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New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2

Microspeed Cylinder: Double Acting/Single Rod Series CQ2X ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Standard strokes (mm) Bore sizes (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 32, 40 50, 63 80, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Example) For CQ2XB40-57D, an 18mm spacer is installed inside a standard stroke CQ2XB40-75D cylinder. Specific Product Precautions Be sure to read before handling. Refer to pages 15 to 24 for safety instructions and precautions.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Example) For 10-CQ2XB40-57D, an 18mm spacer is installed inside a standard stroke 10-CQ2XB40-75D cylinder. Manufacturing intermediate strokes Intermediate strokes can be manufactured in 1mm increments by installing spacers in a standard stroke cylinder. The total length of the cylinder is the same as the longer standard stroke.

This is a legacy product, and replaced byMXH6-5Z-M9PL, CYL, COMPACT SLIDE TABLE, ACTUATOR, MXH HIGH RIGIDITY GUIDE CYL, CE, 6MM MXH DBL-ACT AUTO-SW, .27557 lb, ModelBore size (mm)Standard stroke (mm)Made to Order 51015202530405060MXH66------------------XB13 : Low-speed cylinder (5 to 50 mm/s)XC3 : Special port positionsXC19 : Intermediate stroke (Spacer type)XC22 : Fluororubber

This is a legacy product, and replaced byMDUB40-40DZ-M9PL

This is a legacy product, and replaced byNCDQ2A63-25DCZ-M9PL

Air-Actuated Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: NW, Flange Size Nominal: 25, Seal Type: Bellows Seal, Valve Type: Angle type, Indicator: No indicator, Pilot Port Direction: Flange side, Temperature Range(°C): 5 to 60, Switch Part Number: D-M9PL

Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: NW, Flange Size Nominal: 25, Seal Type: Bellows Seal, Valve Type: In-line type, Indicator: No indicator, Pilot Port Direction: Flange surface, back, Temperature Range(°C): 5 to 60, Switch Part Number: D-M9PL

Ball Screw Lead: 12mm, Stroke: 25mm, Origin Switch: None, Auto Switch: M9PL--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, 3M, Quantity 1: 2 pcs.

Ball Screw Lead: 12mm, Stroke: 25mm, Origin Switch: Yes (Cable Length 0.3m), Auto Switch: M9PL--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, 3M, Quantity 1: 2 pcs.

Ball Screw Lead: 6mm, Stroke: 75mm, Origin Switch: Yes (Cable Length 0.3m), Auto Switch: M9PL--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, 3M, Quantity 1: 1 pc.

Ball Screw Lead: 12mm, Stroke: 25mm, Origin Switch: None, Auto Switch: M9PL--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, 3M, Quantity 1: 3 pcs.

Ball Screw Lead: 12mm, Stroke: 50mm, Origin Switch: None, Auto Switch: M9PL--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, 3M, Quantity 1: 2 pcs.

Motor: 5-Phase Stepping Motor, Thread Lead: 2mm, Stroke: 50mm, Origin Switch: Yes (Cable Length 0.3m), Brake: No, Auto Switch: M9PL--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, 3M, Number: 2 pcs.

Motor: 2-Phase Stepping Motor, Thread Lead: 5mm, Stroke: 150mm, Origin Switch: Yes (Cable Length 0.3m), Brake: No, Auto Switch: M9PL--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, 3M, Number: 3 pcs.

Motor: 2-Phase Stepping Motor, Ball Screw Lead: 6mm, Stroke: 200mm, Home Position Switch: Yes (Cable Length 0.3m), Brake: None, Auto Switch: M9PL--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, 3M, Number: 1 pc.

Motor: 2-Phase Stepping Motor, Ball Screw Lead: 6mm, Stroke: 50mm, Home Position Switch: Yes (Cable Length 0.3m), Brake: None, Auto Switch: M9PL--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, 3M, Number: 2 pcs.

Motor: 2-Phase Stepping Motor, Ball Screw Lead: 12mm, Stroke: 75mm, Home Position Switch: None, Brake: None, Auto Switch: M9PL--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, 3M, Number: 2 pcs.

Motor: 2-Phase Stepping Motor, Thread Lead: 5mm, Stroke: 150mm, Origin Switch: None, Brake: w/Motor Brake, Auto Switch: M9PL--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, 3M, Number: 4 pcs., Proximity Switch: -, Number of Proximity Switches: -

Motor: 2-Phase Stepping Motor, Thread Lead: 2mm, Stroke: 75mm, Origin Switch: None, Brake: w/Motor Brake, Auto Switch: M9PL--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, 3M, Number: 2 pcs., Proximity Switch: -, Number of Proximity Switches: -