High Vacuum Angle Valve

(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

Microspeed Cylinder

A90 A90V No Reed switch Solid state switch 2 wire 24V A93 A93V Grommet 100V 12V Yes 3 wire (NPN equiv.)

Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

CJ2X/CUX/CQSX/CQ2X/CM2X

AC DC Auto switch model Lead wire length (m) Load voltage Indicator light Wiring (Output) Pre-wire connector Special function Type Electrical entry Applicable load 0.5 (Nil) 3 (L) 5 (Z) Perpendicular In-line 3-wire Reed switch Solid state switch A96V A96 5 V IC circuit Grommet (NPN equivalent) Yes Yes Relay, PLC 100 V 24 V 12 V A93 M9N M9P M9B F9NW F9PW F9BW A93V M9NV M9PV M9BV F9NWV

CJ2X/CUX/CQSX/CQ2X/CM2X

AC DC Auto switch model Lead wire length (m) Load voltage Indicator light Wiring (Output) Pre-wire connector Special function Type Electrical entry Applicable load 0.5 (Nil) 3 (L) 5 (Z) Perpendicular In-line 3-wire Reed switch Solid state switch A96V A96 5 V IC circuit Grommet (NPN equivalent) Yes Yes Relay, PLC 100 V 24 V 12 V A93 M9N M9P M9B F9NW F9PW F9BW A93V M9NV M9PV M9BV F9NWV

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Residence time of water at 20C is 5.5 x 10-6sec, whereas at 150C is 2.8 x 10-8 sec, or 200 times shorter.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Piston rod Table (2) MXP6 MXP10/12/16 L2 L2 L2 (mm) 10 (One side only) 10 (One side only) 9 8 8 8 8 8 Model MXP6-5C MXP6-10C MXP10-10C MXP10-20C MXP12-15C MXP12-25C MXP16-20C MXP16-30C Damage is not allowed. 3. Shock absorber is considered a consumable component. When energy absorption is decreased, replace it.

Table of Contents - Tubing

Note 3) The value at a temperature of 20C.

MX-OMP0051

)MXQ6B MXQ6(C) Nm MXQ6(A) RJ0603 0.85 MXQ8(A,C) MXQ6B RJ0603 0.85 MXQ12(A,C) MXQ8B RJ0805 1.67 MXQ16(A) MXQ12B RJ1006 3.14 MXQ20(A) MXQ16B RJ1007H 3.14 MXQ25(A) MXQ20B RH1410 10.8 12 2-8 kg RJ MXQ6(A) 0.6 0.6 0.6 MXQ8(A,C) 1 1 1 1 MXQ12(A,C) 2 2 2 1 MXQ16(A) 4 4 4 2.5 MXQ20(A) 6 6 6 5 MXQ25(A) 9 9 9 5.5 2 45 3 , , 13 OFF MXQ6(A) 2.85 5.65 MXQ8(A,C) 2.4 5.6 MXQ12(A,C) 4 5.5 MXQ16(A) 5

Slide Tables MX Series

Shock absorber RB0805 RB0806 RB1007 RB1411 RB1412 Applicable size MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 4.Follow the table for tightening torque of shock absorber lock nuts.

CE

(at 20C) Data 10-12-9 9 Series CEP1 Proper Auto Switch Mounting Position Weight (Without mounting bracket/connector) (kg) Regarding dimensions for the proper auto switch mounting position (at stroke end), refer to page 1012-16.

CE

(at 20C) Data 10-12-9 9 Series CEP1 Proper Auto Switch Mounting Position Weight (Without mounting bracket/connector) (kg) Regarding dimensions for the proper auto switch mounting position (at stroke end), refer to page 1012-16.

Stroke Reading Cylinder and Counter

Consult with SMC regarding water resistant types with the above model numbers. 2 1 m type lead wire is only applicable to D-A93. Solid state auto switches marked with are produced upon receipt of order.

Table of Contents

-300L-A93-X168 (Example) MY2H40G-599L-A93-XB10 Symbol Symbol 2 Long Stroke -XB11 4 Copper-free 20Available with long strokes exceeding the standard strokes.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

-X Body option Nil M Standard (Rod end female thread) Rod end male thread Cushion 20C Rubber bumper Piping Data Action Screw-in piping Built-in One-touch fittings Note) Nil F D Double acting Note) Bore sizes available w/ One-touch fittings are 32 to 63. Cylinder stroke (mm) Refer to Standard Stroke on page 7-6-122.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

-300L-A93-X168 (Example) MY2H40G-599L-A93-XB10 Symbol Symbol 2 Long Stroke -XB11 4 Copper-free 20Available with long strokes exceeding the standard strokes.

CE

Applicable models: D-A73, A73H, D-A93, A93V 2) Note however, that in the case of 2 color indicator type auto switches (D-A79W), if the wiring is reversed, the the switch will be in a normally ON condition.

01-mxq-e

MXQ6-PS 6 8 12 16 20 25 MXQ6-PS MXQ8-PS MXQ12-PS MXQ16-PS MXQ20-PS MXQ25-PS !8 !9 @0 Piston seal MXQ8-PS Rod seal NBR MXQ12-PS Set of left nos. !8, !9, @0 O-ring MXQ16-PS With end lock MXQ20-PS MXQ25-PS #3 #4 #5 #6 Piston seal Rod seal Replacement Parts: Seal Kit for with End Lock Kit no.

01-mxqr-e

MXQ6-PS MXQ8-PS 6 8 12 16 20 25 MXQ6-PS MXQ8-PS MXQ12-PS MXQ16-PS MXQ20-PS MXQ25-PS !8 !9 @0 Set of left nos. !8, !9, @0 Piston seal Rod seal NBR MXQ12-PS O-ring MXQ20-PS MXQ16-PS MXQ25-PS Seal kit includes these seals to provide as a set. Order the seal kit, based on each bore size. Replacement Parts: Grease Pack Grease pack part no.

Bore Size: 12mm, Symmetric Type: Standard, Stroke: 20mm, Adjuster: Both Side Adjusters/Metal Stoppers, Function: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -