SMC Corporation of America
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Rated Flow Range: 04 (0.5 to 4L/min), Flow Adjustment Valve: S (Flow Adjustment Valve), Thread: N (NPT), Port Size: 03 (3/8), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: T (OUT2: Analog 1 to 5V, w/Temperature Sensor), Lead Wire: N (w/o Lead Wire w/M8 Connector)

Rated Flow Range: 04 (0.5 to 4L/min), Flow Adjustment Valve: S (Flow Adjustment Valve), Thread: N (NPT), Port Size: 03 (3/8), Output Specification: 2 (OUT1: Analog 4 to 20mA), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector)

Rated Flow Range: 0.5 to 4L/min, Flow Adjustment Valve: Flow Adjustment Valve, Thread: NPT, Port Size: 3/8, Output Specification: OUT1: Analog 1 to 5V, Temperature Sensor: OUT2: Analog 1 to 5V, w/Temperature Sensor, Lead Wire: -, Units on Label: -, Bracket: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 0.5 to 4L/min, Flow Adjustment Valve: Flow Adjustment Valve, Thread: NPT, Port Size: 3/8, Output Specification: OUT1: Analog 1 to 5V, Temperature Sensor: -, Lead Wire: -, Units on Label: -, Bracket: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 0.5 to 4L/min, Flow Adjustment Valve: Flow Adjustment Valve, Thread: NPT, Port Size: 3/8, Output Specification: OUT1: Analog 1 to 5V, Temperature Sensor: OUT2: Analog 1 to 5V, w/Temperature Sensor, Lead Wire: w/o Lead Wire w/M8 Connector, Units on Label: -, Bracket: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 0.5 to 4L/min, Flow Adjustment Valve: Flow Adjustment Valve, Thread: NPT, Port Size: 3/8, Output Specification: OUT1: Analog 4 to 20mA, Temperature Sensor: None, Lead Wire: w/o Lead Wire w/M8 Connector, Units on Label: -, Bracket: -, Calibration Certificate: -, Made to Order: -

ZSE ISE PSE Z I SE3 PS Two independent flow rate settings are possible.

E 0.05MPa / 8PSI Minimum Operating Pressure 06 34 10 1 N North America A R E A C O D E 5 ~ 60C / 40~140F Ambient and Fluid Temperature T Y P E 10 Turns Number of Needle Rotations B O D Y S I Z E R(PT) N NPT 50 34 60 1 Port Size A B C D Model 3/4 74 115 42 50 (N)AS500 1 90 158 55 62 (N)AS600 Courtesy of Steven Engineering, Inc. !

$6.90 5/16 NPT1/8 HVFS5/16-N01 $6.90 5/16 NPT1/4 HVSF5/16-N02 $6.90 5/16 NPT1/4 HVFS5/16-N02 $6.90 5/16 NPT3/8 HVSF5/16-N03 $6.90 5/16 NPT3/8 HVFS5/16-N03 $6.90

x, c: 4 Metric size For single unit z, x, c: 5/32" Inch size Connection size z, c: 6, x: 4 Metric size Manifold z, c: 1/4", x: 5/32" Inch size (1) Weight 100 g or less (without options) Note 1) Indicates the weight of a single unit.

M1 M2 Weight (g) ASV310F-N01-07 ASV310F-N01-09 ASV310F-N02-07 ASV310F-N02-09 ASV410F-N01-09 ASV410F-N01-11 ASV410F-N02-09 ASV410F-N02-11 ASV410F-N03-09 ASV410F-N03-11 ASV510F-N02-11 ASV510F-N02-13 ASV510F-N03-11 ASV510F-N03-13 ASV510F-N04-11 ASV510F-N04-13 73 73.8 73 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2 91.9 90.2 91.9 90.2 91.9 17.2 19.3 17.2 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3 26.5

Connection NPT 1/8 N01 Connection NPT 1/4 N02 Port size Connection NPT 3/8 N03 Applicable model IRV1000 Option Connection NPT 1/2 N04 Size Symbol IRV3000 IRV2000 Connection G 1/8 F01 01 02 03 04 1/8 1/4 3/8 1/2 Connection G 1/4 F02 Connection G 3/8 F03 Connection G 1/2 F04 13-14-2 3 Vacuum System Peripherals: Electronic Vacuum Regulator: ITV209 Specifications ITV2090 ITV2091 Model 24 VDC

Applicable model t ZH15DA-09-N03-11 ZH15DA-N02-N03-N03 2 Minimum C Factor of a Supply Valve Model C[dm3/(sbar)] ZH05A 0.12 ZH07A 0.23 ZH10A 0.47 ZH13A 0.80 ZH15A 1.06 ZH18A 1.53 ZH20A 1.88 ZH18DA-11-N03-13 ZH18DA-N03-N03-N03 1 ZH20DA-10-04-12 ZH20DA-03-04-04 ZH20DA-11-N04-13 ZH20DA-N03-N04-N04 t 2.

AS331F-N03 NPT3/8 40, 50, 63 AS421F-N04 AS431F-N04 NPT1/2 63, 80, 100 Note 1) Elbow type only.

Rated Flow Range: 04 (0.5 to 4 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 03 (3/8), Output Specification/Temperature Sensor: 1 (Out 1 Flow Rate: Analog 1 to 5 V; Out 2 Temperature: None; Temperature Sensor: None), Lead Wire: N (w/o Lead Wire and M8 Connector), Unit Specification: Instantaneous Flow: L/min, Temperature: °C, Bracket: None, Calibration

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 03 (3/8), Output Specification/Temperature Sensor: 1 (Out 1 Flow Rate: Analog 1 to 5 V; Out 2 Temperature: None; Temperature Sensor: None), Lead Wire: N (w/o Lead Wire and M8 Connector), Unit Specification: Instantaneous Flow: L/min, Temperature: °C, Bracket: None, Calibration

Rated Flow Range: 0.5 to 4 L/min, Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: NPT, Port Size: 3/8, Output Specification/Temperature Sensor: Out 1 Flow Rate: Analog 1 to 5 V; Out 2 Temperature: None; Temperature Sensor: None, Lead Wire: w/o Lead Wire and M8 Connector, Unit Specification: Instantaneous Flow: L/min, Temperature: °C, Bracket: None, Calibration Certificate: None

VH*-OMX0068-A PRODUCT NAME Pressure Relief 3 Port Valve with Locking Holes MODEL / Series / Product Number VHS20-(F,N)01~(F,N)02(-R,Z)-D VHS30-(F,N)02~(F,N)03(-R,Z)-D VHS40-(F,N)02~(F,N)04(-R,Z)-D Contents Page 1. Safety Instructions 1~5 2. Application 6 3. Specifications 6 4. How to Order 7~8 5. Construction / Parts List 9 6.

Bellows assembly for ISG 110-030 16-9-6 3 General Purpose Pressure Switch Series ISG Dimensions Open type ISG110 to 191-030 (Without hysteresis scale plate) ISG110 to 131-031 (With hysteresis scale plate) Hysteresis adjusting bolt Setting pressure adjusting bolt Hysteresis adjusting bolt ZSE ISE Setting pressure adjusting bolt PSE Z I SE3 75 18 8.5 110 54 173 8.5 93 110 54 173 PS Z I SE1

(Exhaust center) 1/4" 17(0.9) Exhaust center VH302-N02, N03 VH312-N02, N03 2 (Position) 2 1 1.56 (0.71) (A) 2 (B) 4 VH3 1/4", 3/8" VH320-N02, N03 VH330-N02, N03 3 (Closed center) 3/8" 20(1.1) 1 (P) 3 (R) VH321-N02, N03 VH331-N02, N03 3 (Exhaust center) VH322-N02, N03 VH332-N02, N03 2 1 3 4 2 (Position) VH400-N02 to N06 VH410-N02 to N06 3 (Closed center) 1/4" 45(2.5) 4 3 VH401-N02 to N06 VH411