5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

A 4 (B) 2 (A) 4 Manual override B 2 A SOL.b SOL.a 3 (R) Nil: Non-locking push type D: Slotted locking type Screw driver operated 5 (R) 1 (P) 4 position dual 3 port valve: N.O./N.O. (B) 2 (A) 4 B SOL.b SOL.a 3 (R) 5 (R) 1 (P) 4 position dual 3 port valve: N.C./N.O.

V

R E SY3/5/7000 SS5Y 20 T H R E A D T Y P E PT 00T NPTF M A N I F O L D S E R I E S V A LV E S TAT I O N S 3 SY3000 5 SY5000 7 SY7000 02 2 Stations to 20 20 Stations H O W T O O R D E R B O D Y P O R T E D W/ I N D I V I D U A L L E A D W I R E SY3/5/7000 SY 20 B R A C K E T S E R I E S Without Bracket F1 With Foot Bracket F2 With Side Bracket 3 SY3000 5 SY5000 7 SY7000 A, B P O R T S I Z

SQ1000/2000

08/10 Dual flow fitting SSQ2000-52AP. 44 P. 46 P. 47 P. 48 C10 N11 P R D side U side Individual SUP spacer SSQ2000-P-3Silencer (for EXH port) EXH block plate SSQ2000-B-R Port plug VVQZ2000-CP P. 44 P. 46 P. 47 P. 48 C8 L8 P R D side SMC AN200 U side Special wiring specification (-K) D-sub connector Individual EXH spacer SSQ2000-R-3Back pressure check valve (-B) SSQ2000-BP Built-in silencer

Table of Contents

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

Modular F.R.L. Units

C B IN OUT OUT IN Q V R F Plate thickness AR10-A: Max. 3.5 T N S M U D J Bracket (Option) AR20(K)-B to AR40(K)-06-B 2 x P1 Panel mounting dimensions A (Port size) Y W C B Q V K OUT OUT IN IN Z Plate thickness AR20(K)-B to AR30(K)-B: Max. 3.5 AR40(K)-B : Max. 5 R F P2 S (Pressure gauge port size) Bracket (Option) U M J D T N AR50(K)-B/AR60(K)-B 2 x P1 A (Port size) B Q C K OUT IN R F P2 S

Rated Flow Range: 02 (0.02 to 2 L/min), Flow Adjustment Valve: None (Straight), Port Size: N1 (NPT1/8), Output Specification: C (Out 1: NPN; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve)

Rated Flow Range: 02 (0.02 to 2 L/min), Flow Adjustment Valve: None (Straight), Port Size: N1 (NPT1/8), Output Specification: L (Out 1: IO-Link or NPN/PNP), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve)

Rated Flow Range: 02 (0.02 to 2 L/min), Flow Adjustment Valve: None (Straight), Port Size: N1 (NPT1/8), Output Specification: B (Out 1: PNP; Out 2: PNP), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve)

Rated Flow Range: 02 (0.02 to 2 L/min), Flow Adjustment Valve: None (Straight), Port Size: N1 (NPT1/8), Output Specification: B (Out 1: PNP; Out 2: PNP), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve)

Rated Flow Range: 02 (0.02 to 2 L/min), Flow Adjustment Valve: None (Straight), Port Size: N1 (NPT1/8), Output Specification: L4 (Out 1: IO-Link or NPN/PNP, Out 2: Analog 4 to 20 mA), Lead Wire: N (w/o Lead Wire w/Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve)

Rated Flow Range: 0.02 to 2 L/min, Flow Adjustment Valve: None (Straight), Port Size: NPT1/8, Output Specification: Out 1: NPN; Out 2: Analog 1 to 5 V - Analog 0 to 10 V, Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: Bracket, w/o Flow Adjustment Valve, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 0.02 to 2 L/min, Flow Adjustment Valve: None (Straight), Port Size: NPT1/8, Output Specification: Out 1: IO-Link or NPN/PNP, Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: Bracket, w/o Flow Adjustment Valve, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 0.02 to 2 L/min, Flow Adjustment Valve: None (Straight), Port Size: NPT1/8, Output Specification: Out 1: PNP; Out 2: PNP, Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: Bracket, w/o Flow Adjustment Valve, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 0.02 to 2 L/min, Flow Adjustment Valve: None (Straight), Port Size: NPT1/8, Output Specification: Out 1: PNP; Out 2: PNP, Lead Wire: Lead Wire w/Connector + Rubber Cover for Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: Bracket, w/o Flow Adjustment Valve, Calibration Certificate: -, Made to Order: -

High Vacuum Angle Valve

1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

MHZ

D-Y7P D-Y69 D-Y7PV D-Y7W D-M9V D-F9WV D-Y7WV D-M9 D-F9BAL D-F9W Model MHS 4 8 1 6.5 3 1.5 Open Closed Open Closed Open Closed Open Closed MHZJ2-10 With dust cover No setting No setting MHC MHZJ2-16 No setting No setting MHT MHZJ2-20 MHY MHZJ2-25 MHW Note) There is no auto switch protrusion from the body's end surface.

MHZ

Auto switch mounting groove 4 (For D-F, D-M9(V)) 3.7 Note) When using D-Y59, D-Y69 and D-Y7 type auto switches, through-hole mounting is not possible. 12-2-38 38 Standard Type/Series MHZ2 Finger Option Through-holes in Opening/ Closing Direction [2/N2] Side Tapped Mounting [1/N1] 4-MM (Thread for mounting attachment) C C MHZ MHF MHL B A MHR 4-H (Hole for mounting attachment) MHK S S Courtesy

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Panel mount adapter ZS-46-B Panel mount adapter + Front protection cover ZS-46-D Lead wire with connector ZS-46-3L 3-core, 2 m, Non-waterproof (Without waterproof cover) Front protection cover ZS-27-01 D Panel mount adapter + Front protection cover ZS-46-D R1/8 Piping adapter ZS-46-N1 NPT1/8 Piping adapter ZS-46-N2 9 3-Screen Display High-Precision Digital Pressure Switch ZSE20(F)/ISE20

V100

VQZ 3(R) 3(R) VZ (G) (E) (T) (D, Y) VS N.C.

0.4

R port R port P port P port A, B port A, B port Type of connection Type of connection VV5Q11 VV5Q21 381 A VQ1000/2000 Series Kit (D-sub connector) F VV5Q11 VV5Q21 D-sub connector reduces installation labor for electrical connections.