SMC Corporation of America
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Rated Flow Range: 04 (0.5 to 4L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 03 (3/8), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: None, Calibration Certificate: None, Made to Order: X109 (EPDM Seal Material)

Rated Flow Range: 04 (0.5 to 4L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 03 (3/8), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: R (Bracket)

Rated Flow Range: 04 (0.5 to 4L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 03 (3/8), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: G (Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °C)

Rated Flow Range: 04 (0.5 to 4L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 03 (3/8), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: R (Bracket), Calibration Certificate: A (Calibration Certificate)

Rated Flow Range: 0.5 to 4L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 3/8, Output Specification: OUT1: Analog 1 to 5V, Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: Bracket, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 0.5 to 4L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 3/8, Output Specification: OUT1: Analog 1 to 5V, Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °C, Bracket: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 0.5 to 4L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 3/8, Output Specification: OUT1: Analog 1 to 5V, Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: Bracket, Calibration Certificate: Calibration Certificate, Made to Order: -

Rated Flow Range: 0.5 to 4L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 3/8, Output Specification: OUT1: Analog 1 to 5V, Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: None, Calibration Certificate: None, Made to Order: EPDM Seal Material

HYS Indicator light SE1(L)-18/-19 I Z Brown DC (+) Lead wire 0.2 to 0.33 mm2 Max. coating O.D. 1.7 mm Black OUT1 Socket LED Red Hook White OUT2 1 k Connector DC polarity indicator SE1(L)--16/-17 I Z Blue DC () With pressure setting trimmer 1 (SET 1), OUT 1 (Black lead wire, Red LED) can be set.

Y S I Z E 1 M5 2 1/8, 1/4 Standard 3 3/8 Standard 4 1/2 Standard T H R E A D P O R T S I Z E M5 ...M5 U01 ..1/8 U02 ..1/4 U03 ..3/8 U04 ..1/2 U32 ..10-32UNF 01 ... 1/8 02 ... 1/4 03 ... 3/8 04 ... 1/2 W I T H O N E-T O U C H F I T T I N G S T Y P E 2 Elbow 3 Universal C O N T R O L M E T H O D 0 Meter Out 1 Meter In Courtesy of Steven Engineering, Inc. !

2 NPT3/8 PC1/2-N03 $1.41 3/16 NPT3/8 PC3/16-N03 $0.93 1/2 NPT1/2 PC1/2-N04 $1.41 O.D.Tube Thread ITEM NO: PRICE Round male straight (inch ) (UNF&NPT) USD/PCS 1/4 10-32UNF POC1/4-U10 $0.63 1/4 NPT1/8 POC1/4-N01 $0.63 O.D.Tube Thread ITEM NO: PRICE 1/4 NPT1/4 POC1/4-N02 $0.63 (inch ) (UNF&NPT) USD/PCS 1/4 NPT3/8 POC1/4-N03 $0.99 1/8 10-32UNF POC1/8-U10 $0.63 5/16 NPT1/8 POC5/16-N01 $0.63 1/

Within 0.2% (Full span) Within 0.12% (Full span)/C Temperature characteristics 0 to 50C (With no condensation) Operating temperature range IP65 equivalent Enclosure Connection type Built-in One-touch fittings z, x, c: 4 Metric size For single unit z, x, c: 5/32" Inch size Connection size z, c: 6, x: 4 Metric size Manifold z, c: 1/4", x: 5/32" Inch size (1) Weight 100 g or less (without

M5 Port size M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Type 01 02 03 04 U10/32 N01 N02 N03 N04 Elbow Universal 2 3 Universal type Applicable tubing O.D.

Connection NPT 1/8 N01 Connection NPT 1/4 N02 Port size Connection NPT 3/8 N03 Applicable model IRV1000 Option Connection NPT 1/2 N04 Size Symbol IRV3000 IRV2000 Connection G 1/8 F01 01 02 03 04 1/8 1/4 3/8 1/2 Connection G 1/4 F02 Connection G 3/8 F03 Connection G 1/2 F04 13-14-2 3 Vacuum System Peripherals: Electronic Vacuum Regulator: ITV209 Specifications ITV2090 ITV2091 Model 24 VDC

Therefore, use a spacer with a thickness 1 or above. Applicable model t ZH15DA-09-N03-11 ZH15DA-N02-N03-N03 2 Minimum C Factor of a Supply Valve Model C[dm3/(sbar)] ZH05A 0.12 ZH07A 0.23 ZH10A 0.47 ZH13A 0.80 ZH15A 1.06 ZH18A 1.53 ZH20A 1.88 ZH18DA-11-N03-13 ZH18DA-N03-N03-N03 1 ZH20DA-10-04-12 ZH20DA-03-04-04 ZH20DA-11-N04-13 ZH20DA-N03-N04-N04 t 2.

40.7 18 1.5 36.7 AS22 0-N02-ST NPT 1/4 17.5 NPT 1/4 AS32 0-02-ST Rc 1/4 19 22.5 R 1/4 AS32 0-F02-ST PF 1/4 24.3 9.5 30 55.3 22.4 1.5 49.3 AS32 0-N02-ST NPT 1/4 NPT 1/4 AS32 0-03-ST Rc 3/8 19 22.5 R 3/8 AS32 0-F03-ST PF 3/8 24.3 9.5 30 53.7 20.8 1.5 47.7 AS32 0-N03-ST NPT 3/8 NPT 3/8 AS42 0-04-ST Rc 1/2 24 27.5 R 1/2 AS42 0-F04-ST PF 1/2 28.5 12 38.5 63.8 26.7 1.5 55.8 AS42 0-N04-ST NPT 1

Example) VHS30-N03-RZ-D Symbol Description Body size 20 30 40 Thread type Nil Rc*1 N NPT F G 01 1/8 02 1/4 Port size 03 3/8 04 1/2 Nil Flow direction: Left to right a Flow direction Semi-standard R Flow direction: Right to left Nil Name plate in imperial units: MPa b Pressure unit Z*2 Name plate in imperial units: psi *3 *3 *3 *1 EXH port thread type: G *2 For thread type: NPT This product

Note) Not available for ISG 19/29 type Material Port size 0 1 Copper alloy Stainless steel 316 R 3/8 NPT 3/8 03 N03 Other Operating Environment Caution 1. Never use in an environment, where flammable fluids or gases are used. Since this product is not explosion-proof and may trigger an explosive disaster. 1. Bellows assembly is available for maintenance.

(Exhaust center) 1/4" 17(0.9) Exhaust center VH302-N02, N03 VH312-N02, N03 2 (Position) 2 1 1.56 (0.71) (A) 2 (B) 4 VH3 1/4", 3/8" VH320-N02, N03 VH330-N02, N03 3 (Closed center) 3/8" 20(1.1) 1 (P) 3 (R) VH321-N02, N03 VH331-N02, N03 3 (Exhaust center) VH322-N02, N03 VH332-N02, N03 2 1 3 4 2 (Position) VH400-N02 to N06 VH410-N02 to N06 3 (Closed center) 1/4" 45(2.5) 4 3 VH401-N02 to N06 VH411

NPT 1/4 AS321F-N03 AS331F-N03 NPT 3/8 AS421F-N04 AS431F-N04 NPT 1/2 Note 1) Elbow type only Note 2) Meter-out and meter-in types can be visually differentiated by the flow direction symbol on the resin body.