Switching from real-time flow rate to accumulated flow is possible.Digital flow switch for de-ionized water and chemicals , Remote type sensor unit , Flow rate range: 0.4 to 4 l/min ~ 4 to 40 l/min , Output for display unit with or w/o analog output , Port sizes: 3/8", 1/2", 3/4", DIGITAL FLOW SWITCH, INSTRUMENTATION, PFD DIGITAL FLOW SWITCH, 2X, PFD NO SIZE (MISC.

/OTHER), .67324 lb, ModelMeasured fluidDetection styleRated flow rangeOperating pressure range Note 2)Proof pressure Note 3)Operating fluid temperatureLinearity Note 4)RepeatabilityTemperature characteristicsOutput specificationsPower supply voltageCurrent consumptionEnvironmental resistanceWeightPort sizeWetted materialPF2D504Liquid not to corrode nor erode deionized water and/or Teflon

Switching from real-time flow rate to accumulated flow is possible.Digital flow switch for de-ionized water and chemicals , Remote type sensor unit , Flow rate range: 0.4 to 4 l/min ~ 4 to 40 l/min , Output for display unit with or w/o analog output , Port sizes: 3/8", 1/2", 3/4", DIGITAL FLOW SWITCH, INSTRUMENTATION, PFD DIGITAL FLOW SWITCH, 2X, PFD NO SIZE (MISC.

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

1

AXT100-FC26-1 1.5 m AXT100-FC20-1 AXT100-FC10-1 AXT100-FC26-2 3 m AXT100-FC20-2 AXT100-FC10-2 AXT100-FC26-3 5 m AXT100-FC20-3 AXT100-FC10-3 Specified Layout COM. COM. 25 26 23 24 COM. COM. 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 COM. COM. 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 9 10 7 8 7 8 7 8 7 8 5 6 5 6 5 6 5 6 3 4 3 4 3 4 3 4 1 2 1 2 1 2 1 2 COM. COM.

2

Note 1) 2 1/8, 1/4 3 3/8 4 1/2 Type Metric size Inch size 2 Elbow 3 Universal Tubing O.D. 23 3.2 Note 2) Tubing O.D. 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" 04 4 06 6 08 8 10 10 12 12 16 16 Control type 0 Meter-out 1 Meter-in * Meter-out and meter-in types can be visually identified by color of the handle.

CATALOG

in flats NA are not available for 80, 100 bores Bore (mm) F FX FD FT H ZZ 20 2 28 5.5 6 35 106 25 2 32 5.5 7 40 111 32 2 38 6.6 7 40 113 40 2 46 6.6 8 50 130 50 2 58 9 9 58 150 63 2 70 11 9 58 150 80 3 82 11 11 71 182 100 3 100 14 14 71 182 Courtesy of Steven Engineering, Inc. !

AC Servo Motor Driver (Network card type ）

Please purchase the cable and connector options indicated in this section. 11 2 11.

5-Port Solenoid Valve

11 Name plate assembly part number SY30M-85-1A SY50M-85-1A Internal pilot U/D piping 2 pcs.

Table of Contents

Slide bearing guide type MY1C Slide table accuracy approx. 0.05 mm (2) Refer to P. 8-11-52. Cam follower guide type MY1H Slide table accuracy of 0.05 mm or less required (2) Refer to P. 8-11-68. High precision guide type MY1HT Slide table accuracy of 0.05 mm or less required (2) Refer to P. 8-11-90.

Compact Hydraulic Cylinder

38 16 3/8 11 109 11 11 88 40 21 32 M10 x 1.25 11 37 39 136 30 0.2 0.18 0.13 40 25 to 800 69 65 45 12 11 3/8 118 42 30 11 11 95 46 21 32 M10 x 1.25 11 36 136 50 25 to 800 85 76 52 15 13 145 1/2 46 30 14 13 115 58 27 40 M10 x 1.25 11 43 150 0.15 63 25 to 800 98 90 63 15 165 1/2 15 52 18 15 132 65 27 42 M12 x 1.5 14 43 156 35 0.2 80 25 to 1000 118 110 80 17 3/4 18 190 18 18 155 87 22 40 M16

A

3 5/8 2.40 1.81 1.06 6.44 2 1/4 1 115/16 5/8 3/4 9/16 3/8 11/32 M16x1.5 11/32 7/8 250 (2.5) 7/16-20 3.1 1 1/8 3/8 5/16-24 3 0 1.30 2.19 1.75 3 3/4 2.48 1.69 1.06 6.44 2 3/8 1 1 1/4 115/16 5/8 3/4 9/16 3/8 11/32 M16x1.5 11/32 1 1 1/8 1 1/2 4 1/4 3/4-16 3/8-24 3 3/4 325 (3.25) 3.9 1/2 0 1.57 2.76 2.34 2.72 2.40 1.10 8.02 2 5/8 1 3/8 1 1/2 2 7/16 7/8 1/2 27/64 M24x1.5 5/8 1 1 1/8 1 1/2 4 1/2

Table of Contents

9 10 9 10 10 11 11 11 9 10 10 11 RZQ 15 + 45 ( ) n2 2 D-H7 D-H7W D-H7BAL D-H7NF D-B59W 13 (n = 2, 4, 6, ) D-H7/H7NF/H7W/H7BAL 4 10 15 60 60 + 45 (n2) MI W S D-H7C 7 D-A3/A44 D-G39/K39 8 CEP1 D-C73C D-C80C D-H7C 10 15 65 9 9 9 15 + 50 ( ) n2 2 65 + 50 (n2) D-G5/K59/G5WK 59W/G5BAL/G5NTL 4 (n = 2, 4, 6, ) 4 4.5 5 6 6.5 6.5 7 CE1 D-B5/B64 D-G5/K59 D-G5W/K59W D-G5BAL D-G5NTL Since this is a

AC Servo Motor Driver (Pulse input type/Positioning type ）

Please purchase the cable and connector options indicated in this section. 11 2 11.

Electric Actuator

11-LEFS32;-600B 11-LEFS32;-700 11-LEFS32;-700B 11-LEFS32;-800 11-LEFS32;-800B 60 430 6 2 300 306 150 530 8 3 450 406 D x 150 (= E) B 15 630 10 4 600 506 15 [mm] 730 10 4 600 606 Model L 387.5 439.5 487.5 539.5 A B n D E 11-LEFS32;-100 11-LEFS32;-100B 11-LEFS32;-200 11-LEFS32;-200B 106 230 4 830 12 5 750 706 300 206 330 6 2 930 14 6 900 806 6H9 depth 7 ( ) 0.030 0 (170) 11-LEFS40 Note 1

Hydraulic

321 M10 x 1.25 52 58 38 16 32 15 11 37 31 3/8 39 141 11 2 113 20 28 58 20 98 21.5 15 25 to 1800 401 M10 x 1.25 52 52 65 45 12 32 15 11 36 30 3/8 42 141 11 2 113 20 28 69 20 109 12 15 25 to 1800 1/3.5 stroke 501 M10 x 1.25 55 52 76 52 15 40 19 11 43 35 1/2 46 155 13 2.5 121 25 33 85 25 135 15 15 25 to 1800 632 M12 x 1.5 65 55 90 63 15 42 19 14 43 35 1/2 52 163 15 2.5 132 31.5 43 98 31.5

5 Port Solenoid Valve Series SY3000/5000/7000/9000

7.5 16.5 32.5 24.5 11 11 20.5 (P, EA, EB port) 1/8 With plug (12.5) 41 (36.8) 41 L plug connector (L): SY3140(R)-L-01 M plug connector (M): SY3140(R)-M-01 M8 connector (WO): SY3140(R)-WO-01 Approx. 300 (Lead wire length) 38.1 53.5 [60.5] 58 M8 x 1 40.5 (Lead wire length) Approx. 300 64.6 [71.6] 76.8 [79] 62 67 [69.2] 68.5 75.9 20.5 2 11 11 20.5 2 11 2 11 11 11 20.5 7.5 16.5 24.5 7.5 16.5

ZP

2 1.5 2 1.5 8 8 8 3 3 9 8 5.2 2 4 1.8 7 6 3.4 2 2.2 Lateral 4.5 With Buffer: Vacuum Inlet Construction Adapter Applicable Pad List ZP3-10B;[Weight: 0.8 g] ZP3-13B;[Weight: 1.0 g] ZP3-16B;[Weight: 1.1 g] 9 9 6 4 4 6 9 6 4 2 2 2 2 2 2 2 2 2 10 10 10 17 16 11.4 3 14 13 8.4 3 11 10 6 2 Buffer Assembly Part No.

MY1

Slide bearing guide type MY1C Slide table accuracy approx. 0.05 mm (2) Refer to P. 8-11-52. Cam follower guide type MY1H Slide table accuracy of 0.05 mm or less required (2) Refer to P. 8-11-68. High precision guide type MY1HT Slide table accuracy of 0.05 mm or less required (2) Refer to P. 8-11-90.

Compact Cylinder

27 11 33.5 M18 x 1.5 28.5 26 Built-in one-touch fittings: 32 to 50 2 x P1 (Piping tube O.D.)