Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: NPT, Port Size: 1/2, Output Specification/Temperature Sensor: Out 1 Flow Rate: Analog 1 to 5 V; Out 2 Temperature: None; Temperature Sensor: None, Lead Wire: w/o Lead Wire and M8 Connector, Unit Specification: Instantaneous Flow: L/min, Temperature: °C, Bracket: None, Calibration Certificate: w/Calibration
PF-OMN0009_C PF3W540 PF3W511 PF3W521 (3 mPas(3 cP)) 1 0.54 L/min 216 L/min 540 L/min 10100 L/min 50250 L/min 070 090 () ( ) 3F.S. 2F.S. 5%F.S.(25 ) 2 2 3 1 s 15 V 1 k 420 mA DC12 V 300 DC24 V 600 () DC1224 V10 30 mA IP65 050 () 3585R.H.() 4 AC1000V 1 50M (DC500V ) CE UL(CSA)RoHS PPSSUS304FKMSCS13 PPSSUS304 FKM 3/8 3/81/2 1/23/4 3/41 11/411/2 -28No.PF-OMN0009CN-F PF3W504 PF3W520
Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 03 (3/8), Output Specification/Temperature Sensor: 1 (Out 1 Flow Rate: Analog 1 to 5 V; Out 2 Temperature: None; Temperature Sensor: None), Lead Wire: N (w/o Lead Wire and M8 Connector), Unit Specification: Instantaneous Flow: L/min, Temperature: °C, Bracket: None, Calibration
Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 03 (3/8), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector), Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: None, Calibration Certificate: A (Calibration Certificate)
Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 3/8, Output Specification: OUT1: Analog 1 to 5V, Temperature Sensor: None, Lead Wire: w/o Lead Wire w/M8 Connector, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: None, Calibration Certificate: Calibration Certificate, Made to Order: -
AR/AZ AR/AZ (46 only) AR/AZ AR/AZ *2 FASTECH Co., Ltd. Ezi-SERVO EzM *2 Rockwell Automation, Inc. (Allen-Bradley) MP-/VPMP/VP *1 TL TLY-A AM AM30 *1 AM AM31 *2 AM AM80/AM81 *1 Siemens AG 1FK7 1FK7 *1 Delta Electronics, Inc.
15 17 15 7.5 19.5 21 33 14.4 26.4 65 101 106 16 18.3 20 18.3 7.5 24.5 21 38 14.4 31.4 66 104 112 INDEX 374 Series CJ2 Dimensions Double-side bossed (E) CJ2E Bore size Stroke Z NDh8 Mounting nut Section Y detail NDh8 GB YY GA Piping port 2 x M5 x 0.8 NN Y Rod end nut NN MM C B 0 0.3 NB A F NA B 0 0.3 D Section YY detail F H S + Stroke Z + Stroke With air cushion: CJ2E Bore size Stroke AZ
AZ Note) MV6 is bar stock body.
PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.
PF2W520 PF3W520 PF2W540 PF3W540 PF2W511 PF3W511 PF2W504 PF3W504 Function selection mode Safety Instructions Other functions Sensor connector Mounting and Installation PF2D2 series Lever Warning Installation or Channel scan function Peak / Bottom value display Key-lock function PF2D520 PF2D540 PF2D504 Do not disassemble, modify (including changing the printed circuit board) or repair.
50 g 100 g 1OFF (2 5 ) 5 100 (24 5 min100 500 min9.5 ) 290(7 s) 390(7 s) -67No.PF-OMN0011CN-C 0100 1 / -10110 1 3F.S. 7 s 2 5F.S. 1090 2 (ZS-40-W) AWG26 0.51 mm 1.00 mm 3.5 mm -68No.PF-OMN0011CN-C / (PF3W704/720740) A B C 1 V 1.5 V 5 V 4 mA 6 mA 20 mA (PF3W711) A B C 1 V 1.4 V 5 V 4 mA 5.6 mA 20 mA (PF3W721) A B C 1 V 1.5 V 5 V 4 mA 5.9 mA 20 mA [L/min] PF3W504 0.5 4 PF3W520
containing moisture 2 MPa 100 kPa 1ch 3ch Main screen Sub screen (Right side) Sub screen (Left side) Discharge pressure control for compressors Liquid pressure control of gun drills 1 MPa 5 MPa 1ch 2ch 4ch 2ch 4ch 2 Multi-channel Digital Sensor Monitor PSE200A Series 3-Screen Display Input Range Selection (for Pressure/Flow rate) M For Digital Flow Switch for Water / PF3W511 B A B PF3W504 0 4 PF3W520
Outboard leakage Leak rate Across the seat leak Surface finish Connections Supply pressure effect Installation Internal volume Mass 1) 14 to 194F (10 to 90 C) for Vespel seat. 2) Tested with Helium gas inlet pressure 100 psig (0.7 MPa). 3) Mass, including individual boxed weight, may vary depending on connections or options. 2 Single Stage Compact Regulator for Ultra High Purity Series AP500 AZ
PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.
Contents 16 MGP16-AZ-PS Set of left nos. @6, @7, @8, @9, #0 50 MGP50-AZ-PS Set of left nos. @6, @7, @8, @9, #0 20 MGP20-AZ-PS 25 MGP25-AZ-PS 32 MGP32-AZ-PS 40 MGP40-AZ-PS 63 MGP63-AZ-PS 80 MGP80-AZ-PS 100 MGP100-AZ-PS * Seal kit includes @6 to #0. Order the seal kit, based on each bore size. * Since the seal kit does not include a grease pack, order it separately.
(P.124) 100 Series AP3500 Diaphragm Valve for Ultra High Purity Air operated type (For low pressure) AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators Wetted Parts Material H S Wetted Parts Body Surface finish Diaphragm Seat Hastelloy C-22 Electropolish 316L SS secondary remelt Electropolish
PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.
PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.
PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.
Please contact SMC. 3) Mass, including individual boxed weight, may vary depending on connections or options. 46 Series AK1000 Single Stage Regulator for General Applications Low to intermediate flow AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators Option High flow Higher flow capacity