Rotary Table/

A93 A93L F9NWZ (Example) (Example) (Example) 13 Rotary Table Series MSQ Specifications 10 20 30 50 70 100 200 Size Air (non-lube) Fluid Maximum operating pressure Minimum operating pressure 1MPa With adjustment bolt Note 1) 0.6MPa With internal shock absorber 0.1MPa Basic type 0.2MPa 0.1MPa High precision type 0 to 60C (with no condensation) Ambient and fluid temperature Rubber bumper With

2

gauge Operating time accumulator 20 M Evaporation thermometer Condensed pressure gauge Operating time accumulator Reset switch L Filter check lamp 935 O 4 x 20 Dimensions (mm) Facility water inlet/outlet Q A B C O D E F G K L M P R S T U Model Port size IDF125F IDF125F-W IDF150F IDF150F-W 1130 JIS flange 65A 10K 700 1120 1276 267 655 1375 350 376 712 78 752 885 R1/2 479 1120 127 36 129 1300

Compact

(1100), (1200), (1300), (1400), (1500) Page 170 2000 20 32 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600, (700), (800), (900), (1000) Page 170 2000 25 10 LEMHT Linear guide double axis type 48 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600, (700), (800), (900), (1000), (1100), (1200), (1300), (1400), (1500) Page 170 32 2000 20 Strokes shown in ( ) are produced upon

Electric Actuator/Slider Type

Weight Series LEFB25 Stroke [mm] 300 400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 Product weight [kg] 3.06 3.31 3.56 3.81 4.06 4.31 4.56 4.81 5.06 5.31 5.56 5.81 6.06 6.31 6.56 6.81 7.06 7.31 Additional weight with lock [kg] 0.3 Series LEFB32 Stroke [mm] 300 400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2500 Product weight

15

Model LEFB25 LEFB32 LEFB40 300, 400, 500 600, 700, 800 900, 1000, (1100) 1200, (1300, 1400) 1500, (1600, 1700) (1800, 1900), 2000 2500 300, 400, 500 600, 700, 800 900, 1000, (1100) 1200, (1300, 1400) 1500, (1600, 1700) (1800, 1900), 2000 2500, 3000 300, 400, 500 600, 700, 800 900, 1000, (1100) 1200, (1300, 1400) 1500, (1600, 1700) (1800, 1900), 2000 LEF Stroke [mm] Note 1) LEJ Actuator specifications

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

LEC S LEC SS-T LEC Y LEC Y Motorless LAT LZ Weight LC3F2 Series LEFB25 Stroke [mm] 300 400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 Product weight [kg] 3.06 3.31 3.56 3.81 4.06 4.31 4.56 4.81 5.06 5.31 5.56 5.81 6.06 6.31 6.56 6.81 7.06 7.31 Additional weight with lock [kg] 0.3 Series LEFB32 Stroke [mm] 300 400 500 600 700 800 900 1000 1100 1200 1300 1400

25

Nil P NPN PNP Bar length (mm) 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 With 2 pcs. 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 Since input/output function cannot be used, specify Nil when the AC adapter is being used.

IDU/IDF

Refrigerant Air connection 300 2.2 IDU3D 350 Series IDU High inlet air temperature type Rated temperature of 50 to 60C Rc 3/8 60C 430 3.7 IDU4D 500 Small Medium Small Medium Large R134a 1 to 4 R 1/2 640 5.5 IDU6D 750 55C R 3/4 Air cooled Air cooled 850 7.5 IDU8D 1000 IDU11D R134a 1300 11 R 3/4 1500 IDU11C 1300 55C 2400 IDU15C 15 2050 R 1 3700 IDU22C/22C1 22 3150 R22 5 to 8 6100 IDU37C/37C1

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Maximum 100 to 1300 st 4999.1 17.2% Maximum 80 to 1200 st CX Maximum 63 to 1100 st Maximum 50 to 1000 st DMaximum 40 to 800 st Maximum 32 to 600 st Maximum 25 to 500 st -X Maximum 20 to 400 st 20Data 20: 75 to 200 st 25 to 100: 75 to 300 st Simple adjustment

Table of Contents

) (1300) (1300) (1300) 60 60 1.

Refrigerated Air dryer Series IDU/IDF

Refrigerant Air connection 300 2.2 IDU3D 350 Series IDU High inlet air temperature type Rated temperature of 50 to 60C Rc 3/8 60C 430 3.7 IDU4D 500 Small Medium Small Medium Large R134a 1 to 4 R 1/2 640 5.5 IDU6D 750 55C R 3/4 Air cooled Air cooled 850 7.5 IDU8D 1000 IDU11D R134a 1300 11 R 3/4 1500 IDU11C 1300 55C 2400 IDU15C 15 2050 R 1 3700 IDU22C/22C1 22 3150 R22 5 to 8 6100 IDU37C/37C1

MY1

Also, for long stroke operation involving vibration and impact, use of a side support is recommended even if the spacing value is within the allowable limits shown in the graph. 100 90 (1500) (1500) (1500) (1500) 80 MY1M50 MY1M50 MY1M50 MY1M50 l l 70 MY1M40 MY1M40 MY1M40 MY1M40 (1300) (1300) (1300) (1300) 60 50 MY1M32 MY1M32 MY1M32 MY1M32 (1100) (1100) (1100) (1100) 40 2.

MGG

Bore size (mm) Stroke range (mm) Bore size (mm) Bracket mounting stroke 63 80 100 63 80 100 350 to 1100 300mm or more 350 to 1200 400mm or more 350 to 1300 500mm or more 26 Series MGG Dimensions Front mounting flange type/MGGF 20 to 50 M N HR HN (max.)

Electric Actuator Triple Axis P&P Unit

Unit Configuration Examples XYZ axes YZ axes Xaxis Yaxis Zaxis 1 Triple Axis P&P Unit How to Order Combination LG 240Z A0 50 20 X L E G J ZB D C Y Axis type X X axis Stroke(mm) 100 10 Ball screw specifications Axis type Z axis Rolled ball screw(mm) 15, lead 20 900 1000 1100 1200 1300 1400 1500 Symbol C 90 A0 B0 C0 D0 E0 F0 Motor specifications Motor specifications Mitsubisi Electric Corporation

Magnet: Built-in, Mounting: Basic, Cushion: Air Cushion, Bore Size: 2", Stroke: 13", Auto Switch: H7A2--Solid State, Gen. Purpose, 3 Wire PNP, Lead Wire, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: 2 pcs. (Or None in the Case of No Switch), Speed Control Type: Right Angle, Applicable Tubing: 1/4", Suffix: Required Selection w/Speed Control

Series AP3100

psig (9.0 MPa) 3000 psig (20.7 MPa) 1) 1300 psig (9.0 MPa) 1300 psig (9.0 MPa) 00 02 25 50 57 2PW Multi turn round knob Specification Code No code 1/4 turn lever knob 1/4 turn round knob Connections (Inlet, Outlet) Indicator switch Handle 4) ISH Code Connections 1/4 inch face seal (Female) 1/4 inch face seal (Male) 3/8 inch tube weld 1/2 inch face seal (Female) 1/2 inch face seal (Male)

Pneumatic Purification

(Rochester) 245 Summit Point Drive Henrietta, NY 14467 Tel: (716) 321 1300 Fax: (716) 321 1865 SMC Pneumatics Inc. (Houston) 9001 Jameel Suite 180 Houston, TX 77040 Tel: (713) 460 0762 Fax: (713) 460 1510 SMC Pneumatics Inc.

Table of Contents

1300 1268 1258 1978 2278 1550 2160 2770 2558 3288 1000 945 1340 1340 1100 1550 1650 1700 1700 550 645 740 740 750 750 750 850 850 6 9 9 9 12 12 12 16 16 460 665 693 693 1162 1162 1162 1416 1416 19 19 19 19 19 19 19 27 27 80 M16 x l 250 M16 x l 250 M16 x l 250 M16 x l 300 M16 x l 300 M16 x l 300 M16 x l 500 M24 x l 500 M24 x l 500 AT6C AT11C AT22C AT37C AT55C AT75C AT125C AT150C AT220C 1

RSH/RS1H

REC RSH20, 32 Graph (1) Graph (2) 1.0 CX RSH20 RSH32 0.9 Bore size 50, 63, 80/ = 0 Bore size 50, 63, 80/ = 0.1 Operating pressure P [MPa] CY 0.8 1300 1300 80 0.7 1200 1200 MQQ M 0.6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1100 1100 0.5 RHC 1000 1000 0.4 900

MY1

Support brackets are not for mounting; use them solely for providing support. m 100 90 (1500) (1500) (1500) (1500) 80 MY1M50 MY1M50 MY1M50 MY1M50 MY1M50 MY1M50 l l 70 MY1M40 MY1M40 MY1M40 MY1M40 (1300) (1300) (1300) (1300) 60 50 MY1M32 MY1M32 MY1M32 MY1M32 (1100) (1100) (1100) (1100) 40 MY1M25 MY1M25 MY1M25 MY1M25 MY1M25 MY1M25 30 (1000) (1000) (1000) (1000) MY1M20 MY1M20 MY1M20 MY1M20 MY1M20