2

400 1600 0.00 0 1000 600 800 400 200 1200 Inlet air flow rate (L/min [ANR]) Inlet air flow rate (L/min [ANR]) Standard dew point40C [Symbol: L], 60C [Symbol: S] IDG30LA IDG50LA P1 = 0.3 MPa 0.08 P1 = 0.3 MPa 0.03 Pressure drop (MPa) Pressure drop (MPa) 0.06 P1 = 0.5 MPa P1 = 0.5 MPa 0.02 0.04 P1 = 0.7 MPa 0.01 P1 = 0.7 MPa 0.02 0 200 400 600 800 0 100 200 300 400 500 Inlet air flow rate

Air Cylinder

Load voltage Auto switch model Lead wire length (m) Pre-wired connector Applicable load Applicable bore size Indicator light Type Special function Electrical entry Wiring (Output) DC AC 20 to 63 80, 100 0.5 (Nil) 1 (M) 3 (L) 5 (Z) None (N) Perpendicular In-line In-line M9NV M9N IC circuit 3-wire (NPN) G59 5 V, 12 V 3-wire (PNP) M9PV M9P G5P Grommet 2-wire 12 V M9BV M9B K59 Connector H7C

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

RY RT [mm] Bore size [mm] Stroke range [mm] A AL B B1 BN BP BQ C D E F GA GB GC GD GL GR Without rod boot With rod boot 40 Up to 800 20 to 800 30 27 60 22 96 1/4 1/4 44 16 32 10 85 15 26 54 10 10 50 Up to 1200 20 to 1200 35 32 70 27 108 1/4 1/4 52 20 40 10 95 17 27 59 13 12 63 Up to 1200 20 to 1200 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 26 67 18 15 80 Up to 1400 20 to 1400 40 37 102 32

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Support brackets are not for mounting; use them solely for providing support. (1400) (1400) (1400) (1400) (1400) (1400) MY1CW40 MY1CW40 MY1CW40 50 50 MY1MW32 MY1MW32 MY1MW32 MY1CW32 MY1CW32 (1100) (1100) (1100) (1100) 40 40 (1200) (1200) (1200) (1200) (1200) (1200) MY1MW25 MY1MW25 MY1MW25 MY1CW25 MY1CW25 MY1CW25 30 (1000) (1000) (1000) (1000) 30 MY1MW20 MY1MW20 MY1MW20 (1000) (900) (1000)

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Support brackets are not for mounting; use them solely for providing support. (1400) (1400) (1400) (1400) (1400) (1400) MY1CW40 MY1CW40 MY1CW40 50 50 MY1MW32 MY1MW32 MY1MW32 MY1CW32 MY1CW32 (1100) (1100) (1100) (1100) 40 40 (1200) (1200) (1200) (1200) (1200) (1200) MY1MW25 MY1MW25 MY1MW25 MY1CW25 MY1CW25 MY1CW25 30 (1000) (1000) (1000) (1000) 30 MY1MW20 MY1MW20 MY1MW20 (1000) (900) (1000)

Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

CX DSymbol Specifications 1200 -XB11 Long stroke (2001 mm and up) -X -XB13 Low speed specifications (7 to 50 mm/s) 1100 40 40 -X116 Hydro specifications 20-X132 Axial ports 1000 -X160 High speed specifications Data 900 -X168 Helical insert thread specifications -X206 Added mounting tap positions for slider Theoretical thrust (N) 800 -X210 Oil-free exterior specifications -X322 Outside of

5

or less 1200 or less 1600 or less -XC68 Made of stainless steel (with hard chrome plated piston rod) -XC86 With rod end bracket Accessories/For details, refer to page 221.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

In-line In-line Perpendicular Perpendicular 3-wire (NPN equivalent) IC circuit 5V A76H A96 A96V Grommet A72H A73H 200 V A72 A73 A73C A93 A93V Reed switch Solid state switch Yes 100 V Relay, PLC 2-wire 12 V 24 V Connector Diagnostic indication (2-color indication) A79W Grommet F7NV F7PV F7BV J79C F7NWV F7BWV F7BAV 3-wire (NPN) 3-wire (PNP) F79 F7P J79 F79W F7PW J79W F7BA M9N M9P

•

or less 1200 or less 1600 or less -XC27: Double clev!

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Perpendicular 3-wire (NPN equivalent) IC circuit 5V A96V A76H A96 Grommet A72H A73H 200 V A72 A73 A73C A93V A93 Reed switch Solid state switch Yes 100 V Relay, PLC 2-wire 12 V 24 V Connector Diagnostic indication (2-color indication) A79W Grommet F7NV F7PV F7BV J79C F7NWV F7BWV F7BAV 3-wire (NPN) 3-wire (PNP) F79 F7P J79 F79W F7PW J79W F7BA M9NV M9PV M9BV F9NWV F9PWV F9BWV M9N M9P

Magnet: D (Built-in), Mounting: L (Foot), Cushion: A (Air Cushion), Bore Size: 40 (1 1/2"), Stroke: 1200 (12")

Magnet: Built-in, Mounting: Foot, Cushion: Air Cushion, Bore Size: 1 1/2", Stroke: 12", Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

15

400 600 800 1000 1200 1400 1600 Stroke [mm] Stroke [mm] [Graph 7] Allowable load mass by stroke 40 100 y, z + A = 0 y, z + A = 50 Load mass [kg] y, z + A = 100 y, z + A = 200 10 y, z + A = 300 1 0 200 400 600 800 1000 1200 1400 1600 If load center of gravity exceeds the value of y, z + A on the graph, please consult SMC.

MY1

) (1200) (1200) (1200) MY1MW25 MY1MW25 MY1CW25 MY1CW25 (1000) (1000) (1000) (1000) MY1MW20 MY1MW20 30 30 (1000) (900) (1000) (900) (1000) (1000) Caution MY1CW20 MY1CW20 MY1CW16 MY1MW16 MY1MW16 MY1CW16 (900) (900) (900) (900) (900) (900) 20 20 1.

REA/REB

For 10, 15, 20 CE2 Lead wire length (m) Load voltage Indicator light Pre-wire connector Special function Type Electrical entry Wiring (Output) ML2B Applicable load AC DC Auto switch model 0.5 (Nil) 3 (L) 5 (Z) 3-wire C J G5-S Reed switch Solid state switch Reed switch Solid state switch A96 5 V IC circuit Yes Yes Grommet (NPN equivalent) 100 V 24 V 12 V A93 M9N M9P M9B F9NW F9PW F9BW 3-

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Standard Stroke Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 16 100, 200, 300, 400, 500, 600, 700, 800, 900 1000, 1200, 1400, 1600, 1800, 2000 3000 25, 40 5000 Strokes are manufacturable in 1 mm increments, up to the maximum stroke. When exceeding a 2000 mm stroke, specify -XB11 at the end of the model number.

XL-OMY0002

/350 / AC200V 2400/150 3200/220 4800/350 XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 2 3 4 H5 AC100V 800/180 1200/300 1600/400 / AC200V 3200/180 4800/300 6400/400 1 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0002 . 1 S 12 ( SUS304 M 3 M SUSU316L 8 11 SUS304 2 7 A6063 6 9 6 9 10 9 5 SUS304 4 5 10 4 10 S O S O XLD-25 XLD-40,XLD-50,XLD-160 XLD

REA/REB

For 10, 15, 20 CE2 Lead wire length (m) Load voltage Indicator light Pre-wire connector Special function Type Electrical entry Wiring (Output) ML2B Applicable load AC DC Auto switch model 0.5 (Nil) 3 (L) 5 (Z) 3-wire C J G5-S Reed switch Solid state switch Reed switch Solid state switch A96 5 V IC circuit Yes Yes Grommet (NPN equivalent) 100 V 24 V 12 V A93 M9N M9P M9B F9NW F9PW F9BW 3-

Basic Type/Direct Mount Type

Caution Theoretical Cylinder Thrust 6, 10 15, 20, 25, 32, 40 50, 63 CY3B CY3R CY3B CY3R CY1S 63 63 1200 40 40 1100 3000 100 90 80 70 60 50 40 30 20 10 Theoretical thrust (holding force) (N) Theoretical thrust (holding force) (N) Theoretical thrust (holding force) (N) H CY1L Bore size 10 Bore size 2500 1000 900 800 700 10 50 50 H 32 32 2000 CY1H 1500 600 25 25 500 400 300 200 100 CY1F 1000