SV

With External Pilot Specifications (Pitch) 24 P = 24 65.8 20 25 11 E 3/5 E 3/5 E 3 A E 3 A 4 A 4 A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 13.7 14.5 35.8 35 58.3 74.8 P 1 P 1 B 2 B 2 B 2 B 2 B 2 P 1 P 1 B 2 B 2 B 2 B 2 B 2 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 3/8" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 8, 5/16" 10, 3/8" 12 X PE X PE Rc 3/8 [1(P), 3(E)

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

Table of Contents

0 e New PFA q Body New PFA w Sensor Super PFA e Tube PPS r Housing A PPS t Housing B PPS y Housing C POM u Bushing PPS i Cap FKM o Gasket FKM !0 O-ring Stainless steel 304 !1 Thread PVC !2 Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !

0.4

q w e q w VQC1100 VQC1101 2(B) (A)4 2(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQC1201 VQC1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQC1300 VQC1400 VQC1301 VQC1401 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQC1500 VQC1501 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1

CATALOG

C A U T I O N S F O R M A K I N G A N D M O U N T I N G A R M S D I M E N S I O N S H E A D S I D E F L A N G E 32, 40, 50, 63 S E R I E S MK2 W H E N A R M S A R E T O B E M A D E S E P A R AT E LY, T H E I R L E N G T H A N D W E I G H T S H O U L D B E W I T H I N T H E F O L L O W I N G R A N G E.

CM2

Use caution to the popping of a snap ring. When replacing rod seals and removing and mounting a snap ring, use a proper tool (snap ring plier: tool for installing a type C snap ring). Even if a proper tool is used, it is likely to inflict damage to a human body or peripheral equipment, as a snap ring may be flown out of the tip of a plier.

7.4

VQ1000-FPG-C4M5-D: 6 sets Double check block 757 S0700 Series Construction Body Ported Construction 2(B) (A)4 S0716 2-Position Single r u e w q 3(R2) (R1)5 1 (P) t y i 2-Position Double S0726 2(B) (A)4 r u e w q 3(R2) (R1)5 1 (P) t y i 3-Position Closed Center S0736 r u e w q 2(B) (A)4 (R1)5 1 (P) 3(R2) t y i 4-Position Dual 3-Port Valve S07A6 r u e w q 2(B) 4(A) 5(R1) 3(R2) 1(P) N.C. + N.C

5 Port Solenoid Valve Series SY3000/5000/7000/9000

A A A A SS5Y5-45S1UStations D.

SX

141.1 99.2 99.2 19 42.9 (Lead wire length) 19 42.9 Polarity indication 13.6 13.6 A B A B B A A COM B + A B A B A B A Manual override (Push and turn for locking type) 42 31.4 Manual override (Press and turn for the locking type) 42 31.4 84.9 B: Green A: Orange 2-4.2 84.9 B: Green A: Orange 2-4.2 2-One-touch fittings (Mounting holes for manifold) (A, B port) (A, B port) 2-One-touch fittings

ISO Cylinder

set of a, b, c, e) (Screw: Stainless steel) BJ6-010S (A set of a, b, c, e) (Screw: Stainless steel) BJ6-012S (A set of a, b, c, e) (Screw: Stainless steel) BJ6-016S (A set of a, b, c, e) (Screw: Stainless steel) BM5-020S (A set of a, b, c, e) (Screw: Stainless steel) BM5-025S (A set of a, b, c, e) (Screw: Stainless steel) BM5-032S (A set of a, b, c, e) (Screw: Stainless steel) BM5-040S (A

V

I N G S C3 C4 C6 M5 N1 N3 N7 C3 C4 C6 M5 N1 N3 N7 A S S E M B LY VVQ1000-R-1-C6 VVQ1000-52A-C8 (VQ1000) O F B A C K P R E S S U R E A S S E M B LY [-B] VVQ1000-57A DIN R A I L M O U N T E D B R A C K E T [-D] VA C U U M E J E C T O R U N I T C H E C K VA LV E F O R P R E V E N T I O N O F S I L E N C E R (EXH P O R T) VVQ1000-JA BM (VQ1000) VVQ1000-18A Courtesy of Steven Engineering, Inc.

SZ3000

0 e w t y q o 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 3 position pressure center 4(A) (A) 4 (B) 2 2(B) 5 (EA) 1 (P) 3 (EB) 5(EA) 1(P) 3(EB) i Component Parts 2 position single with back pressure check valve Material Note Description No. q w e r t y u i Zinc die-casted Body r u !

Table of Contents

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

Modular F.R.L. Units

Port size Center of F.R.L. body E F F E E B C Cross spacer E D A F: Without thread Model 1 E (Port size) A B C D Applicable model Y14-M5-A M5 23 16 14 25 AC10l-A Y24-l01-A 1/8 40 40 22 40 AC20l-B Y24-l02-A 1/4 Y34-l01-A 1/8 49 43 28 48 AC25l-B, AC30l-B Y34-l02-A 1/4 Y44-l02-A 1/4 60 48 36 54 AC40l-B Y44-l03-A 3/8 Y54-l03-A 3/8 72 62 40 62 AC40l-06-B Y54-l04-A 1/2 Caution on Mounting 1.

CM2

B 5(3) 5(3) 6(4) 11 A 6(4) 6(4) 7(5) 12 B 0(0) 0(0) 0.5(0) 5.5 A 0.5(0) 0.5(0) 1.5(0) 6.5 B 3(1) 3(1) 4(2) 9 A 4(2) 4(2) 5(3) 10 Hs 69.5 72 75.5 79.5 B 6(4) 6(4) 7(5) 12 Hs 60 62.5 66 70 A 7(5) 7(5) 8(6) 13 Hs 25 27.5 31 35 B 0(0) 0(0) 1(0) 6 Hs 22.5 25 28.5 32.5 A 1(0) 1(0) 2(0) 7 B A B 1.5(0) 1.5(0) 4.5(2.5) 3.5(1.5) 2.5(0.5) 4.5(2.5) 3.5(1.5) 2.5(0.5) 5.5(3.5) 10.5 4.5(2.5) 9.5 3.5(1.5

SQ1000/2000

u u 3 position: SQ2 40 3 4 5 3 4 5 3 position: SQ2 41 y e q w e y e q w e u u SQ2541 SQ2441 SQ2341 SQ2540 SQ2440 SQ2340 (A) (B) (A)(B) 2 4 (A)(B) (A)(B) (A)(B) (A)(B) 2 4 4 2 4 2 4 2 4 2 5 1 3 (R1) (P)(R2) 5 1 3 (R1) (P)(R2) 5 1 3 5 1 3 (R1)(P)(R2) 5 1 3 (R1)(P)(R2) 5 1 3 (R1)(P)(R2) (R1) (P)(R2) Dual 3 port valve: SQ2 41 A B C Parts list e q w e w y No.

MHZ

O B A MHC (mm) (mm) H 2.4 2.9 3.4 4.5 5.5 6.6 9 B 5 5.7 7 9 12 14 17 MM A 2.5 3 4 5 6 7 9 C 2 2 2.5 4 5 6 7 B 5 5.7 7 9 12 14 17 A 2.5 3 4 5 6 7 9 Model MHZ2-6 1 MHZ2-10 Model MHT MHZ2-62 MHZ2-10 M2 x 0.4 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 1 N1 1 N1 1 N1 2 N2 2 N2 2 N2 2 N2 MHY MHZ2-16 MHZ2-16 MHZ2-20 MHZ2-20 MHW MHZ2-25 MHZ2-25 1 N1 MHZ2-32 1 MHZ2-32 2 MRHQ

MHZ

B 5 A E Auto switch mounting groove (Both sides) Refer to the dimension table. When auto switches are used, side mounting with through-holes is not possible.

SMC Pneumatic Clean Series

1.5 M26 x 1.5 M20 x 1.5 M10 x 1.25 M8 x 1.25 26-0.033 0 16 13 13 1/4 1/8 1/8 26-0.033 0 M10 x 1.25 32-0.039 0 8 10 M32 x 2 M14 x 1.5 With air cushion 2-NN WC GB Cushion valve (Width across flats 1.5) Relief port M5 x 0.8 WA GA GC Width across flats B2 2-P (Rc, NPT, G) WB Width across flats B1 H1 H2 I 2-Eh8 D MM AL A K H F 1.5 N1 1.5 N2 F NA ZZ + Stroke S + Stroke (mm) ZZ S P N2 I E D A 22

PSE200

Supply pressure verification Leak test P2(n1) > P1(n2) P2(n2) P1(n1) 10.0 to 101.0kPa CH Increases the set value 1 2 3 4 PRESSURE For normally closed P2(n1) > P1(n2) P2(n2) P1(n1) 0.1 to 1000.0MPa Decreases the set value SET P3(n3) and P4(n4) are the same as P1(n1) and P2(n2).