MU

, #4 (#1+#4+#11) Front flange MUF25SMU25, #3 (#1+#3+#11) MUF32SMU32, #3 (#1+#3+#11) MUF40SMU40, #3 (#1+#3+#11) MUF50SMU50, #3 (#1+#3+#11) MUF63SMU63, #3 (#1+#3+#11) Single clevis Double clevis Double clevis Single clevis Double clevis MUD25SMU25, #6 (#1+#6+#11) MUD32SMU32, #6 (#1+#6+#11) MUD40SMU40, #6 (#1+#6+#11) MUD50SMU50, #6 (#1+#6+#11) MUD63SMU63, #6 (#1+#6+#11) (mm) Rotation() 100 90

Digital Flow Switch (Manifold type)

Type Symbol sensor Flow rate Flow rate Temp. 1 Analogue 1 to 5 V None 2 Analogue 4 to 20 mA Remote sensor 1T Analogue 1 to 5 V Analogue 1 to 5 V With temp. sensor 2T 1 Analogue 4 to 20 mA Analogue 4 to 20 mA A NPN NPN B PNP PNP C NPN Analogue 1 to 5 V D NPN Analogue 4 to 20 mA None E PNP Analogue 1 to 5 V F PNP Analogue 4 to 20 mA G 1 NPN External input 2 Integrated display type H 1 PNP External

Table of Contents

P Bore size (mm) W V U T S Z X Y Q Y R R Q HR HN 20 20 107 (115) 12 (14) 104 11 21 47.5 40 48 82 12 26 157 30 M6 x 1 depth 9 Rc 1/8 25 20 25 107 (115) 12 (14) 25.3 37 104 11 21 48 46 57 100 13 31 175 37 Rc 1/8 M6 x 1 depth 13 32 25 32 110 (118) 12 (14) 28.3 40 106 11 21 49 52 65 114 16 38 201 37 Rc 1/8 M6 x 1 depth 13 40 32 40 121 (130) 12 (15) 31.3 43 123 11 25 53 62 84 138 20 47 238 44

Cylinder with Lock

Bore size [mm] 32 40 50 63 80 100 Trunnion pivot bracket*1 MB-S03 MB-S04 MB-S04 MB-S06 MB-S06 MB-S10 Double clevis pivot bracket MB-B03 MB-B03 MB-B05 MB-B05 MB-B08 MB-B08 *1 Order 2 trunnion pivot brackets per cylinder. Trunnion pivot bracket TZ TX TO TO Z + 1/2 stroke TD TY2 TY1 B 4 x TT TS TH TF TC B 2 x TR TA TL TU TU With Rubber Bumper [mm] [mm] Bore size Z Part no.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

1 !2 !3 !4 !5 !6 !7 !8 !

Booster Regulator/Air Tank

Description 1 Piston seal 2 large 1 small 2 1 each large and small 2 1 2 Governor assembly 4 3 Check valve 2 4 Gasket 2 Rod seal 5 1 8 8 12 Mounting screw 6 12 7 Cover C assembly 1 Grease pack 1 2 1 2 1 The grease pack has 10 g of grease.

Booster Regulator/Air Tank

Description Piston seal 1 2 large 1 small 2 1 each large and small 2 1 2 Governor assembly 4 3 Check valve 2 4 Gasket 2 Rod seal 5 1 8 8 12 6 Mounting screw 12 7 Cover C assembly 1 Grease pack 1 1 2 1 2 The grease pack has 10 g of grease.

MNB

3.5 1.5 4 0 0.5 9.5 12 4.5 7 2 4.5 0 0.5 CL 40 1 3.5 1.5 4 0 0.5 9.5 12 4.5 7 2 4.5 0 0.5 50 1.5 4 2 4.5 0 1 10 12.5 5 7.5 2.5 5 0 1 CL1 63 1.5 4 2 4.5 0 1 10 12.5 5 7.5 2.5 5 0 1 80 5.5 7 6 7.5 2.5 4 14 15.5 9 10.5 6.5 8 2.5 4 MLGC 100 5.5 7 6 7.5 2.5 4 14 15.5 9 10.5 6.5 8 2.5 4 CNG Auto Switch Mounting Height D-Z7/Z-80 D-Y59 D-Y7P D-Y7W D-F5, D-J5 D-F59F D-F5W, D-J59W D-F5BAL, D-F5NTL

MNB

3.5 1.5 4 0 0.5 9.5 12 4.5 7 2 4.5 0 0.5 CL 40 1 3.5 1.5 4 0 0.5 9.5 12 4.5 7 2 4.5 0 0.5 50 1.5 4 2 4.5 0 1 10 12.5 5 7.5 2.5 5 0 1 CL1 63 1.5 4 2 4.5 0 1 10 12.5 5 7.5 2.5 5 0 1 80 5.5 7 6 7.5 2.5 4 14 15.5 9 10.5 6.5 8 2.5 4 MLGC 100 5.5 7 6 7.5 2.5 4 14 15.5 9 10.5 6.5 8 2.5 4 CNG Auto Switch Mounting Height D-Z7/Z-80 D-Y59 D-Y7P D-Y7W D-F5, D-J5 D-F59F D-F5W, D-J59W D-F5BAL, D-F5NTL

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: F (G), Port Size: 03 (3/8), Output Specification: 1 (OUT1: Analog 1 to 5V)

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: None, Thread: G, Port Size: 3/8, Output Specification: OUT1: Analog 1 to 5V, Temperature Sensor: -, Lead Wire: -, Units on Label: -, Bracket: -, Calibration Certificate: -, Made to Order: -

20

Specifications Table 1: Piping connection type Table 2: Piping connection type Port size Rc1/4 Rc 3/8 NPR 1/4 NPT 3/8 G 1/4 G 3/8 Part No. VMG11-02-X35 VMG11-03-X35 VMG11-N02-X35 VMG11-N03-X35 VMG11-F02-X35 VMG11-F03-X35 Pipe part no. P5670127-100-X33 P5670127-300-X33 P5670127-600-X33 Part No.

CATALOG

S I Z E Symbol Cylinder Side Pilot Port 01 R(PT)1/8 M5x0.8 02 R(PT)1/4 Rc(PT)1/8 03 R(PT)3/8 Rc(PT)1/8 04 R(PT)1/2 Rc(PT)1/4 F02 R(PT)1/4 G(PF)1/8 F03 R(PT)3/8 G(PF)1/8 F04 R(PT)1/2 G(PF)1/4 N01 NPT1/8 10-32UNF N02 NPT1/4 NPT1/8 N03 NPT3/8 NPT1/8 N04 NPT1/2 NPT1/4 Courtesy of Steven Engineering, Inc. !

Made to Order

CM2-Z CM2K-Z CM2R-Z CBM2 CM2H-Z CM2HR-Z CG1-Z CG1K-Z CG1R-Z CG1KR-Z MB-Z MBK-Z MB1-Z MB1K-Z CA2-Z CA2K CBA2 CS1 CS1H CQS CQSK CQ2-Z CQ2K-Z CQ2H-Z MTS MGPM-Z MGPL-Z MGPA-Z MGG MGC CM2 w-1 From P. 172 Direct mount type, air-hydro type Air cylinder Non-rotating rod type Direct mount type CG1 w-1 From P. 292 Direct mount, Non-rotating rod type Air cylinder Non-rotating rod type Air cylinder Non-rotating

5

Trunnion pivot bracket TX TZ TO TO Z + 1/2 Stroke TY B 4 x TT TD TS TH TF TC B 2 x TR TA TL TU TU (mm) Part no.

V

S I Z E Symbol Cylinder Side Pilot Port 01 R(PT)1/8 M5x0.8 02 R(PT)1/4 Rc(PT)1/8 03 R(PT)3/8 Rc(PT)1/8 04 R(PT)1/2 Rc(PT)1/4 F02 R(PT)1/4 G(PF)1/8 F03 R(PT)3/8 G(PF)1/8 F04 R(PT)1/2 G(PF)1/4 N01 NPT1/8 10-32UNF N02 NPT1/4 NPT1/8 N03 NPT3/8 NPT1/8 N04 NPT1/2 NPT1/4 Courtesy of Steven Engineering, Inc. !

Vacuum

See example on page 14. 0 1 ^ oo7 J 005 fl o.oe E ,* c', 001 .F o.ooz d0.005 _a z I z 0.003 0.002 I it E 0 001 0.0007 0.0005 0 . 2 0 . 3 0 5 0 . 7 I 2 3 5 7 1 0 Length of Tube L (m) 0 5 1 0 1 5 m 0 1 2 3 4 5 6 Suclion Flow Rals Supply Ar Pressure kgl/cm, Example: Find the_tubing volume for lD of 5mm and lenoln ol Im, Solution: Finl the intersection of a vertical line up from tube length

Vacuum

See example on page 14. 0 1 ^ oo7 J 005 fl o.oe E ,* c', 001 .F o.ooz d0.005 _a z I z 0.003 0.002 I it E 0 001 0.0007 0.0005 0 . 2 0 . 3 0 5 0 . 7 I 2 3 5 7 1 0 Length of Tube L (m) 0 5 1 0 1 5 m 0 1 2 3 4 5 6 Suclion Flow Rals \ !

C95

Rod end nut Tie-rod nut Tie-rod Cushion ring B Cushion ring A 1 6-1 1 6-2 4 u i o !

Air Cylinder Series MB

TE TX TO TO Trunnion pivot bracket Z + 1/2 Stroke TY 4-TT TS TD TF TH B TU TU 4-TR TC TL TA Without air cushion (mm) Bore size (mm) Z Z Bore size (mm) Part No.