Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: None (Straight), Port Size: C8 (ø8), Output Specification: A (Out 1: NPN; Out 2: NPN)

Rated Flow Range: 2 to 200 L/min, Flow Adjustment Valve: None (Straight), Port Size: ø8, Output Specification: Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V, Lead Wire: -, Unit Specification: -, Bracket/Panel Mount Adapter: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 2 to 200 L/min, Flow Adjustment Valve: None (Straight), Port Size: ø8, Output Specification: Out 1: PNP; Out 2: PNP, Lead Wire: -, Unit Specification: -, Bracket/Panel Mount Adapter: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 2 to 200 L/min, Flow Adjustment Valve: None (Straight), Port Size: ø8, Output Specification: Out 1: PNP; Out 2: Analog 4 to 20 mA, Lead Wire: Lead Wire w/Connector + Rubber Cover for Connector, Unit Specification: -, Bracket/Panel Mount Adapter: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 2 to 200 L/min, Flow Adjustment Valve: None (Straight), Port Size: ø8, Output Specification: Out 1: PNP; Out 2: Analog 4 to 20 mA, Lead Wire: -, Unit Specification: -, Bracket/Panel Mount Adapter: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: None (Straight), Port Size: C8 (ø8), Output Specification: D (Out 1: NPN; Out 2: Analog 4 to 20 mA)

Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: None (Straight), Port Size: C8 (ø8), Output Specification: D (Out 1: NPN; Out 2: Analog 4 to 20 mA), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector)

5 Port Solenoid Valve Series SY3000/5000/7000/9000

,N9 M8 connector (WO): L plug connector (L): M plug connector (M): DIN terminal (D): C8 ,N9 10-SY9120-D-C10,N11 C8 ,N9 10-SY9120-M-C10,N11 C8 ,N9 10-SY9120-L-C10,N11 C12 C12 C12 C12 Applicable cable O.D.: 3.5 to 7 74.7 40.9[47.9] 67.2 MAX.10 55.9 25.5 Approx. 300 (Lead wire length) 40.9 M8 x 1 45.4 27.9 52[59] Approx. 300 (Lead wire length) Pg7 140.1[142.3] 130.3[132.5] 149.2 150.1 125.3

1

0 MGP CY CX CK1 C(L)K CDJZ2B10/16-Z-B C(L)KU CKQ Component Parts CKZ2N No.

SY

SS5Y31, #3 + #15 8 Body Ported Type Note) [ ]: Values for AC < >: Values with surge voltage suppressor Series SY5000 Dimensions With foot bracket SY5120-F1 2 position single Grommet (G), (H): SY5120(-F2) Scale: 40% G H C4 C6 C8 G H C4 C6 C8 G H SY5120-01 L type plug connector (L): SY5120-LDIN terminal (D): SY5120-DC4 C6 C8 M type plug connector (M): SY5120-MC4 C6 C8 C4 C6 C8 Applicable cable

SQ1000/2000

0 Fitting assemblies> Wiring For single (2 wires) For double (3 wires) 0 1 (For P, R port) VVQ1000 51A C8 SSQ1000 4 A P 1 200 For stations 2 to 24 Bore size Wiring C6 C8 N7 N9 6 One-touch fitting 8 One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting 0 1 For single (2 wires) For double (3 wires) Lead wire length Dimension L (mm) Dimension L (mm) Dimension L (mm) Dimension L (mm

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

, N9 C10, N11 M8 connector (WO): 10-SY7220-WO(-F2) C8, N9 C10, N11 D Y L plug connector (L): 10-SY7220-L(-F2) C8, N9 C10, N11 M plug connector (M): 10-SY7220-M(-F2) C8, N9 C10, N11 Approx. 300 (Lead wire length) 141.2 [145.6] Applicable cable O.D. 3.5 to 7 66 58.5 47.2 Max. 10 16.1 31.5 [38.5] 32.1 36 18.5 M8 x 1 42.6 [49.6] Approx. 300 (Lead wire length) Pg7 121.6 [126] 111.6 161.2 159.4

SX

(Mounting hole for manifold) (Light/Surge voltage suppressor) SX5120-01 G H (Lead wire length) G: 300 H: 600 (A, B port) Polarity indication 2-2.2 die-cast hole (For manifold gasket positioning) (P , EA, EB port) L plug connector (L): SX5120-LC4 C6 C8 M plug connector (M): SX5120-MC4 C6 C8 2-One-touch fittings (A, B port) 2-One-touch fittings Applicable tubing O.D.: 4 6 8 Applicable tubing

Compact 5-Port Solenoid Valve

C6: 6 (SMC) C8: 8 (SMC) 34.9 107 15.8 * These figures show the JJ5SY3-10T-05D-C8. * Refer to page 98 for dimensions of external pilot (Made to Order) and silencer. n: Stations L: Dimensions n L 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 167.4 178.9 190.4 201.9 213.4 224.9 236.4 247.9 259.4 270.9 282.4 293.9 305.4 316.9 328.4 L2 66.1 77.6 89.1 100.6 112.1 123.6 135.1 146.6 158.1 169.6 181.1

0.4

L kit 1 to 8 stations C8 (8) T kit 2 to 20 stations Note 1) Inch-size One-touch fittings are also available.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

N9 Individual EXH spacer VVQ2000-R-1-C8 N9 EXH block plate VVQ2000-19A C8 (EXH port) 8 One-touch fitting C8 (SUP port) 8 One-touch fitting One set includes 2 pcs.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

N9 Individual EXH spacer VVQ2000-R-1-C8 N9 EXH block plate VVQ2000-19A C8 (EXH port) 8 One-touch fitting C8 (SUP port) 8 One-touch fitting One set includes 2 pcs.

0.4

45 (33) (59.5) 58 Residual pressure release manual override 2 x Rc 1/8, 1/4, C6, C8 C6: 6 One-touch fitting assembly (41.5) C8: 8 One-touch fitting assembly C8: 8 One-touch fitting assembly C6: 6 One-touch fitting assembly 2 x Rc 1/8, 1/4, C6, C8 L n Dimensions Formula L1 = 22n + 24 n: Station B B B 2 2 2 A A A 1 46 75 85.5 2 68 87.5 98 3 90 112.5 123 4 112 137.5 148 5 134 162.5 173 6 156

Table of Contents

0 1000 2000 3000 4000 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) ARBF5050-00-A ARBF3050-00-A ARBF4050-00-A 0.6 Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa 0.5 Outlet pressure (MPa) 0.4 0.3 0.2 0.1 0 1000 2000 3000 4000 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 3-5-6 7 Series VFR2000/3000/4000/5000/6000 Caution

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

C4: 4 (SMC) C6: 6 (SMC) C8: 8 (SMC) N3: 5/32" (SMC) N7: 1/4" (SMC) N9: 5/16" (SMC) L: DIN Rail Overall Length n: Stations L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L1 L2 L3 L4 L5 148 160.5 185.5 198 210.5 235.5 248 260.5 273 298 310.5 323 335.5 360.5 373 385.5 410.5 423 435.5 137.5 150 175 187.5 200 225 237.5 250 262.5 287.5 300 312.5 325 350 362.5 375 400 412.5 425 120.2 136.2