Rotary Actuator/Vane Type

L1 = E2 = E4 = L3 = X = [mm] Size CRB2, CRBU2 Y L1 max L4 D2 10 4 to 8 Y-2.5 L2 + 1.5 3 15 4.5 to 9 Y-3 L2 + 1.5 3 to 4 20 5 to 10 Y-3.5 L2 + 2 3 to 5 30 7 to 13 Y-5 L2 + 3 3 to 6 [mm] Size CRB2 CRBU2 X L1 max L3 D1 X L1 max L3 D1 10 6 to 14 X-4.5 L1 + 1.5 3 4 to 14 X-2.5 L1 + 1.5 3 15 7 to 18 X-5.5 L1 + 1.5 3 to 4 4.5 to 18 X-3 L1 + 1.5 3 to 4 20 8 to 20 X-6.5 L1 + 2 3 to 5 5 to 20 X-3.5

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

e n Stopper screw A ov at ra k io +4 0 o n n gr of ra io 0 y ng e at k e of Ro CRA1 ot e 19 Angle adjustment range 3 R g ta ve n tio ra oo n ra gr n ng y io ke e of at ot R CRQ2 Stopper screw A: For end adjustment in clockwise direction Stopper screw B: For end adjustment in counter clockwise direction MSQ MRQ How to Set Rotation Time DEven if the torque that is generated by the rotary

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com gr 0 n io at 8 ot e R R 1 y g ot e e n Stopper screw A ov at ra k io +4 0 o n n gr of ra io 0 y ng e at k e of Ro CRA1 ot e 19 Angle adjustment range 3 R g ta ve n tio ra oo n ra gr n ng y io ke e of at ot R CRQ2 Stopper screw A: For end adjustment in

CQS

L1 14 15.5 18.5 22.5 Bore size (mm) 12 16 20 25 H1 C1 X L1 24 25.5 28.5 32.5 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 9 10 12 15 10.5 12 14 17.5 Basic Style Long stroke range (mm) 35 to 100 35 to 100 75 to 200 75 to 300 Standard stroke range (mm) 5 to 30 5 to 30 5 to 50 5 to 50 Long stroke Standard stroke Without auto switch With auto switch A 20.5 20.5 24 27.5 Bore size (mm) E C OA D OB Q RA

Made to Order

ME MB RR RB MA MD MT E + Stroke A + (Stroke x 2) MC (RA) (mm) Bore size A E MA MB MC MD ME MT RA RB RR 90 12 16 20 25 32 40 33 RJ0806H M12 x 1.5 6 8 27 13 19 7 51 RJ0806H M12 x 1.5 6 33 28 16 19 8 7 58 94 RJ1007H M14 x 1.5 37 33 22 8 10 9 68 30 109 M14 x 1.5 37 RJ1007H 25 8 10 41 82 30 109.5 9 M20 x 1.5 RJ1412H 32 8 55 51 100 38 12 9 135.5 RJ1412H M20 x 1.5 8 55 60 32 38 12 9 108 142 -X -

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Blanking To lock in set position (Flow path: P RA): Turn the manual override clockwise by 180 to mark A press down. Valve is now locked in the set condition.(Flow path: P RA) To reset (Flow path: P RB): Turn manual override counterclockwise to mark B and press down. Valve will then be in the reset condition. (Flow path: PRB).

CQ2

95 104 24 25.5 28.5 32.5 Foot (mm) CU Bore (mm) Stroke range (mm) A B L LD LG LH LS LT LX LY LZ X Y 12 16 20 25 5 to 30 59.4 32.4 13.5 4.5 2.8 17 20.4 2 34 29.5 44 8 4.5 CQS 5 to 30 63 36 13.5 4.5 2.8 19 24 2 38 33.5 48 8 5 5 to 50 67 38 14.5 6.6 4 24 26 3.2 48 42 62 9.2 5.8 CQ2 5 to 50 69 39 15 6.6 4 26 24 3.2 52 46 66 10.7 5.8 Flange/CDQ2WF MU Rod end male thread (mm) Bore (mm) A1 L4 L3

Rotary Actuator

Additionally, do not mount the foot bracket with the pressure applied to the port. y A port B port 0 a 1 w y y a e k w of y e e g k n ra of n e io at g ot R n R ra +4 0 n ot io 0 at at ot R 8 io 1 R n y +4 0 ot ra a w n y 0 g at e e k of 9 io 1 n ay ra w n g ey e k of 189 CRA1 Series Dimensions/Basic Type: ClRA1BS Size: 30 Single shaft: ClRA1BS 28 Auto switch 8 x M5 x 0.8 depth 6 (Opposite

CRB2/CRBU2/CRB1

(mm) E3 = E1 = Y = Size X L3 max.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 Metric 6 8 7 12 12 16 20 25 12 16 20 25 9 10 12 15 25.5 10.5 12 14 17.5 5 to 30 5 to 30 5 to 50 5 to 50 35 to 100 35 to 100 75 to 200 75 to 300 45.5 13.5 20.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.25 5.4 5.4 7 10 25.5 34 45.5 13.5 20.5 24 29.5 55.5 59 14.5 15 19.5 37.5 32.5 27.5 22.5 Inch Long stroke L1 21.5 21.5 22.5 24.5 Standard H OA Bore (mm) Bore (mm) OB Q RA

Rotary Actuator

$Applicable shaft type: W $Applicable shaft type: W (mm) Y L2 L4 max Size (mm) E3 = E1 = Y = 10 X L1 L3 max Size 3 to 8 Y-1 5-( 8-Y) to (Y-1 ) L2 = 10 15 L4 = 9-(14-X) to (X-3) 5 to 14 X-3 3 to 9 Y-1.5 6-( 2-Y) to (Y-1.5) L1 = L3 = 15 20 10-(18-X) to (X-4) 8 to 18 X-4 3 to 10 Y-1.5 7-(10-Y) to (Y-1.5) 20 30 10-(20-X) to (X-4.5) 10 to 20 X-4.5 5 to 13 Y-2 8-(13-Y) to (Y-2 ) X = 30 40 10 to

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

[mm] L3 [mm] L3 [mm] m 600 600 600 L3 Z 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 60 70 0 10 20 30 40 50 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 L4 [mm] L4 [mm] L4 [mm] 600 600 600 L4 X 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 70 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000

VQ7-6/7-8

EXH port) 4-1/8 39 P 21 SMC R2 R1 (R1, R2 port) 4-3/8 9 17 17 26.5 26.5 L Dimension n: Stations 1 2 3 4 5 6 7 8 9 10 Formula L1 107 150 193 236 279 322 365 408 451 494 L1 = 43n + 64 L2 119 162 205 248 291 334 377 420 463 506 L2 = 43n + 76 255 298 341 384 427 470 513 556 599 642 L3 L3 = 43n + 212 (215.5) (258.5) (301.5) (344.5) (387.5) (430.5) (473.5) (516.5) (559.5) (602.5) (645.5) L3 dimensions

VQ7-6/7-8

L3 = 43n + 212 (215.5) (258.5) (301.5) (344.5) (387.5) (430.5) (473.5) (516.5) (559.5) (602.5) (645.5) L3 dimensions inside ( ) are for MP . 3-10-19 Series VQ7-6 Manifold Option Parts Interface regulator ARB250-00Residual pressure release valve spacer AZ503-82 P A B A B Interface regulator 254 P A B ARB250-00127 SMC SMC 193.5 (165.5) 205.5 (177.5) 195.5 (167.5) 183.5 (155.5) Manual override

Shock Absorbers and Rate Controls

0 u t l3 N/A 0.44 2.8r .43 .56 N/A .44 .50 (tn)0H[.35(B) 3.96 4.36 7r6.18 uNt t6 N/A 0.44 3.44 .44 .57 .02 .50 .50 ([Rt0r .5(B) 3.88 4.35 y+I6 u{r . i 9 N/A 0.50 3.31 .oJ .67 N/A .68 .50 .R)otMt.0(8) 5.12 5.62 I-I2 UNF .25 N/A 0.61 4.09 .87 .55 . 1 8 .88 .50 (tR)0tlll.l5rl 5.92 6.12 r 74,12 U F .38 l . t 3 1.20 3.81 t.l0 .55 .21 l . l ?

A

119.2 58 71 218 D I M E N S I O N S S I N G L E R O D C L E V I S D I M E N S I O N S A C C E S S O R I E S P I S T O N R O D B A L L J O I N T DIN 648 Part no Applicable bore (mm) A A1 E1 L1 MM RR1 U1 NDH10 NX I-G02 20 34 8.5 16 25 M8x1.25 10.3 11.5 8 +0.058 0 8 -0.2 -0.4 I-G03 25, 32 41 10.5 20 30 M10x1.25 12.8 14 10 +0.058 0 10 -0.2 -0.4 Bore size Model Thread d3 dH7 h d6 b3 b1 l d7 0 l3

AC Servo Motor Driver (Pulse input type)

Power supply voltage is 200VAC single phase Trouble OFF ON RA MC Emergency stop MC SK (Note 6) Driver Servo motor Servo amplifier (Note 7) Controller CNP1 MC NFB 1-phase 200 to 230VAC L1 CNP3 (Note 5) U L2 U Motor V L3 V [1] M W N W P1 (Note 1) P2 PE CNP2 P [2] (Note 2) C [3] D Encoder CN2 (Note 3) Encoder cable L11 L21 [1] Provide specified power supply to input terminals L1 and L2. [2]

AC Servo Motor Driver (CC-Link Type)

Power supply is AC200V single phase Trouble OFF ON RA MC Emergency stop MC SK (Note 6) Driver Servo motor Servo amplifier (Note 7) Controller CNP1 MC NFB 1-phase 200 to 230VAC L1 CNP3 (Note 5) U L2 U Motor V L3 V [1] M W N W P1 (Note 1) P2 PE CNP2 P [2] (Note 2) C [3] D Encoder CN2 (Note 3) Encoder cable L11 L21 [1] Power supply input terminal: Supply specified power supply. [2] Connect the

AC Servo Motor Driver (CC-Link Type)

Power supply is 1-Phase 200 VAC Trouble OFF ON RA MC Emergency stop MC SK (Note 6) Driver Servo motor Servo amplifier (Note 7) MCCB CNP1 MC NFB 1-phase 200 to 230VAC L1 CNP3 (Note 5) U L2 U Motor V L3 V [1] M W N W P3 P1 (Note 1) P2 P4 PE CNP2 P [2] [3] (Note 2) C D Encoder CN2 (Note 3) Encoder cable L11 L21 [1] Power supply input terminal: Supply specified power supply. [2] Connect the motor

Vacuum

:nUK.r rype Auto Switch Soecifications Auto switch modeli type Reedswitch Solid slaie auto switch D-97 D-FgN (3-nre NPNTID-F9P l3-wire PNp) }F9B lC circuit, Relay, Sequenc controller Relay, Sequence controller Relay, Sequence Controller 24VDC Relay, Sequence controller Load voltaoe24VDC ot less 24VDC 28VDC or less 24VDC 110-?