Rated Flow Range: 0.5 to 50 L/min, Flow Adjustment Valve: None (Straight), Port Size: NPT1/8, Output Specification: Out 1: IO-Link or NPN/PNP, Lead Wire: -, Unit Specification: -, Bracket/Panel Mount Adapter: -, Calibration Certificate: -, Made to Order: -

1

3 r e !2 y i t !0 w o u q!1 !4 JA MXH MXQ CDJ2RA10/16-SZ-B MGP CY CX CJ2RA-TZ CK1 !3 r e !2 yit!0 w o u q !5 !1 !4 C(L)K C(L)KU CKQ CDJ2RA10/16-TZ-B CKZ2N WRF Component Parts No.

Electric Actuator with Integrated Guide

Nil R L Motor straight, motor cable, switch and switch rail located on the right Photo micro sensor rail 1 pc. Motor straight, motor cable, switch and switch rail located on the left Proximity switch rail 1 pc.

Compact 5-Port Solenoid Valve

dimensions L = 6.5 x n1 + 9 x n2 + 39.6 Silencer (Exhaust port) (Built-in silencer specification) n1: Number of 6.5 mm pitch manifold block stations (Applicable fitting: 2, 4) n2: Number of 9 mm pitch manifold block stations (Applicable fitting: 6) A A B B 4 A A * These figures show the JJ5SY1-10F2-05DR-C4.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

R.

LEC-OM02704CN

/ m i n 0 r / m i n L S P L S P O N O N O F F L O F F L S N S N 1 S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F O F F L L S N S N 2 S S S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F L S N O F F L S N 3 S S S S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N L S N O F F L S N O F F 6 39 6 6.4.4 (PC31PC34) PD20 PD20 0 1 2 3 0() 1() 2()

Series SV

TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE1 US C R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

High Vacuum Angle Valve

How to Order [Option] XLGV M9N 16 A 1 G L Flange size 16, 25, 40 1 q e u r t XLGV M9N 50 A 1 G L Flange size 50, 63, 80 i w y o !0 !

Aluminum High Vacuum Angle Valve

indicator Flange side r Temperature specifications/Heater t Auto switch type Heater With 100C heater With 120C heater Temperature 5 to 60C Symbol Nil Auto switch model Remarks Without auto switch (without built-in magnet) Symbol Nil High temperature type D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9/

SV

TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE1 US C R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

Fieldbus System

Connector for unit (Plug) 5 t r t r EX600-AXA EX600-AYA EX600-AMB End Plate q t No.

Table of Contents

ISA2 52.5 l/min 2.5 l/min IS 10 l/min 100 l/min PF2A511 105 l/min 5 l/min ZSM 20 l/min 200 l/min 210 l/min 10 l/min PF2 PF2A521 IF 50 l/min 500 l/min 525 l/min 25 l/min PF2A551 Data Sensor Flow rate range 0.5 l/min 2 l/min 5 l/min 10 l/min 20 l/min 40 l/min 100 l/min 0.5 l/min 4 l/min PF2W504 PF2W504T 0.35 l/min 4.5 l/min 16 l/min 2 l/min PF2W520 PF2W520T 1.7 l/min 17l/

0.4

Hole Elbow fitting assembly VVQ1000-F-L(C3/C4/C6/M5/N1/N3/N7) It is used for piping that extends upward or downward from the manifold. When ordering this option incorporated with a manifold, indicate L or B for the manifold port size (when installed in all stations.)

C85

1 y q r e i !2 o !

SX

(L): SX5 40(R)-L 02 M plug connector (M): SX5 40(R)-M-02 Manual override (Press and turn for the locking type.)

CATALOG

www.stevenengineering.com A C T U AT O R S P R O D U C T S E L E C T O R PA G E 1.1 VA LV E S P R O D U C T S E L E C T O R PA G E 2.1 F L O W C O N T R O L E Q U I P M E N T P R O D U C T S E L E C T O R PA G E 3.1 F I T T I N G S A N D T U B I N G P R O D U C T S E L E C T O R PA G E 4.1 A I R P R E PA R AT I O N P R O D U C T S E L E C T O R PA G E 5.1 VA C U U M P R O D U C T S E L E

5 Port Solenoid Valve Series SY3000/5000/7000/9000

P R R P R R L (10) 8 End plate side End plate side (24) (35) 5.5 Silencer with One-touch fitting The silencer plugs directly into the One-touch fittings of the manifold.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

for 1/4" M5: M5 thread 53 13.8 A 2 10 Manual override 24.5 7.8 (N1, N3, N7) (M5: 5.7) Cover diameter 1.4 Cross sectional area 0.2mm2 (Lead wire length) 300 SMC 27.5 16.3 18 13.6 7 23.4 Mounting holes 41 M5 x 0.8 P port M5 x 0.8 R port R 3 P 1 10.7 9 M5 x 0.8 External pilot port 32 (Only external pilot port type(R)) L type plug connector (L): VQZ115L -N1, N3, N7, M5 M type plug connector

SZ3000

Switch (When equipped with switch) L n 2 5 6 7 8 9 10 4 3 Internal Pilot Manifold L Dimension n: Stations (n1 + n2) L n 2 5 6 7 8 9 10 4 3 External Pilot Manifold L Dimension n: Stations (n1 + n2) L1 L2 L3 L4 L1 L2 L3 L4 110.5 100 81 15 123 112.5 91.5 16 135.5 125 102 17 148 137.5 112.5 18 148 137.5 123 12.5 160.5 150 133.5 13.5 173 162.5 144 14.5 185.5 175 154.5 15.5 198 187.5 165 16.5 123

7.4

C3: 3.2 One-touch fitting C4: 4 One-touch fitting M5: M5 thread N1: 1/8" One-touch fitting N3: 5/32" One-touch fitting Dimensions n: Station (Maximum 16 stations) n L 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 68.4 68.4 68.4 68.4 68.4 68.4 76.9 85.4 93.9 102.4 110.9 119.4 127.9 136.4 144.9 L2 77.4 77.4 77.4 77.4 77.4 77.4 85.9 94.4 102.9 111.4 119.9 128.4 136.9 145.4 153.9 Note) The L dimension