimensions Model L A B n D E Without lock With lock 11-LEFS32l-50l 332 384 56 180 4 11-LEFS32l-100l 382 434 106 230 4 11-LEFS32l-150l 432 484 156 280 4 11-LEFS32l-200l 482 534 206 330 6 2 300 11-LEFS32l-250l 532 584 256 380 6 2 300 11-LEFS32l-300l 582 634 306 430 6 2 300 11-LEFS32l-350l 632 684 356 480 8 3 450 11-LEFS32l-400l 682 734 406 530 8 3 450 11-LEFS32l-450l 732 784 456

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Model L A B n D E F LEFS25lll-50l 210.5 56 160 4 20 LEFS25lll-100l 260.5 106 210 4 LEFS25lll-150l 310.5 156 260 4 LEFS25lll-200l 360.5 206 310 6 2 240 LEFS25lll-250l 410.5 256 360 6 2 240 LEFS25lll-300l 460.5 306 410 8 3 360 LEFS25lll-350l 510.5 356 460 8 3 360 LEFS25lll-400l 560.5 406 510 8 3 360 LEFS25lll-450l 610.5 456 560 10 4 480 LEFS25lll-500l 660.5 506 610 10 4 480 LEFS25lll-

Made to Order

absorber SD Stroke adjustment unit FA FB W Adjustment bolt ED TT h E EA EC ED EY FA FB h S T SD TT W Shock absorber model Adjustment range Adjusting bolt Applicable cylinder MY2H16 MY2H25 MY2H40 RB0806 5.6 M5 x 0.8 x 25L 15.8 8.4 6.2 5 28 12.4 30 3.2 40.8 6 1.3 4.2 (Max. 9.8) 34.5 RB1007 11.5 M8 x 1.0 x 35L 19.6 10.6 10 5.5 37 19.3 44.8 4 46.7 7 5 (Max. 16.5) 47.3 RB1412 16 M10 x 1.0 x 50L

Compact Cylinder with Solenoid Valve/

D (mm) (mm) Cylinder model C D Mounting bolt size Cylinder model C D Mounting bolt size CVQM5010 CVQM325 45 M5 x 45L M6 x 60L 60 15 10 45 x 45L x 60L 60 20 15 50 x 50L x 65L 65 25 20 55 x 55L x 70L 70 30 25 60 x 60L x 75L 75 35 30 65 x 65L 12.5 x 80L 80 9 40 35 70 x 70L x 85L 85 45 40 75 x 75L x 90L 90 50 45 80 x 80L x 95L 95 75 50 85 x 85L x 120L 120 -100 75 110 x 110L x 145L 145 CVQM6310

Compact Cylinder with Air Cushion

Example) Bolt M5 x 50l 4 pcs.

MK

Operating range RB Model C 8 8 8 8 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 x 50l M3 x 60l M3 x 50l M3 x 60l M5 x 75l M5 x 85l M5 x 75l M5 x 85l M5 x 85l M5 x 95l M5 x 75l M5 x 85l M6 x 95l M6 x 130l M8 x 100l M8 x 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50

Table of Contents

Operating range RB Model C 8 8 8 8 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 x 50l M3 x 60l M3 x 50l M3 x 60l M5 x 75l M5 x 85l M5 x 75l M5 x 85l M5 x 85l M5 x 95l M5 x 75l M5 x 85l M6 x 95l M6 x 130l M8 x 100l M8 x 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50

RQ

Example) Bolt M5 x 50l 4 pcs.

3

Cylinder model Hexagon wrench key MKB12-10Z -20Z -30Z MKB16-10Z -20Z -30Z MKB20-10Z -20Z -30Z MKB25-10Z -20Z -30Z MKB32-10Z -20Z -30Z -50Z MKB40-10Z -20Z -30Z -50Z MKB50-10Z -20Z -30Z -50Z MKB63-10Z -20Z -30Z -50Z CQ-M3 x 50L x 60L x 70L CQ-M3 x 50L x 60L x 70L CQ-M5 x 75L x 85L x 95L CQ-M5 x 75L x 85L x 95L CQ-M5 x 85L x 95L x 105L x 125L CQ-M5 x 80L x 90L x 100L x 120L CQ-M6 x 90L x 100L

Table of Contents

Vacuum suction port 50l/min (ANR) Suction flow rate For basic specifications such as allowable moment, refer to the "Standard motor" pages for equivalent products listed on Features pages 1 and 2. 104 105 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Made to Order

Electric Actuators

Suction at both ends. 50l/min (ANR) 100l/min (ANR) Suction flow rate For basic specifications such as allowable moment, refer to the "Standard motor" pages for equivalent products listed on Features pages 1 and 2. 106 Made to Order/Clean Room Specification Series LJ1H20 Dimensions/LJ1H202 (X60) Scale: 15% When two dimensions are shown, the top dimension is for 100 to 600mm strokes, and the

LJ1H

Vacuum suction port 50l/min (ANR) Suction flow rate For basic specifications such as allowable moment, refer to the "Standard motor" pages for equivalent products listed on Features pages 1 and 2. 104 105 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Made to Order

Hydraulic

Example: M5 x 50l 4pcs.

MK

C 8 8 8.5 8.5 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 X 50l M3 X 60l M3 X 50l M3 X 60l M5 X 75l M5 X 85l M5 X 75l M5 X 85l M5 X 85l M5 X 95l M5 X 75l M5 X 85l M6 X 95l M6 X 130l M8 X 100l M8 X 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50 PTo attach and detach

Compact Cylinder with Air Cushion Series RQ

Example) Bolt M5 x 50l 4pcs.

Battery-less

. *3 Position after returning to origin *4 [ ] for when the direction of return to origin has changed Dimensions [mm] Model L A B n D E F Without lock With lock LEFS25El-50l 285.5 330.5 56 160 4 20 LEFS25El-100l 335.5 380.5 106 210 4 LEFS25El-150l 385.5 430.5 156 260 4 LEFS25El-200l 435.5 480.5 206 310 6 2 240 LEFS25El-250l 485.5 530.5 256 360 6 2 240 LEFS25El-300l 535.5 580.5 306 410

CLS

The lock is released by screwing in the manual release bolt until the white mark of the lock monitor on the top of the brake cylinder moves to the FREE position. 140 160 180 200 250 Bore size (mm) 125 M6 x 1.0 x 35l M6 x 1.0 x 40l M8 x 1.25 x 40l M10 x 1.5 x 50l M10 x 1.5 x 55l M12 x 1.75 x 70l Manual release bolt Screw depth 30 32 35 40.5 45 55 In the case the manual release bolt is not