Table of Contents

) AS3000, AS3500 (12.3) AS4001F (16) AS320 (13) AS3000, AS3500 (12.3) AS4000 (25.5) AS5000 (74) AS5000 (74) AS5000 (74) AS321F (10) AS331F (10) AS4001F (16) AS320 (13) AS3000, AS3500 (12.3) AS4000 (25.5) AS5000 (74) AS5000 (74) AS5000 (74) AS420 (74) 1-A 1-B 1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B

A

1/2-13 1 1/2 1 3/8 2.34 1 4 1/4 2.72 2 7/16 5/8 2 5/8 5 53/64 3/4-16 7/8 1/2 2 1/4 400 (4) 1 1/8 4.7 1 1/2 1 1/2 1/2 3/8-24 4 1/2 0 1.57 1.18 1/2-13 2 1/16 1 3/8 2.34 1 4 1/4 2.72 2 7/16 5/8 2 5/8 5 53/6 3/4-16 7/8 1/2 MORE DIMENSIONS S E E N E X T P A G E D I M E N S I O N S D E TA C H A B L E R E A R C L E V I S T Y P E NC A1D G BORE (INCH) KK A AA B C D DD E EA EE F L LR M XD MM CB J

ZP

C 2 2 A A B B Dimensions Dimensions (mm) (mm) D Y F A B C E A B C D E N F Model Model ZPR10F-0-B5 ZPR20F-0-B5 M5 x 0.8 1.5 39.5 12.5 10 12 10 23.4 20 22 ZPR13F-0-B5 ZPR20F-0-B8 M8 x 1.25 13 15 2 40 23.9 13 12.5 15.5 29.3 46.5 10.5 ZPR16F-0-B5 ZPR25F-0-B5 M5 x 0.8 16 18 25 28 ZPR25F-0-B8 M8 x 1.25 Dimensions by Tubing Diameter ZPR32F-0-B5 M5 x 0.8 (mm) 13 16 29.8 47 32 35 ZPR32F-0-B8 M8 x

Compact Hydraulic Cylinder

range (mm) Bore size (mm) e FD J B BB C F GA GB NA NB P R S T FT FX FY FZ SS l f Q B-rod C-rod B-rod C-rod 32 21.5 15 52 M10 x 1.25 58 62 38 16 32 15 37 31 3/8 39 141 11 11 13 88 40 109 184 25 to 1400 40 12 15 52 52 M10 x 1.25 65 69 45 12 32 15 36 30 3/8 42 141 11 11 13 95 46 118 184 25 to 1400 1/3.5 stroke 50 15 15 55 52 M10 x 1.25 76 85 52 15 40 19 43 35 1/2 46 155 13 14 18 115 58 145

AC Servo Motor Driver (Network card type ）

USING STO FUNCTION 131 to 13-13 13.1 Introduction . 13-2 13.1.1 Summary . 13-2 13.1.2 Terms related to safety . 13-2 13.1.3 Cautions . 13-2 13.1.4 Residual risks of the STO function . 13-3 13.1.5 Specifications . 13-4 13.1.6 Maintenance . 13-5 13.2 STO I/O signal connector (CN8) and signal layouts . 13-5 13.2.1 Signal layouts . 13-5 13.2.2 Signal (device) explanations . 13-6 13.2.3 How to

ZP

C 2 2 A A B B Dimensions Dimensions (mm) (mm) D Y F A B C E A B C D E N F Model Model ZPR10F-0-B5 ZPR20F-0-B5 M5 x 0.8 1.5 39.5 12.5 10 12 10 23.4 20 22 ZPR13F-0-B5 ZPR20F-0-B8 M8 x 1.25 13 15 2 40 23.9 13 12.5 15.5 29.3 46.5 10.5 ZPR16F-0-B5 ZPR25F-0-B5 M5 x 0.8 16 18 25 28 ZPR25F-0-B8 M8 x 1.25 Dimensions by Tubing Diameter ZPR32F-0-B5 M5 x 0.8 (mm) 13 16 29.8 47 32 35 ZPR32F-0-B8 M8 x

NCQ2/CQ2

C 3 9 2 X W 2 Q The same dimensions as the CQ1W 12, 20 12, 20 (With auto switch) 32 to 100 Auto switch 2 x H thread depth C 2 x H thread depth C 2 x H thread depth C B + Stroke B + Stroke B + Stroke S + 2 (Stroke) L L L S + 2 (Stroke) A + 2 (Stroke) S + 2 (Stroke) A + 2 (Stroke) A + 2 (Stroke) Without Auto Switch 12 20 5 10 20 33 26 3.5 29.5 32 40 5, 10 20, 30 40 46.5 40 3.5 43 M6 x 1 9 50

ZP

G Hexagon width across flats 7 Elliptic e c a d b Flat Elliptic Thin Flat/Thin Flat with Ribs C Y A B A a e Y b c d Model B C Y Model Model ZPR02U-0-A8 ZPR10UT ZPR2004U 10 11 1 2 2 2.6 1.2 1.2 0.3 4 2.6 4.6 ZPR04U-0-A8 ZPR13UT ZPR3507U 13 14 4 3.5 4.8 1.8 1.6 0.8 0.5 7 4.3 7.8 1.5 ZPR06U-0-A8 ZPR16UT ZPR4010U 16 17 6 4 7 2 0.8 10 5 11 2.5 2.5 ZPR10CT 10 11 0.8 ZPR08U-0-A8 8 9 1 ZPR13CT 13

Compact Cylinder

The same dimensions as the CQ1W 12, 20 12, 20 (With auto switch) 32 to 100 Auto switch 2 x H thread depth C 2 x H thread depth C 2 x H thread depth C B + Stroke B + Stroke B + Stroke S + 2 (Stroke) S + 2 (Stroke) L L L S + 2 (Stroke) A + 2 (Stroke) A + 2 (Stroke) A + 2 (Stroke) Without Auto Switch 12 20 5 10 20 33 26 3.5 29.5 32 40 5, 10 20, 30 40 46.5 40 3.5 43 M6 x 1 9 50 63 80 100 Bore

Table of Contents

closing port M3 x 0.5 Finger opening port 10 M3 x 0.5 Finger opening port M3 x 0.5 Finger closing port 25 25 6-M3 x 0.5 thread depth 6 (A, B, C common view) 3-3 depth 6 +0.02 0 34 (A, B, C common view) 12h9 0 0.043 1.5 5 19.5 12 41.5 (45) 8 17 2 8 0 0.05 2 3.5 0 0.03 3.5 0 0.03 Open: 22 Closed: 14 2-M3 x 0.5 thread depth 6 (Thread for mounting attachment) 15 15 6 5 5 6 12-5-12 13 2 Finger

5 Port Solenoid Valve Series SY3000/5000/7000/9000

14/2 (PA/B) 4/25/3 (A/BEA/EB) Grommet Cv b C (dm3/ L/M plug L/M plug 4, 2 (A, B) 4, 2 (A, B) 1, 5, 3 1, 5, 3 DIN terminal (sbar)) Cv b C (kdm3/ (sbar) ) Cv b C (dm3/ (P, EA, EB) (P, EA, EB) connector 57 82 connector 108 133 connector 51 53 68 74 connector 101 104 120 125 (sbar) ) (sbar) ) 125 167 Single Single 2 position 2 position 0.81 4.1 3.3 0.33 0.61 0.44 0.16 0.64 0.45 0.18 0.23 0.93

AC Servo Motor Driver (Pulse input type/Positioning type ）

USING STO FUNCTION . 13-2 13.1 Introduction. 13-2 13.1.1 Summary . 13-2 13.1.2 Terms related to safety . 13-2 13.1.3 Cautions . 13-2 13.1.4 Residual risks of the STO function . 13-3 13.1.5 Specifications. 13-4 13.1.6 Maintenance . 13-5 13.2 STO I/O signal connector (CN8) and signal layouts . 13-5 13.2.1 Signal layouts. 13-5 13.2.2 Signal (device) explanations . 13-6 13.2.3 How to pull out

JXCx-OMT0023

/Program No. selection 1 to 3 2. Select a program that has the home position return "ZRT" command. 13 2 13.

Table of Contents

4 2 Special resin Scraper Piston seal Cushion seal Tube gasket O-ring O-ring 2 2 2 2 NBR NBR NBR NBR NBR NBR #0 #1 #2 #3 #4 #5 GMY50 GMY63 MC-16 P53 8.3 x 4.5 x 1.9 C-14 GMY100 MC-30 P90 GMY80 MC-25 P70 P44 MC-20 C-12.5 C-4 C-6 C-6 4 2 P24 P22 Note) Two types of dust seal band are available.

Hydraulic

FY FZ SS f Q B-rod C-rod B-rod C-rod 32 M10 x 1.25 52 58 62 38 16 32 15 37 31 3/8 39 141 11 11 13 88 40 109 184 21.5 15 25 to 1400 40 M10 x 1.25 52 52 65 69 45 12 32 15 36 30 3/8 42 141 11 11 13 95 46 118 184 12 15 25 to 1400 1/3.5 stroke 50 M10 x 1.25 55 52 76 85 52 15 40 19 43 35 1/2 46 155 13 14 18 115 58 145 203 15 15 25 to 1400 63 M12 x 1.5 65 55 90 98 63 15 42 19 43 35 1/2 52 163

ZP

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

Air Cylinder Series CM2

H1 H2 G 2 x NN 4 x FD 2 x FD G 2 x P (Rc, NPT, G) C2 Mounting hole Mounting hole Eh8 D FY I B Width across flats NA MM AL F K N A H FX FZ N 1.5 40 Width across flats KA FT S + Stroke 20 to 32 ZZ + Stroke Z + Stroke (mm) H1 H G FZ FY B1 FX B E F FT AL FD A B2 C2 D H2 I FL Bore size (mm) 20 41 8 75 60 34 13 4 15.5 7 18 8 28 10.5 13 26 30 5 8 0 0.033 20 25 45 8 75 60 40 13 4 19.5 7 22 10

ZP

P.49 Features 2 : Series ZP3 (: Series ZP2 C: Series ZP Vacuum Pads Series ZP3/ZP2/ZP Pad Diameter List New New Pad type Symbol 0.8 1.1 1.5 2 3 3.5 4 5 6 7 8 9 10 11 13 14 15 Note) C ( C U C C C C ( Note) Note) Note) Note) Note) Note) Note) Note) MU ( ( ( ( ( ( ( ( Flat Note) Note) Note) EU ( ( ( ( ( Note) AU ( ( ( ( ( Flat with rib C C C ( ( ( Flat with groove UM Thin flat UT C C ( (

Smooth Cylinder/Low Speed Cylinder

63 80 100 S TB TA ZZ GA 12 P 1/8 GA 12 P M5 x 0.8 11 12 12 77 11 114 Up to 200 11 12 12 77 11 119 12 1/8 12 M5 x 0.8 Up to 300 11 12 10 79 11 121 12 1/8 10 1/8 Up to 300 12 13 10 87 12 139 13 1/8 10 1/8 Up to 300 13 14 12 102 13 162 14 1/4 12 1/4 Up to 300 13 14 12 102 13 162 14 1/4 12 1/4 Up to 300 20 17 122 196 20 3/8 17 3/8 Up to 300 20 17 122 196 20 1/2 17 1/2 Up to 300 1206 Smooth

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

side Bore size (mm) 12 16 20 25 G Th9 0 0.043 0 0.052 0 0.043 0 0.043 15 20 13 15 1.5 1.5 2 2 Note) With boss in rod side would be optional.