SMC Corporation of America
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Rated Flow Range: 0.5 to 4L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 3/8, Output Specification: OUT1: Analog 4 to 20mA, Temperature Sensor: -, Lead Wire: -, Units on Label: -, Bracket: -, Calibration Certificate: -, Made to Order: -

Description No. 2 Common IN Individual IN Common IN Individual IN Bonnet Polyacetal Regulator NARM2500-A-N02 NARM2500-B-N02 NARM3000-A-N03 NARM3000-B-N03 9 Regulator 1 Component Parts 10 End plate R 1 No.

zoo ~ ) 2 ~ i 100 E 12 z ,; 2 ~ E , E :; 100 V ~ " I ~ , , " , f< ' ~ 0 u: , ' l ~ ~ 0 w 0 5 10 ~ V " ~ 0 ] w 0 5 10 Needle revolullOOs (RevolutIOns) Needle revolutions (Revolutions) ASP530F ASP630F 12. 1500 'E 20 E 12 11~14:l~ z ~ ~ ~IOOO 15 . , g j " . 000 14 'E ' , ' h E cr z 12 ,; "'500 . l/ : 4 i 1,(" 0 to, 1~ OS, D9 10 ~ E ~ " , "' g 10 : ; ~.; 0 --:' 500 ~ ~ 5 :J" ~ -r ~ 0 w

-26-B) (ZS-26-01) ZS-26-01 1 (ZS-26-B) 190 2,1/41/2 72 2, , -15No.PF-OMN0011CN-C , 1 DC() 2 N.C.

Sonic conductance C: 1 to 18 [dm3/(sbar)] Connection method M thread, R (NPT) thread type One-touch fitting connection type New New New New model Series AN CAT.NAS13-9A Page Silencer Variation M3 M5 1/8 1/4 3/8 1/2 3/4 1 1 1/4 1 1/2 2 New New New Compact Resin Type/Male Thread Series AN05 to 40 Page 2 Compact, Lightweight Noise reduction: 30 dB(A) Newly added port size New New New Compact

size one-touch fitting Model no. of fitting used Nozzle size Nozzle length 1.5 2 1.5 2 1.5 2 1.5 2 2.5 3 3.5 2.5 3 3.5 2.5 3 3.5 2.5 3 3.5 Type Symbol Nozzle part no.

Rated Flow Range: 04 (0.5 to 4L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 03 (3/8), Output Specification: 2 (OUT1: Analog 4 to 20mA), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: R (Bracket), Calibration Certificate: A (Calibration Certificate)

Rated Flow Range: 04 (0.5 to 4L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 03 (3/8), Output Specification: 2 (OUT1: Analog 4 to 20mA), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: R (Bracket)

Rated Flow Range: 0.5 to 4L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 3/8, Output Specification: OUT1: Analog 4 to 20mA, Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: Bracket, Calibration Certificate: Calibration Certificate, Made to Order: -

Rated Flow Range: 0.5 to 4L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 3/8, Output Specification: OUT1: Analog 4 to 20mA, Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: Bracket, Calibration Certificate: -, Made to Order: -

Z I SE3 NPN open collector 2 outputs PNP open collector 2 outputs 0 1 Description Part no.

$1.29 3/8 NPT1/8 PT3/8-N01 $1.77 5/32 NPT1/8 PT5/32-N01 $1.29 3/8 NPT1/4 PT3/8-N02 $1.86 5/32 NPT1/4 PT5/32-N02 $1.50 3/8 NPT3/8 PT3/8-N03 $1.98 3/16 10-32UNF PT3/16-U10 $1.50 3/8 NPT1/2 PT3/8-N04 $2.58 3/16 NPT1/8 PT3/16-N01 $1.50 1/2 NPT1/4 PT1/2-N02 $2.43 3/16 NPT1/4 PT3/16-N02 $1.56 1/2 NPT3/8 PT1/2-N03 $2.43 3/16 NPT3/8 PT3/16-N03 $1.77 1/2 NPT1/2 PT1/2-N04 $2.58 O.D.Tube Thread ITEM

M5 Port size M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Type 01 02 03 04 U10/32 N01 N02 N03 N04 Elbow Universal 2 3 Universal type Applicable tubing O.D.

/2 B O D Y S I Z E 1 M5 2 1/8, 1/4 Standard 3 3/8 Standard 4 1/2 Standard T H R E A D P O R T S I Z E M5 ...M5 U01 ..1/8 U02 ..1/4 U03 ..3/8 U04 ..1/2 U32 ..10-32UNF 01 ... 1/8 02 ... 1/4 03 ... 3/8 04 ... 1/2 W I T H O N E-T O U C H F I T T I N G S T Y P E 2 Elbow 3 Universal C O N T R O L M E T H O D 0 Meter Out 1 Meter In Courtesy of Steven Engineering, Inc. !

Exhaust port 35.7 G G OUT 2 EXH (3) PPA SUP (2) SUP (1) 22 8 AL 36 Flat bracket P3020114 (Optional) 2 x Rc1/4, 3/8, 1/2 Port size 4 x M5 x 0.8 thread depth 6 mm through Mounting hole L-bracket G OUT 2 22 30 R3.5 25 15 25 7 36 L-bracket INI-398-0-6 (Optional) (10) 30 45 2.3 2 x Rc1/4, 3/8, 1/2 SUP port, OUT port (7) 36 14-8-25 26 Series ITV1000/2000/3000 Made to Order Specifications: Please

Connection NPT 1/8 N01 Connection NPT 1/4 N02 Port size Connection NPT 3/8 N03 Applicable model IRV1000 Option Connection NPT 1/2 N04 Size Symbol IRV3000 IRV2000 Connection G 1/8 F01 01 02 03 04 1/8 1/4 3/8 1/2 Connection G 1/4 F02 Connection G 3/8 F03 Connection G 1/2 F04 13-14-2 3 Vacuum System Peripherals: Electronic Vacuum Regulator: ITV209 Specifications ITV2090 ITV2091 Model 24 VDC

Applicable model t ZH15DA-09-N03-11 ZH15DA-N02-N03-N03 2 Minimum C Factor of a Supply Valve Model C[dm3/(sbar)] ZH05A 0.12 ZH07A 0.23 ZH10A 0.47 ZH13A 0.80 ZH15A 1.06 ZH18A 1.53 ZH20A 1.88 ZH18DA-11-N03-13 ZH18DA-N03-N03-N03 1 ZH20DA-10-04-12 ZH20DA-03-04-04 ZH20DA-11-N04-13 ZH20DA-N03-N04-N04 t 2.

Port size Type Cylinder side M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/2 10-32UNF NPT1/8 NPT1/4 NPT3/8 NPT1/2 Symbol M5 01 02 03 04 F01 F02 F03 F04 U10/32 N01 N02 N03 N04 Solenoid valve side M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 PF1/8 PF1/4 PF3/8 PF1/2 10-32UNF NPT1/8 NPT1/4 NPT3/8 NPT1/2 Elbow 2 Control type 0 1 Meter-out Meter-in SMC Pneumatics, Inc. 14 Series ASIII1F-T Dimensions

KFG2V0122-N01 KFG2V0122-N02 KFG2V0325-N01 KFG2V0325-N02 KFG2V0704-N01 KFG2V0704-N02 KFG2V0906-N01 KFG2V0906-N02 KFG2V0906-N03 KFG2V1163-N02 KFG2V1163-N03 KFG2V1163-N04 KFG2V1395-N02 KFG2V1395-N03 KFG2V1395-N04 Applicable tube 12 14 12 14 12 14 12 14 19 14 19 22 14 19 22 11 19 11 19 16 25 23 31 45 38 51 75 46 59 83 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 16.1 19.8 16.1

M5 Port size M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Type 01 02 03 04 U10/32 N01 N02 N03 N04 Elbow Universal 2 3 Universal type Applicable tubing O.D.