Body Material: 1 [ADC12 (Aluminum)], Diaphragm Material: 2 [NBR (Nitrile Rubber)], Actuation: Automatically Operated, Thread: Rc(PT), Port Size: 3/4, Option: -

Body Material: 1 [ADC12 (Aluminum)], Diaphragm Material: 2 [NBR (Nitrile Rubber)], Actuation: Automatically Operated, Thread: F [G(PF)], Port Size: 3/4, Option: -

Body Material: 1 [ADC12 (Aluminum)], Diaphragm Material: 2 [NBR (Nitrile Rubber)], Actuation: Automatically Operated, Thread: NPTF, Port Size: 1/2, Option: -

Body Material: 1 [ADC12 (Aluminum)], Diaphragm Material: 2 [NBR (Nitrile Rubber)], Actuation: Automatically Operated, Thread: F [G(PF)], Port Size: 1/2, Option: -

Body Material: 1 [ADC12 (Aluminum)], Diaphragm Material: 2 [NBR (Nitrile Rubber)], Actuation: 0 (Automatically Operated), Thread: N (NPT), Port Size: 04 (1/2)

Body Material: 1 [ADC12 (Aluminum)], Diaphragm Material: 2 [NBR (Nitrile Rubber)], Actuation: 0 (Automatically Operated), Thread: N (NPT), Port Size: 06 (3/4)

Body Material: 1 [ADC12 (Aluminum)], Diaphragm Material: 2 [NBR (Nitrile Rubber)], Actuation: 0 (Automatically Operated), Thread: T (NPTF), Port Size: 06 (3/4)

Body Material: 1 [ADC12 (Aluminum)], Diaphragm Material: 2 [NBR (Nitrile Rubber)], Actuation: 0 (Automatically Operated), Thread: Rc(PT), Port Size: 06 (3/4)

Body Material: 1 [ADC12 (Aluminum)], Diaphragm Material: 2 [NBR (Nitrile Rubber)], Actuation: 0 (Automatically Operated), Thread: F [G(PF)], Port Size: 06 (3/4)

Body Material: 1 [ADC12 (Aluminum)], Diaphragm Material: 2 [NBR (Nitrile Rubber)], Actuation: 0 (Automatically Operated), Thread: T (NPTF), Port Size: 04 (1/2)

Body Material: 1 [ADC12 (Aluminum)], Diaphragm Material: 2 [NBR (Nitrile Rubber)], Actuation: 0 (Automatically Operated), Thread: F [G(PF)], Port Size: 04 (1/2)

ZP

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

Table of Contents

How to Order Sub-plate Assembly Pilot type Nil R External pilot Internal pilot Thread type Plug-in VFR4000 P 04 Nil Rc Non plug-in VFS4000 S 04 G F N NPT NPTF T B Plug-in VFR4000 P 04 Non plug-in VFS4000 S 04 B Piping port (P, A, B port) Note) Bottom ported is not available for external pilot.

AC

Y YL YT Thread N F Rc(PT) NPT G(PF) Piping adapter port size 1/8 1/4 3/8 1/2 3/4 01 02 03 04 06 Attachments for IS1000E Pressure switch applicable model No.

Vacuum Pad

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

ZP3

(Except material HS) ZP3 T 04 UM N A5 With adapter From p. 143 p. 160 From p. 162 Flat Type with Groove ZP3 T 04 N J 3 B5 UM With buffer From p. 146 p. 161 p. 164 q w e r t y u Flat type with groove q Vacuum inlet direction w Pad diameter e Material Nil Pad unit T Vertical Y Lateral 04 4 06 6 08 8 10 10 13 13 16 16 N NBR S Silicone rubber12 U Urethane rubber F FKM GN Conductive NBR GS Conductive

Table of Contents

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

Table of Contents

AXT632-69-1 AXT632-69-2 VVCA30-3A-04-2 VVCA30-3A-04-1 OR-2200-200-H VCA35--VVCA30-6-n VVCA30-4A-04-2 VVCA30-4A-04-1 Material Part no.

Table of Contents

bore 1/8 R 4-R 4-R 36.8 E 36.8 E R P VEX P D D AMR + + MADE IN JAPAN ITV MADE IN JAPAN SMC SMC IC VBA Model Port size A B C D E G H I VE K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000

5 Port Solenoid Valve Series SY3000/5000/7000/9000

EX510-S001 Nil N EX510-S101 P.1715 to 1717 PNP output (COM.)