Vacuum

Black wire: Connect with power source ground. a2 Z$Ml $eni zsMl-T115/-T121 ) 2-Color Display Type High-Precision Digital Pressure Switch Series 3 * rs &* r #fg e tw { dfsp f rxrr cr"d/r; r*tq -.&'drdd {. * *fs rs ss'e s *: # z xeg * *aw rd. fsg$ xr; .x' e* ex r ryege f r rax f f r*sz s"s s$ c'sts , x$krexex #xsrwf*x, srx*?rgts' css"e d;s,x{f,#&fx rfse $.lp&q ssllal e*xec9**i*xa:l {see ?"

Vacuum

Black wire: Connect with power source ground. a2 Z$Ml $enie zsMl-T115/-T121 I 2-Color Display Type High-Precision Digital Pressure Switch Series 3 * rs &* r #fg e tw { dfsp f rxrr cr"d/r; r*tq -.&'drdd {. * *fs rs ss'e s *: # z xeg * *aw rd. fsg$ xr; .x' e* ex r ryege f r rax f f r*sz s"s s$ c'sts , x$krexex #xsrwf*x, srx*?

ZP

Applicable pad 04U/06U/08U Applicable pad 10U/16U Applicable pad 25U/32U Applicable pad 40U/50U 4.9 30 R 30 R R 25 30 R R R R 10.5 9.5 2 8 9 25 R 2 0.5 6 7 7 8 R R R R R R 45 45 45 2.7 1 R R 2.5 4.5 5 6.6 R 2.5 3.8 4.9 3.5 5 6 7.9 R 4.5 8 9 11.7 11.7 Note) R part has to be smooth with no corners.

ZP

P Q R 6 6 8 24.3 26.2 16.8 18.7 S 12.8 15.2 8 Applicable tubing O.D.

CU

R H R H Piston seal Features 1 Reduced stroke end impact and noise: New standards to meet consumer demand. Free-mounting 3 types of mounting orientations can be accommodated depending on the installation conditions.

Free-Mounting Cylinder with Air Cushion Series CU

R H R H Piston seal Features 1 Reduced stroke end impact and noise: New standards to meet consumer demand. Free-mounting 3 types of mounting orientations can be accommodated depending on the installation conditions.

P

Adaptor connection thread Symbol Pad dia. 1 02 to 08 B5 2 10 to 16 3 20 to 32 B8 4 40, 50 T 2 ZP B5 [qAdaptor] R S ZP 04 A5 [wR type adaptor] Symbol S Pad dia. 02 to 16 L 20 to 50 With Buffer ZP R 16 K20 A10 06 UGN [Pad model no.]

Table of Contents

1 r y o e t !2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4 Built-in magnet Without magnet Single acting u i r y o e w i e u !0 Built-in magnet Without magnet Rod end male thread Component Parts Replacement Parts: Seal Kit (For double acting) Note No.

Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: None, Thread: F (G), Port Size: 10 (1), Output Specification: 2 (OUT1: Analog 4 to 20mA), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector), Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: R (Bracket)

Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: None, Thread: Rc, Port Size: 06 (3/4), Output Specification: 2 (OUT1: Analog 4 to 20mA), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector), Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: R (Bracket)

Rated Flow Range: 10 to 100 L/min, Flow Adjustment Valve: None, Thread: G, Port Size: 1, Output Specification: OUT1: Analog 4 to 20mA, Temperature Sensor: None, Lead Wire: w/o Lead Wire w/M8 Connector, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: Bracket, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 10 to 100 L/min, Flow Adjustment Valve: None, Thread: Rc, Port Size: 3/4, Output Specification: OUT1: Analog 4 to 20mA, Temperature Sensor: None, Lead Wire: w/o Lead Wire w/M8 Connector, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: Bracket, Calibration Certificate: -, Made to Order: -

Table of Contents

0 t r i w y e q o Replacement Parts (For valve) Description VQ7-8-FG-SVQ7-8-FG-DVQ7-8-FPG-DVQ7-8-FG-S-R VQ7-8-FG-D-R VQ7-8--D-R VQ7-8--DNumber q w e r t y u i o !

Type: [Flow Switches] Flow Switch, Fluid Type: Water, Flow Range(l/min): 100～Less than 500, Sensor, Monitor Structure: [Separate Type Connector Connection] Separated sensor, Output Method: Analog, Analog Output Specification: Voltage, Pipe Port Type: [Direct Mounting] Direct Attached, Pressure Type: Standard, Pressure Resistance(MPa): 1, Flow Rate Type: Standard, Operating Humidity Range(

Rated Flow Range: 11 (10 to 100 L/min), Port, PVC Pipe O.D.: 25 (Port Size: 25A, Pipe O.D.: 32mm), Output Specification: 1 (OUT1: Analog 1 to 5V)

Rated Flow Range: 11 (10 to 100 L/min), Port, PVC Pipe O.D.: 25 (Port Size: 25A, Pipe O.D.: 32mm), Output Specification: 2 (OUT1: Analog 4 to 20mA)

Rated Flow Range: 10 to 100 L/min, Port, PVC Pipe O.D.: Port Size: 25A, Pipe O.D.: 32mm, Output Specification: OUT1: Analog 4 to 20mA, Lead Wire: -, Units on Label: -, Bracket: -, Calibration Certificate: -

SX

S 5 VDC R 3 VDC 1-6-55 56 Manifold Specifications SS5X3-41 SS5X3-42 SS5X5-41 SS5X5-42 SS5X7-42 SX340 SX340(R) SX540 SX540(R) SX740(R) Single base/B mount Common SUP/Common EXH 2 to 20 stations Base Side Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Model Applicable valve Manifold type P(SUP)/R(EXH) Valve stations Note) Location Direction A, B Porting specifications P, EA, EB port Rc 1 4 Rc 1 4 M5 x

VFS

2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D side) assembly !2 AXT625-3A-20 End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D) !2, Metal joint q, w, Gasket B r, Guard !

VFR

2, Metal joint q, w, Gasket B r, Guard !3, Steel ball !2 End plate (D) !2, Metal joint q, w, Gasket B r, Guard !