Aluminum High Vacuum Angle Valve

Example) -M9NL !

Free Mount Cylinder

Lead wire length symbols: 0.5 mNil (Example) M9N 3 mL (Example) M9NL 5 mZ (Example) M9NZ Normally closed (NC=b contact), solid state switches (Model D-F9G, F9H) are also available. For detail, refer to page 7-9-23 in the Best Pneumatics 2004 Vol. 7 catalog.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-M9NL 7.

XM, XY

-M9NL u Seal material and its changed part Seal material Seal material Compound No.

NCQ8

L M9NL 197in (5 m) .

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Solid state switches marked "" are produced upon receipt of order.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

-15D -20D -25D -30D CQ2B16-5D -10D -15D -20D -25D -30D CQ2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQ2B25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQ2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B63-10D -15D -20D -25D -30D

CQ2

-15D -20D -25D -30D CQ2B16-5D -10D -15D -20D -25D -30D CQ2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQ2B25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQ2B63-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B80-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B100-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B32-5D -10D -15D -20D -25D -30D -35D

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

-15D -20D -25D -30D CQ2B16-5D -10D -15D -20D -25D -30D CQ2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQ2B25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQ2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B63-10D -15D -20D -25D -30D

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

Lead wire length symbols:0.5 m Nil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Refer to page 12-13-25 for solid state switch with pre-wire connector. 12-5-4 5 2 Finger Rotary Actuated Air Gripper Series MHR2/MDHR2 30 Model/Specifications Nominal size 10 15 20 Action Double acting Gripping force (N) (1) External grip 12 24 33 58 (Effective value) at 0.5 MPa Internal grip 12 34

XLAQ/XLDQ

Example) -M9NL Symbol Nil A B C Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

Table of Contents

, 12 V A93 A90 M9N M9P M9B F9NW F9PW F9BW A93V A90V M9NV M9PV M9BV F9NWV F9PWV F9BWV 2-wire Relay, PLC IC circuit 100 V or less No 3-wire (NPN) IC circuit 5 V, 12 V 3-wire (PNP) 2-wire 12 V Grommet Relay, PLC Yes 24V 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 2-wire 12 V Lead wire length symbols: 0.5 mNil (Example) M9N 3 mL (Example) M9NL

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Solid state switch Yes Yes Grommet Relay, PLC A93 A93V 2-wire 12 V 24 V 100 V M9N M9NV 3-wire (NPN) IC circuit 5 V, 12 V M9P M9PV 3-wire (PNP) Relay, PLC M9B M9BV 2-wire 12 V 24 V Grommet F9NW F9NWV 3-wire (NPN) 5 V, 12 V Diagnostic indication (2-color indication) F9PW F9PWV 3-wire (PNP) F9BW F9BWV 2-wire 12 V Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL

CQS

Mounting bolt Mounting bolt D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 Model C Model C D 55 60 65 70 75 80 35 40 45 50 55 60 65 70 75 80 CQSWB12-5D -10D -15D -20D -25D -30D CQSWB16-5D -10D -15D -20D -25D -30D CQSWB20-5D -10D -15D -20D CQSWB20-25D -30D -35D -40D -45D -50D CQSWB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D M3 x 30l x 35l x 40l x 45l x 50l x 55l M3 x 30l x 35l x

CQS

CQSWB125D 10D 15D 20D 25D 30D CQSWB165D 10D 15D 20D 25D 30D CQSWB205D 10D 15D 20D CQSWB2025D 30D 35D 40D 45D 50D CQSWB255D 10D 15D 20D 25D 30D 35D 40D 45D 50D 6.5 10 6.5 7 10 Note) Appropriate plain washer must be used for through-hole mounting.

CLQ

CDLQB50-10D CDLQB80-10D -10D -15D -15D -15D -15D -20D -20D -20D -20D -25D -25D -25D -25D -30D -30D -30D 10.5 -30D -35D -35D -35D 12.5 17 7 -35D -40D -40D -40D -40D -45D -45D -45D -45D -50D -50D -50D -50D -75D -75D -75D CDLQB25-5D -100D -100D -100D M10 x 125l x 130l x 135l x 140l x 145l x 150l x 155l x 160l x 165l x 190l x 215l -10D CDLQB40-10D CDLQB63-10D CDLQB100-10D -15D -15D -15D -15D

Compact Cylinder with Lock Series CLQ

CDLQB50-10D CDLQB80-10D -10D -15D -15D -15D -15D -20D -20D -20D -20D -25D -25D -25D -25D -30D -30D -30D 10.5 -30D -35D -35D -35D 12.5 17 7 -35D -40D -40D -40D -40D -45D -45D -45D -45D -50D -50D -50D -50D -75D -75D -75D CDLQB25-5D -100D -100D -100D M10 x 125l x 130l x 135l x 140l x 145l x 150l x 155l x 160l x 165l x 190l x 215l -10D CDLQB40-10D CDLQB63-10D CDLQB100-10D -15D -15D -15D -15D

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Rod side mounting/Without auto switch Head side mounting/Without auto switch C D Mounting bolt Model C D Mounting bolt Model CQSB12-5D -10D -15D -20D -25D -30D CQSB16-5D -10D -15D -20D -25D -30D CQSB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSB12-5D -10D -15D -20D -25D -30D CQSB16-5D -10D -15D -20D -25D -30D CQSB20-5D -10D -

CLQ

CLQB: Without Built-in Magnet CL CL1 Model C D Model C D Model C D Model C D Mounting bolt Mounting bolt Mounting bolt Mounting bolt CLQB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CLQB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CLQB32-10D CLQB50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CLQB63-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CLQB80-10D 55

Hydraulic

CHQB100 10D (M) CH QB40 5D (M) 15D (M) 10D (M) 20D (M) 15D (M) x 90l x 95l x 100l x 105l x 110l x 115l x 120l x 145l x 170l 25D (M) 20D (M) 30D (M) 25D (M) 35D (M) 30D (M) 13.5 10 40D (M) 35D (M) 45D (M) 40D (M) 50D (M) 45D (M) 75D (M) 50D (M) x 195l 100 (M) 75D (M) 100D (M) M6 x 90l x 95l x 100l x 105l x 110l x 115l x 120l x 125l x 130l x 155l CH QB50 10D (M) 15D (M) 20D (M) 25D (M) 30D