AC Servo Motor Driver (Pulse input type/Positioning type)

4500 400 4500 Notch shape selection 1 PB14 000 000 030 000 Parameter setting required.

LEC-OM02704CN

()1 PB010 0 2 1 3 2 4 3 5 6 17 6 PB15 NH2 2 2 PB16(2)1 4500 Hz 100 4500 PB16 NHQ2 2 2 0h 0 2 0 1 0 40dB 1 14 dB 2 8 dB 3 4dB 0 2 1 3 2 4 3 5 PB17 PB06() PB18 LPF PB23()0 PB231 3141 rad/s 100 18000 PB19 VRF1 1 PB02()1 PB022 100.0 Hz 0.1 100.0 PB20 VRF2 PB02()1 PB022 100.0 Hz 0.1 100.0 PB21 0.00 PB22 0.00 6 18 6 PB23 VFBF 0h 0 0 0 0 1PA08 0 1(PB18) 10 VG2 [rad/s

AC Servo Motor Driver (Pulse input type)

4500 400 4500 Notch shape selection 1 PB14 0 0 0030 0 Parameter should be changed.

AC Servo Motor Driver (CC-Link Type)

4500 400 4500 Notch shape selection 1 PB14 0 0 0030 0 Parameter should be changed.

AC Servo Motor Driver (SSCNET Type)

Regenerative option PA02 0 0(Non) / 0002(LEC-MR-RB-032) / 0003(LEC-MR-RB-12) Rotation direction selection PA14 0 1 0 (+Counter motors side) (+Counter motors side) Adaptive tuning mode PB01 0 0 0002 0 Load to motor inertia moment ratio PB06 7 7 50 Machine resonance suppression filter 1 PB13 4500 4500 400 4500 Notch shape selection 1 PB14 0 0 0030 0 Parameter should be changed.

AC Servo Motor Driver (CC-Link Type)

4500 400 4500 Notch shape selection 1 PB14 0 0 0030 0 Parameter should be changed.

LEC-OM02904

PB08 PG2 12 No.PA083 37 rad/s 1 1000 PB09 VG2 12 PA083 823 rad/s 20 50 PB10 VIC 12 PA083 33.7 ms 0.1 1000.0 PB11 VDC No.PB243No.PB240 980 0 1000 PB12 OVA C4MR Configurator2 0 0 TM % No.PA0145No.PB120 5% 100 PB13 NH1 1 1 No.PB01()1 4500 Hz 100 4500 No.PB010 5 15 5 No.

Series AK1000

0.07 to 3.4 MPa) AK1001 0.5 to 10 psig (0.0034 to 0.07 MPa) Operating Parameters Delivery pressure Gas Select compatible materials of construction for the gas Vacuum to 300 psig (2.1 MPa) Vacuum to 3500 psig (24.1 MPa) 1) Source pressure Proof pressure (Inlet) Burst pressure Ambient and operating temperature Cv Leak rate Connections Supply pressure effect Installation Internal volume Mass 4500

JXCx-OMU0004

175 4500 350 4500 140 4500 15 400 5000 200 5000 400 5000 150 5000 56 No.JXC-OMU0004-A 10.4 LEYLEYG LEYLEYG LEYLEYG [mm/s] 20 2] 1000 [mm/s [mm/s] 10 2] 1000 [mm/s [mm] 1 3 LEY16LEYG16 LEY25LEYG25 LEY32LEYG32 LEY40LEYG40 A B C A B C A B C A B C 14 27 51 63 126 232 80 156 296 156 298 570 26 50.5 96 92.5 182 342 134. 263 501. 218 425 814 5 5 [N] 38 74 141 122 238 452 189 370 707 283

VHS

Filtration rating has to be 5m or smaller. ( ): VHS500 3.6-16 Conforming to OSHA Standard Pressure Relief 3 Port Valve with a Locking Hole VHS2500/3500/4500/5500 Model When in the exhaust position, the valve may be padlock secured. Prevents accidental start-ups while personnel are cleaning or servicing equipment.

Electric Actuator/Slider Type

Regeneration (50%): Duty ratio 50% or more Regeneration (100%): Duty ratio 100% LEC-MR-RB-032 LEC-MR-RB-032 Allowable Stroke Speed [mm/s] Lead Stroke [mm] Model AC servo [mm] Symbol Up to 100 Up to 200 Up to 300 Up to 400 Up to 500 Up to 600 Up to 700 Up to 800 Up to 900 Up to 1000 540 720 900 A 12 LEFS25 100 W / 40 270 360 450 B 6 (2700 rpm) (3650 rpm) (4500 rpm) (Motor rotation speed

15

800 1000 1200 1400 1600 Speed [mm/s] Speed [mm/s] LAT LZ Allowable Stroke Speed [mm/s] LC3F2 Model AC servo motor Lead Stroke [mm] Symbol [mm] Up to 100 Up to 200 Up to 300 Up to 400 Up to 500 Up to 600 Up to 700 Up to 800 Up to 900 Up to 1000 Up to 1100 Up to 1200 H 20 1500 1200 900 700 550 A 12 900 720 540 420 330 LEFS25 100 W equivalent B 6 450 360 270 210 160 (Motor rotation speed) (4500

Environment

Operating condition Model LC3F2 A LEC-MR-RB-032 B LEC-MR-RB-12 Allowable Stroke Speed [mm/s] Model AC servo motor Lead Stroke [mm] Symbol [mm] Up to 100 Up to 200 Up to 300 Up to 400 Up to 500 Up to 600 Up to 700 Up to 800 Up to 900 Up to 1000 Up to 1100 Up to 1200 H 20 1500 1200 900 700 550 A 12 900 720 540 420 330 B 6 450 360 270 210 160 LEFS25 100 W /l40 (Motor rotation speed) (4500 rpm

AZ1000

High inlet pressure Changes from the standard type are: 0.14 20 AZ1210 AZ1215 Option Other Parameters HR Source pressure Proof pressure (Inlet) Burst pressure Vacuum to 3000 psig (20.7 MPa) 4500 psig (31 MPa) 9000 psig (62 MPa) 0.07 10 0.00 0 0 100 200 300 400 500 600 700 Flow rate (slpm, N2) Dimensions inch (mm) AZ1200HF 150 psig (1.0 MPa) 50 psig (0.34 MPa) Inlet pressure: 100 psig (0.69

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

LEFS40l SGMJV-04A3A SGDV-2R8A11l (LECYM2-V8) SGDV-2R8A21l (LECYU2-V8) Allowable Stroke Speed [mm/s] Model AC servo motor Lead Stroke [mm] Symbol [mm] Up to 100 Up to 200 Up to 300 Up to 400 Up to 500 Up to 600 Up to 700 Up to 800 Up to 900 Up to 1000 Up to 1100 Up to 1200 H 20 1500 1200 900 700 550 A 12 900 720 540 420 330 B 6 450 360 270 210 160 LEFS25 100 W /m40 (Motor rotation speed) (4500

Series AP500

High inlet pressure Changes from the standard type are: 30 0.21 AP1210 AP1215 Option Other Parameters Vacuum to 3000 psig (20.7 MPa) ) 4500 psig (31 MPa) 9000 psig (62 MPa) HR Source pressure 20 0.14 Proof pressure (Inlet) Burst pressure 10 0.07 ) 3/4 inch face seal fittings rated to 2400 psig (16.5 MPa) maximum.

Environment

150 Lead 5: LEY63C LEC Y Lead 10: LEY63B 100 Lead 20: LEY63A Motorless 50 LAT 0 0 200 400 600 800 1200 1000 Speed [mm/s] LZ Allowable Stroke Speed [mm/s] LC3F2 Model AC servo motor Lead Stroke [mm] Symbol [mm] 30 50 100 150 200 250 300 350 400 450 500 600 700 800 A 12 900 600 B 6 450 300 C 3 225 150 LEY25 Motor mounting position: Top/Parallel, In-line 100 W /40 (Motor rotation speed) (4500

KT10

series Vespel (Option: PEEK) PCTFE Wetted Parts Body Surface finish Inlet filter Piston and trim Seat, main valve Seat, vent valve 2500 17.2 13.8 2000 Delivery pressure (MPa) Delivery pressure (psig) Viton (Option:Polyurethan, Buna-N, Ethylene propylene) O-ring 1500 10.3 Rings, back up PTFE 1000 6.9 Dimensions inch (mm) KT10 3.4 500 2.25 (57.2) 0.0 0 0 500 1000 1500 2000 2500 3000 3500 4000 4500

Slider Type Ball Screw Drive/11-LEFS Series

Operating condition Model LC3F2 A LEC-MR-RB-032 B LEC-MR-RB-12 Allowable Stroke Speed [mm/s] Model AC servo motor Lead Stroke [mm] Symbol [mm] Up to 100 Up to 200 Up to 300 Up to 400 Up to 500 Up to 600 Up to 700 Up to 800 Up to 900 Up to 1000 Up to 1100 Up to 1200 H 20 1500 1200 900 700 550 A 12 900 720 540 420 330 B 6 450 360 270 210 160 LEFS25 100 W /l40 (Motor rotation speed) (4500 rpm

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Allowable Stroke Speed [mm/s] Model AC servo motor Lead Stroke [mm] Symbol [mm] Up to 200 Up to 300 Up to 400 Up to 500 Up to 600 Up to 700 Up to 800 Up to 900 Up to 1000 Up to 1100 Up to 1200 Up to 1300 Up to 1400 Up to 1500 H 24 1800 1580 1170 910 720 580 480 410 A 16 1200 1050 780 600 480 390 320 270 LEJS40 100 W/ m40 B 8 600 520 390 300 240 190 160 130 (Motor rotation speed) (4500 rpm