PF3W5.eng

If the error cannot be reset after the above measures are taken, then please contact SMC. 3 1 1 DC(+): Brown 4 2 2 NC / Analogue output (temperature): White Refer to the SMC website (URL http://www.smcworld.com) for more detailed information about product troubleshooting. 3 DC(-): Blue Pin number of the connector at the cable side Direct mounting (PF3W511) Mount using the self tapping screws

PF-OMM0004_C

PVC PVC PVC PVC PVC , -10No.PF-OMM0004-D -11No.PF-OMM0004-D N M8 M8 R / ZS-40-K PF3W704/720 4 3X8 ZS-40-L PF3W740 4 3X8 ZS-40-M PF3W711 4 4X10 M8 ZS-40-A 3 m 2 250 L/min PVC 25 A ZS-40-U25 25 A PVC 1 PVC 30 A ZS-40-U30 30 A PVC 1 25 A ZS-40-U25-A 1 M5x80 2 30 A ZS-40-U30-A 1 M5x65 2 PVC 1~2% -12No.PF-OMM0004-D 1 DC+ 2 OUT2 3 DC4 OUT1 M8 IN OUT OUT1OUT2 ON UP ON/OFF SET

Analog Output Specification: Voltage, Pipe Port Type: [Direct Mounting] Direct Attached, Pressure Type: Standard, Pressure Resistance(MPa): 1, Flow Rate Type: Standard, Operating Humidity Range(%): 35～85, Number of Inputs: 1, Number of Outputs: 1, Analog Voltage Output(V): [DC1-5V] 1-5V, Power Supply Type: DC, Power Supply Voltage(V): [12 to 24] 12 to 24 ±10%, Pipe Connection Direction: 2-

Rated Flow Range: 11 (10 to 100 L/min), Port, PVC Pipe O.D.: 25 (Port Size: 25A, Pipe O.D.: 32mm), Output Specification: 1 (OUT1: Analog 1 to 5V)

PF-OMN0011_C

-26-B) (ZS-26-01) ZS-26-01 1 (ZS-26-B) 190 2,1/41/2 72 2, , -15No.PF-OMN0011CN-C , 1 DC() 2 N.C.

PF2x2.eng

Input of the Set point 2 L/min, L CFM x 10-2, CFM x 10-1, ft3 x 10-2, ft3 x 10-1, gal(US)/min, gal(US) 1 Brown DC(+) Non-Reverse output Reverse output Refer to the product catalogue or SMC website (URL http://www.smcworld.com) for more information about panel cut-out dimensions.

Rated Flow Range: 11 (10 to 100 L/min), Port, PVC Pipe O.D.: 25 (Port Size: 25A, Pipe O.D.: 32mm), Output Specification: 1 (OUT1: Analog 1 to 5V), Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: G (Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °C), Bracket: R (Bracket)

Rated Flow Range: 11 (10 to 100 L/min), Port, PVC Pipe O.D.: 25 (Port Size: 25A, Pipe O.D.: 32mm), Output Specification: 1 (OUT1: Analog 1 to 5V), Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: None, Calibration Certificate: A (Calibration Certificate)

Rated Flow Range: 11 (10 to 100 L/min), Port, PVC Pipe O.D.: 25 (Port Size: 25A, Pipe O.D.: 32mm), Output Specification: 1 (OUT1: Analog 1 to 5V), Lead Wire: N (w/o Lead Wire w/M8 Connector), Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: R (Bracket)

Rated Flow Range: 11 (10 to 100 L/min), Port, PVC Pipe O.D.: 25 (Port Size: 25A, Pipe O.D.: 32mm), Output Specification: 1 (OUT1: Analog 1 to 5V), Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: R (Bracket)

Rated Flow Range: 11 (10 to 100 L/min), Port, PVC Pipe O.D.: 25 (Port Size: 25A, Pipe O.D.: 32mm), Output Specification: 1 (OUT1: Analog 1 to 5V), Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: R (Bracket), Calibration Certificate: A (Calibration Certificate)

Rated Flow Range: 10 to 100 L/min, Port, PVC Pipe O.D.: Port Size: 25A, Pipe O.D.: 32mm, Output Specification: OUT1: Analog 1 to 5V, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °C, Bracket: Bracket, Calibration Certificate: -

Rated Flow Range: 10 to 100 L/min, Port, PVC Pipe O.D.: Port Size: 25A, Pipe O.D.: 32mm, Output Specification: OUT1: Analog 1 to 5V, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: None, Calibration Certificate: Calibration Certificate

Rated Flow Range: 10 to 100 L/min, Port, PVC Pipe O.D.: Port Size: 25A, Pipe O.D.: 32mm, Output Specification: OUT1: Analog 1 to 5V, Lead Wire: w/o Lead Wire w/M8 Connector, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: Bracket, Calibration Certificate: -

Rated Flow Range: 10 to 100 L/min, Port, PVC Pipe O.D.: Port Size: 25A, Pipe O.D.: 32mm, Output Specification: OUT1: Analog 1 to 5V, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: Bracket, Calibration Certificate: -

Rated Flow Range: 10 to 100 L/min, Port, PVC Pipe O.D.: Port Size: 25A, Pipe O.D.: 32mm, Output Specification: OUT1: Analog 1 to 5V, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: Bracket, Calibration Certificate: Calibration Certificate

Rated Flow Range: 10 to 100 L/min, Port, PVC Pipe O.D.: Port Size: 25A, Pipe O.D.: 32mm, Output Specification: OUT1: Analog 1 to 5V, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °F, Bracket: -, Calibration Certificate: -

CATALOG

3 0 1.3 1.06 2.19 3/8-18 1 3/8 2.13 3 3/4 2.48 5 1/4 1 1 1/4 2 3/8 2 5/16 3/4-16 7/8 3/8 3/8 19/32 325 (3.25) 1 5/8 3.9 2 1 1/2 5/8 1 1/4 3/8-24 3 3/4 0 1.57 1.18 2.76 1/2-13 1 5/8 2.59 4 1/4 2.72 6 5/64 1 3/8 1 1/2 2 5/8 2 11/16 1-14 1/2 5/8 5/8 400 (4) 1 3/8 1 5/8 4.7 2 1 1/2 5/8 1 1/4 3/8-24 4 1/2 0 1.57 1.18 3.32 1/2-13 1 5/8 2.59 4 1/4 2.72 6 5/64 2 1/10 2 5/8 2 11/16 1-14 1/2 5/8 5/

Table of Contents

Refer to pages 13-2-4 to 13-2-5 for ejector system unit. Refer to pages 13-2-32 for ejector system manifold. Refer to pages 13-2-40 to 13-2-41 for external vacuum supply system unit. Single unit Single unit 13-2-68 to 13-2-72 Manifold Manifold Refer to page 13-2-54 for external vacuum supply system manifold.

ZP

2.5 R 1 R 2 2 1.2 6 8 2 6.7 8.8 3 Applicable pad B06MU/B08MU/B10MU/B15MU ZP2-B10MU ZP2-B15MU 9 8 6 6 4 4 R 4 2 2 1.2 2 2 2 8 R 7 2 2 4 2 2 6 15 10 Note) R part has to be smooth with no corners.