Bore Size: 12mm, Symmetric Type: Standard, Stroke: 40mm, Adjuster: C (Both Side Adjusters/Metal Stoppers), Function: Standard, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

Bore Size: 12mm, Symmetric Type: L (Symmetric), Stroke: 10mm, Adjuster: AS (Adjuster at Forwarding End/Rubber Stopper), Function: Standard, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

Bore Size: 12mm, Symmetric Type: Symmetric, Stroke: 10mm, Adjuster: Adjuster at Forwarding End/Rubber Stopper, Function: Standard, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -

Bore Size: 12mm, Symmetric Type: Symmetric, Stroke: 20mm, Adjuster: Both Sides Adjusters/Rubber Stoppers, Function: Standard, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -

Bore Size: 12mm, Symmetric Type: Symmetric, Stroke: 10mm, Adjuster: Both Side Adjusters/Metal Stoppers, Function: Standard, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -

Bore Size: 12mm, Symmetric Type: L (Symmetric), Stroke: 20mm, Adjuster: A (Both Sides Adjusters/Rubber Stoppers), Function: Standard, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

Bore Size: 12mm, Symmetric Type: L (Symmetric), Stroke: 10mm, Adjuster: C (Both Side Adjusters/Metal Stoppers), Function: Standard, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

2

IDF1E IDF2E IDF3E IDF4E IDF6E IDF8E IDF11E IDF15E1 IDF22E IDF37E IDF55E IDF75E 0.75 1.5 2.2 3.7 5.5 7.5 11 15 22 37 55 75 Rc3/8 Rc1/2 35C 0.7 MPa Rated inlet condition Applicable air compressor (kW) Port size Model Rc3/4 IDF100F IDF125F IDF150F IDF190D IDF240D R2 65 (2 1/2B) Flange 100 125 150 190 240 Rc1 R1 R1 1/2 IDFE 40C 0.7 MPa 80 (3B) Flange 40C 0.7 MPa 100 (4B) Flange R2 35C 0.7 MPa

Table of Contents

Symbol L Standard dew point (N) 40 Port size Symbol Bore Size Thread type 30 50 60 75 100 Rc NPT G Nil N F 02 1/4 03 3/8 04 1/2 Standard Specifications/Single Unit Type (Standard dew point: 40C) Model Standard dew point: 40C IDG30L IDG50L IDG60L IDG75L IDG100L Compressed air Fluid Range of operating conditions Standard performance conditions Inlet air pressure (MPa) 0.3 to 1.0 IDG30L

Thermo-chiller/Rack Mount Type

0.99 4.18 x 103 0.99 1 x 103 40C 1.01 3.92 x 103 1.01 0.94 x 103 * Shown above are reference values.

Series IDG

(-40C) Note) Standard purge Low dew point Low dew point Low purge Note) Standard purge rate: 35% Note) Standard purge rate: 20% Note) Standard purge rate: 25% Note) Standard purge rate: 10% IDG1 is not available with standard dew point 15C.

IDG

Symbol L Standard dew point (N) 40 Port size Symbol Bore Size Thread type 30 50 60 75 100 Rc NPT G Nil N F 02 1/4 03 3/8 04 1/2 Standard Specifications/Single Unit Type (Standard dew point: 40C) Model Standard dew point: 40C IDG30L IDG50L IDG60L IDG75L IDG100L Compressed air Fluid Range of operating conditions Standard performance conditions Inlet air pressure (MPa) 0.3 to 1.0 IDG30L

TABLE OF CONTENTS

Valve Temperature Range: Standard Valves 0F ( 18C) to 104F (40C) ambient; 0F ( 18C) to 150F (65C) media. Optional Valves can tolerate much higher or much lower ambient and media temperatures.

1

XB6 Luberetainer Heat resistant cylinder Symbol JA 2 Cold Resistant Cylinder (40 to 70C) -XB7 MXH Air cylinder which changed the seal material and grease, so that it could be used even at lower temperature down to 40C.

Table of Contents

Maximum operating pressure 100 kPa Operating vacuum pressure Proof pressure Ambient and fluid temperature 3.0 MPa 0 to 40C Uni thread JIS B 0209 Class 2 (Metric coarse thread) Gasket Thread Seal (Thread portion) Brass parts are all electroless nickel plated.

Electric Actuator/Slider Type

] 41 to 104F [95 to 40C] Operating humidity range [%RH] 90 or less (No condensation) 90 or less (No condensation) Conditions for Regenerative resistor [kg] Actuator specications Max.

Thermo-chiller

0.99 4.18 x 103 0.99 1 x 103 40C 1.01 3.92 x 103 1.01 0.94 x 103 * Shown above are reference values.

Table of Contents

Unit Series AC20C to 40C Dimensions AC20C A Pressure gauge port size G Q F E T L P B C H IN OUT U H L J Pressure gauge (Option) F.R.L.

Electric Actuators

5 to 40C 5 to 40C 5 to 40C Electric power 180VA 300VA 300VA 300VA 640VA 180VA 300VA 640VA 180VA 300VA 640VA 640VA Control system AC software servo/PTP control Position detection system Incremental encoder Home position return direction Maximum positioning point setting Can be selected between the motor side and the side opposite the motor. 1008 points (when step designation is actuated)

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*Power supply 100 V type: 35C Power supply 200/230 V type: 40C 2.