Table of Contents

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

SQ1000/2000

Leakage voltage Particularly when using a C-R element (surge voltage suppressor) for protection of the switching element, take note that leakage voltage will increase due to leakage current flowing through the C-R element, etc.

Modular F.R.L. Units

Lock button 12 B AC10-A Series AC20-B to AC60-B Series Dimensions AC10-A S N A F M J R B C V Q2 Q1 Q1 IN OUT 2 x P1 (Port size) U P2 G Clearance for maintenance (Pressure gauge port size) Drain AC20-B S N A F M J R B C Q2 V Q1 Q1 K IN OUT 2 x P1 (Port size) U P2 G Clearance for maintenance (Pressure gauge port size) Drain AC25-B to AC60-B N A F S J M R V Q1 Q1 B C K OUT IN 2 x P1 (Port size

High Vacuum Angle Valve

1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

MHZ

O B A MHC (mm) (mm) H 2.4 2.9 3.4 4.5 5.5 6.6 9 B 5 5.7 7 9 12 14 17 MM A 2.5 3 4 5 6 7 9 C 2 2 2.5 4 5 6 7 B 5 5.7 7 9 12 14 17 A 2.5 3 4 5 6 7 9 Model MHZ2-6 1 MHZ2-10 Model MHT MHZ2-62 MHZ2-10 M2 x 0.4 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 1 N1 1 N1 1 N1 2 N2 2 N2 2 N2 2 N2 MHY MHZ2-16 MHZ2-16 MHZ2-20 MHZ2-20 MHW MHZ2-25 MHZ2-25 1 N1 MHZ2-32 1 MHZ2-32 2 MRHQ

MHZ

6 Lever Type C snap ring Electroless nickel plated Stainless steel Heat treated Brass r !7 Guide Exhaust plug Stainless steel Heat treated Polyvinyl formal t !8 Finger Exhaust filter Stainless steel Stainless steel spring wire y !

V100

Flow Characteristics With DIN terminal block With terminal block Port size Flow characteristics 2 3 (A R) b Cv C [dm 3/(sbar)] 1 2 (P A) b Cv C [dm 3/(sbar)] 26 38 0.38 0.30 7.0 9.8 27 38 0.37 0.32 7.4 9.8 27 40 0.36 0.22 7.3 9.8 25 40 0.37 0.20 6.8 9.6 2 1 (A P) b Cv C [dm 3/(sbar)] 3 2 (R A) b Cv C [dm 3/(sbar)] 1/2 3/4 Port size Effective area (mm2) 2 3 (A R) 1 2 (P A) 235

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

WR Edition C Safety Instructions Be sure to read the Handling Precautions for SMC Products (M-E03-3) and Operation Manual before use.

0.4

(L4) (L3) (5.25) Applicable connector: Flat ribbon cable connector (26P) (Complies with MIL-C-83503) L2 L1 23.5 63.5 <67.5> 27 P = 10.5 8.8 28 (12) 13 Indicator light Manual override 1.5 4.8 (5.5) (35) A A A B A B A B A B A 93.5 <100.4> 66 40.5 M4 mounting hole 2 35 52 61.5 D side U side Stations 8 7 6 5 4 3 2 1 n C8 [3(R) EXH port] C8: 8 One-touch fitting DIN rail clamp screw R R 40.7 25

SMC Electronic Switch Series Variations

L R L R L R L R L R L R Glass q w e Stainless steel Stainless steel Cross recessed round head screw Brass Stainless steel r t Stub 3.8-2 ISA Specifications Fluid Dry air (Filtered through a 5m filter) Operating pressure range 0.05 to 0.2MPa Recommended pressure range 0.1 to 0.2MPa Detection zone 10 to 300 m Repeatability including temperature characteristics 10m (for 0 to 60C on the basis

CM2

Dd9 t m L d Part no. l Trunnion Nut CD-S02 CD-S03 0.040 0.076 8 0.9 1.6 19.5 24.5 7.6 Type C 8 for axis Material: Carbon steel 0.040 0.076 10 1.15 1.35 29 34 9.6 Type C 10 for axis Applicable bore size (mm) 20 25, 32 40 D C B d H Part no.

ISO Cylinder

Auto switch mounting Auto switch model C85 Series C75 Series Bore size [mm] 8 10 12 16 20 25 32 40 D-M9l(V) D-M9lW(V) D-A9l(V)*7 BJ6-008 (A set of a, b, c, d) BJ6-010 (A set of a, b, c, d) BJ6-012 (A set of a, b, c, d) BJ6-016 (A set of a, b, c, d) BM5-020 (A set of a, b, c, d) BM5-025 (A set of a, b, c, d) BM5-032 (A set of a, b, c, d) BM5-040 (A set of a, b, c, d) D-M9lA(V) BJ6-008S (A

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

R.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

R.

Table of Contents

, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VQZ N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") VQD P. 2-4-18 P. 2-4-20 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C3 (3.2) C4

VQC

Leakage voltage When using a C-R element (surge voltage suppressor) for protection of the switching element, please keep in mind that leakage voltage will increase due to leakage current flowing through the C-R element.

Series VQ Metal Seal/Rubber Seal Body Ported

SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7 Built-in silencer P.1.10-16 P.1.10-18 VP4 C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit VQ N1 (1/8) N3 (5/32) N7 (1/4) VQ4 VQZ Built-in silencer P.1.10-48 P.1.10-52 VQD C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZS kit C6 (6) VFS N1 (1/8) N3 (5/32) N7 (1/4) VS N7 (1/4)

SMC Pneumatic Clean Series

D M 2 R A 40 150 C73 21 C D M 2 R A 40 150 C73 Number of auto switches Mounting style 2 pcs. 1 pc.

SY

Leakage voltage Particularly when using a C-R element (surge voltage suppressor) for protection of the switching element, take note that leakage voltage will increase due to leakage current flowing through the C-R element. Therefore, select a circuit or an element in advance to limit the amount of residual leakage voltage to the values shown below.

CRB2/CRBU2/CRB1

Single vane type Double vane type 0 -5 +4 0 a r n n R e o 9 g o g t 0 0 n a i e 9 +4 0 a t t 0 i a o r 0 1 e t 1 n n o 8 g o R 0 e n r i a g a +4 0 t a n n r t g a n o e r o R n i 2 t o a 7 t i 0 t o a R t o +4 0 R For size 40 actuators, a parallel keyway will be used instead of chamfer.