SYJ3000/5000/7000

(For details, refer to page 1-518 on catalog.) + LN, MN type: with 2 sockets.

V

(N)ZFB E L E M E N T I-34S-A (N)ZFB100, 101 I-35S-A (N)ZFB200, 201 I-36S-A (N)ZFB300, 301 I-395-A (N)ZFB401 B O D Y S I Z E T U B E S I Z E OD M M 04 4 06 6 08 8 10 10 05 3/16 07 1/4 11 3/8 13 1/2 100 Max 20 ln/min 200 Max 50 ln/min 300 Max 75 ln/min 101 Max 20 ln/min 201 Max 30 ln/min 301 Max 60 ln/min 401 Max100ln/min Courtesy of Steven Engineering, Inc. !

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

holes) 2-3.2 (Mounting holes) 2-3.2 22 4 22 4 VS B A B A 11 VS7 2.5 17.5 11 2.5 17.5 A B A B (Lead wire length) 50.7 64.3 300 54.7[56] 52.6 [59.1] 300 (Lead wire length) 41.5 [48] 41.5 [48] 33.5 33.5 29.1 22.5 22.5 R2 R1 P R2 R1 P 13 13 5 5 10 10 10 10 5-M5 X 0.8 (Piping port) 5-M5 X 0.8 (Piping port) 14 14 14 14 15 15 [ ] for AC Other dimensions are the same as the grommet style. [ ]

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

H: 600mm lead wire LN: Without lead wire LO: Without connector MO: Without connector 2.2-21 LN and MN types are with 2 sockets. Series SYJ500 Construction N.C. N.O.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

-7 SYJ3000-14-10 SYJ3000-14-11 Note) Make sure to align the manifold gasket with the groove of the valve body.

SYJ300/500/700

: Without lead wire LO: Without connector MO: Without connector DO: Without connector R port P, E port R: External pilot type -+ LN, MN type: with 2 sockets.

Vacuum System Peripherals:

Mist separator: Series AM/AFM 13-14-13 Fittings & Tubing 1. Compact One-touch mini: Series KJ 13-14-14 2. One-touch fitting: Series KQ 13-14-14 3. One-touch fitting manifold: Series KM 13-14-14 4. Miniature fitting: Series M3/M6/R 13-14-14 5.Tubing 13-14-15 Flow Control Equipment 1. Speed controler: Series AS 13-14-15 2.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

. + + H: Lead wire length 600 mm D: Push-turn locking slotted type LN: Without lead wire LO: Without connector MO: Without connector W: With connector cable Note 1) + -+ LN, MN type: With 2 sockets. Refer to page 642 for the lead wire length of L and M plug connectors. Refer to page 645 for the connector assembly with cover for L and M plug connectors.

VZ100/300/500

MO: Without connector DO: Without connector Option LN, MN type: With 2 sockets. 4-6-13 14 Series VZ300 Specifications Low power consumption: 1.8 W DC Applicable for vacuum use 100 kPa VZ300R: External pilot type Exhausting equipment for pilot valve not required.

Vacuum

Rod end nut Seal washe. r'ratanalr CorB sht Rolld sle6l Seal-NBF '142 lnder 1 4 Qoriac flTre 14 14 hltn.lal k C1\ | 2o3 Port valves for vacuum use . . . . . .14 Series KJ, Series I Tl KQ, rV-3, M5. . . . 14 14 tTV0090,tTV2090 ...tso 143 Vacuum Regulator series lRVl 000/2000/3000 Standard Specifications Model rRvlooo I rRvzno .ii I :lRv3qqot ,,l Regulaiing pressure range Nole 1 -100 to -1.3kPa

Direct Solenoid

Solmldc.pc y indud6 cap, (1)rutbre3 pluo dor 15, (r ) dr 19, (2) (h 13, (2) dn 14, dnd (1) d.r 7 sc@01 t2B sordrdrdcp*3y. t'dud6p, (r) rss$d i@roddng cp...ro.dor t6. 0 ) &l 1q (2) del 13, (2) d.l 14, -d 11 | d.r 7lv5tv rvd'l{1 s6602 Solmidc4 s y. hdude, (1) .ubod a@ds plus rb| r 5, (1) irdi@ro.lign a$nbry dor 1 7& 13, (1 )drr 19, (2) dr 13, 12) d6r 14. and lrl dat 7 (b,vo lve 1"1 1 6 sdendd

o

(M5)l iOne touch fittinq i llor % tube l [ ]:ln case of manifold. t ):Without subplate So lenoid Specifications Specifications crommet(G) (H),Plug connector(L or M) 24VDC, 1 2VDC, 6VDC, sVDC, 3VDC, 1 1 oVAC' 20-100 Psl(1.5-7kst/cm,) 14-1m PSI(1-7kSf/cm?)

Air Pilot Operated

Choose Manitold Block desired. e.g. #12, #14 or #16. 4. To specily a valve mounted on a manilotd btock Insd manitold number into valve number i.e. NVSA 41 1 4-'l 1 N b a NVSA 41 1 4-0ON vatle mount , on a #11 block. 't1 '12 = Mouoled on siacking manilotd block r,, NPT side ports (2) '14 = Mounled on stacking manifold block 7."

o

(M5)l iOne touch fittinq i llor % tube l [ ]:ln case of manifold. t ):Without subplate So lenoid Specifications Specifications crommet(G) (H),Plug connector(L or M) 24VDC, 1 2VDC, 6VDC, sVDC, 3VDC, 1 1 oVAC' 20-100 Psl(1.5-7kst/cm,) 14-1m PSI(1-7kSf/cm?)

5-Port Solenoid Valve

Overall manifold length Overall manifold length Approx. 29% reduction SY5000 manifold SY5000: 3 stations SY3000 manifold SY3000: 4 stations Mixed manifold SY5000: 3 stations, SY3000: 4 stations For serial transmission EX260 A B A B A B A B A B A B A B A B A B A 14 A B A 14 A B A 14 A B A 14 A B A 14 A B A 14 Installation space A 14 A 14 A 14 A 14 A 14 A 14 A 14 A 14 B 12 B 12 B 12 B 12 B

Air Pilot Operated Series NVSA

Subplate BLrna N AXT 335-12.2 '14 Hold Down Bolts 32 x 1 n.')

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

(M5)l iOne touch fittinq i llor % tube l [ ]:ln case of manifold. t ):Without subplate So lenoid Specifications Specifications crommet(G) (H),Plug connector(L or M) 24VDC, 1 2VDC, 6VDC, sVDC, 3VDC, 1 1 oVAC' 20-100 Psl(1.5-7kst/cm,) 14-1m PSI(1-7kSf/cm?)

MXQ

For the applicable auto switch to buffer, refer to page 8-5-14. It requires to order separately.

IIIIIII

{kq) 4.41(2\ P.T. ln(mm) 0.06 (1.s) O.T. ln(mm) 0.06 (1 .5) T.T. ln(mm) 0.12 (8) '7s PS|G (5 2Npr th DIMENSIONS Model# A B c o E F G H J K NVM 120t130 1.73 (44) 1.00 '25.411.28 32.5) 1 0 c o.22 (5.5) 0.30 (7.5) 0.67 (17) 0.57 14.s) 1.06 (27) (4) ). t 1 (25) NVM 121t131 1.73 (44\ 1.00 25 4l 1 . 1 2 tn 5t ).9 (2s) 0.22 (5.5) 0 . 1 4 (3.s) 1.67 (17) o.57 14.51 1.06 Q7l ).1 t (4) Millimeters

Air Slide Table Series MXQ

7 7 6.5 6.5 3.2 3.2 A 12.5 5.7 12.5 5.7 B H (NN 1) x H G Section AA Section BB (mm) ZZ 53 63 77 91 116 142 M 46 56 70 84 109 135 Z 45.5 55.5 69.5 83.5 108.5 134.5 K 23.5 33.5 43.5 53.5 63.5 88.5 J 17 28 40 52 78 105 I 11 10 12 14 13 12 H 25 28 31 29 30 NN 2 2 3 3 4 4 G 7 14 8 8 31 N 4 4 6 6 6 6 HA 19 28 27 31 58 60 Model F 25 25 26 32 46 50 GA 13 14 29 39 37 61 KA 82.5 112.5 NA 4 4 4