Thermo-chiller/Rack Mount Type

0 10 20 30 40 Circulating fluid temperature [C] Circulating fluid temperature [C] HRR030-A-20, HRR030-W-20 [50 Hz] [60 Hz] 4000 4000 25C 25C 3500 3500 Cooling capacity [W] Cooling capacity [W] 3000 3000 32C 2500 2500 32C 2000 2000 40C 1500 1500 40C 1000 1000 Ambient temperature or facility water temperature Ambient temperature or facility water temperature Ambient temperature or facility

Compressed Air Preparation Filter

flow rate [L/min (ANR)] AFF50 AFF60 6 20 Inlet pressure 0.3 MPa Inlet pressure 0.3 MPa 5 15 Inlet pressure 0.5 MPa Inlet pressure 0.5MPa 4 Pressure drop [kPa] Pressure drop [kPa] Max. flow capacity line 3 10 Max. flow capacity line Accessories Sold Separately/ International Standard 2 5 1 Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa 0 500 0 500 2000 1500 1000 2000 2500 1500 1000 3000 3500

HRX-OM-M090

Fig 9.4-4 Cooling capacity(HRS018--20) 9.4.5 HRS024--20-(BJMT) 3500 3500 Ambient Ambient 3000 3000 temperature temperature or or Cooling capacity[W] Cooling capacity[W] 2500 2500 facility water facility water temperature temperature 2000 2000 25 32 40 25 32 40 1500 1500 1000 1000 500 500 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature[] Circulating fluid temperature[]

HRX-OM-W002

Ambient temp. 3500 or or or 3500 or or 2000 2000 2000 2000 Facility water temp. Facility water temp. or Facility water temp. Facility water temp. Facility water temp. Facility water temp.

JXCx-OMU0004

125 3500 250 3500 120 3500 13 300 4000 150 4000 300 4000 130 4000 14 350 4500 175 4500 350 4500 140 4500 15 400 5000 200 5000 400 5000 150 5000 56 No.JXC-OMU0004-A 10.4 LEYLEYG LEYLEYG LEYLEYG [mm/s] 20 2] 1000 [mm/s [mm/s] 10 2] 1000 [mm/s [mm] 1 3 LEY16LEYG16 LEY25LEYG25 LEY32LEYG32 LEY40LEYG40 A B C A B C A B C A B C 14 27 51 63 126 232 80 156 296 156 298 570 26 50.5 96 92.5 182

VHS

1 e 3(R) Effective area (mm2) Model Component Parts VHS 2500, 3500 5 VM/VR Description Material ADC12 ZDC2 ADC12 Zinc alloy Zinc alloy C3604B A2017B C3604B Description No. q w e r t y u i No. !0 !1 !2 !3 !4 !5 !6 !7 !

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

A

Small additional clearance required for cartridge replacement T E C H N I C A L SPECIFICATIONS D I M E N S I O N S M I S T S E P A R AT O R S E R I E S NAMD Max Operating Pressure 1MPa / 145PSI Minimum Operating Pressure 0.05MPa / 8 PSI Ambient and Fluid Temperatures 5 60C / 40~140F Filtration Degree 0.01m Oil Mist Removal 99.9% NAMD150 200 NAMD250 250 NAMD350 1000 NAMD450 2000 NAMD550 3500

Electric Actuator/Slider Type

LEY63 T8 (Motor mounting position: Top/Parallel, In-line) 787 [3500] 674 [3000] Lead 2.86: LEY63 L (Top/Parallel only) 562 [2500] Force lbf [N] Lead 5: LEY63 C 450 [2000] 337 [1500] Lead 10: LEY63 B 225 [1000] 112 [500] Lead 20: LEY63 A 0 10 12 20 30 40 50 Torque limit/Command value [%] Torque limit/Command value [%] Duty ratio [%] Continuous pushing time [minute] 20 or less 100 100 (60)

Ionizer

Bar length (mm) 300, 380, 620, 780 1100, 1260, 1500 1900, 2300 661 A Series IZS31 Dimensions Feedback sensor/IZS31-DF Amplifier part Head part 2 x 3.4 2 x 3.4 3500 1500 16.6 13 SMC 9 58 25 4.8 10.2 69 15 4.8 23 8 87.5 78 0.5 11 13 6.5 7.8 8.8 8.8 0.5 10.2 10.2 13 60 7.7 7 6 1 50.5 14 Detection hole 10 61 2 x R3.3 Autobalance sensor [High-precision type]/IZS31-DG Amplifier part Head part 2

25

A 13 15 22 06 08 10 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 End bracket/IZS40-BE 35 22 4.5 30 44 2 x 5.4 18 105 33 L 33 Intermediate bracket/IZS40-BM 55 35 22 4.5 36 30 18 2 x 5.4 A 105 33 A A-A section 432 Ionizer IZS40/41/42 Series Dimensions Feedback sensor/IZS31-DF 2 x 3.4 Amplifier 2 x 3.4 Head 1500 3500 IZS IZS 9 16.6 13 SMC IZN 4.8 10.2 25 58 4.8 69 23 87.5 IZF 78 ZVB

KT10

series Vespel (Option: PEEK) PCTFE Viton (Option: Polyurethane, Buna-N, Ethylene propylene) PTFE C 300 SS series 316 SS Wetted Parts Body Inlet filter Piston and trim Seat, main valve Seat, vent valve O ring Rings, back up Dimensions Flow Characteristics inch (mm) KT10 2.25 (57.2) KT10 6000 psig (41.4 MPa) inlet 1500 psig (10.3 MPa) inlet Inlet pressure: 3000 psig (20.7 MPa) inlet 4000 27.6 3500

HRX-OM-R016

3500 temperature temperature or or Cooling capacityW Cooling capacityW 3000 3000 facility water temperature facility water temperature 2500 2500 2000 2000 25 32 40 25 32 40 1500 1500 1000 1000 500 500 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature Circulating fluid temperature 50Hz 60Hz The cooling capacity will be reduced by 300W when option: T and MT are selected.

SL5200

Vespel is a registered trademark of DuPont. 0 1 2 3 4 5 6 7 8 9 10 Flow rate (slpm, N2) 25 Single Stage Regulator for Ultra High Purity Low flow Series SL5500 For UHP gas delivery High inlet pressure type: Max. 3500 psig (24.1 MPa) Flow capacity to 30 slpm Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance Sub-atmospheric pressure delivery option

AP64

4 inch face seal (Female) 1/4 inch tube weld 3/8 inch face seal (Male) 3/8 inch face seal (Female) 3/8 inch tube weld No code M X MV4 FV4 TW4 MV6 FV6 TW6 Specifications Operating Parameters Gas Inlet pressure Cracking pressure 1) Maximum backpressure Proof pressure Burst pressure Ambient and operating temperature Cv AP64 Select compatible materials of construction for the gas Vacuum to 3500

AP10PA

Pneumatic Actuation Pressure Regulator Low flow Series AP10PA Actuation control pressure isolated from process gas by two seals Body material: 316L SS secondary remelt High inlet pressure type: Max. 3500 psig (24.1 MPa) Flow capacity Standard: to 30 slpm HF (Option): to 120 slpm Ni-Cr-Mo alloy internals available for corrosion resistance 100 psig (0.69 MPa) outlet pressure achievable with

Vacuum System Peripherals:

Flow capacity (l/min (ANR)) Oil mist concentration at outlet side 300 750 1500 2200 3500 Filtration (m) Port size Rc Model AM150 AM250 AM350 AM450 AM550 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) , , , , , , , , , 1 1 0.3 1 2 3 4 3 4 1, 1 2 1 , 2 AM650 6000 AM850 12000 1 2 Can produce with auto drain type, drain piping type.

Bore Size: 1", Stroke, Inch: 35, Stroke, Hundredths of an Inch: 00, Option: Low Speed 0.3 to 2.0 inch/sec

Bore Size: 1 1/2", Stroke, Inch: 35, Stroke, Hundredths of an Inch: 00, Option: Low Speed 0.3 to 2.0 inch/sec

Bore Size: 3/4", Stroke, Inch: 35, Stroke, Hundredths of an Inch: 00, Option: Low Speed 0.3 to 2.0 inch/sec