Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: NPT, Port Size: 3/8, Output Specification/Temperature Sensor: Out 1 Flow Rate: Analog 1 to 5 V; Out 2 Temperature: None; Temperature Sensor: None, Lead Wire: w/o Lead Wire and M8 Connector, Unit Specification: Instantaneous Flow: L/min, Temperature: °C, Bracket: None, Calibration Certificate: w/Calibration

PF-OMN0009_C

PF3W540 PF3W511 PF3W521 (3 mPas(3 cP)) 1 0.54 L/min 216 L/min 540 L/min 10100 L/min 50250 L/min 070 090 () ( ) 3F.S. 2F.S. 5%F.S.(25 ) 2 2 3 1 s 15 V 1 k 420 mA DC12 V 300 DC24 V 600 () DC1224 V10 30 mA IP65 050 () 3585R.H.() 4 AC1000V 1 50M (DC500V ) CE UL(CSA)RoHS PPSSUS304FKMSCS13 PPSSUS304 FKM 3/8 3/81/2 1/23/4 3/41 11/411/2 -28No.PF-OMN0009CN-F PF3W504 PF3W520

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 04 (1/2), Output Specification/Temperature Sensor: 1 (Out 1 Flow Rate: Analog 1 to 5 V; Out 2 Temperature: None; Temperature Sensor: None), Lead Wire: N (w/o Lead Wire and M8 Connector), Unit Specification: G [Instantaneous Flow: L/min (gal/min), Temperature: °C/°F], Bracket

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 04 (1/2), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector), Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: R (Bracket)

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: NPT, Port Size: 1/2, Output Specification/Temperature Sensor: Out 1 Flow Rate: Analog 1 to 5 V; Out 2 Temperature: None; Temperature Sensor: None, Lead Wire: w/o Lead Wire and M8 Connector, Unit Specification: G [Instantaneous Flow: L/min (gal/min), Temperature: °C/°F], Bracket: None, Calibration

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 1/2, Output Specification: OUT1: Analog 1 to 5V, Temperature Sensor: None, Lead Wire: w/o Lead Wire w/M8 Connector, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: Bracket, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 04 (1/2), Output Specification/Temperature Sensor: 1 (Out 1 Flow Rate: Analog 1 to 5 V; Out 2 Temperature: None; Temperature Sensor: None), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: Instantaneous Flow: L/min, Temperature: °C, Bracket: None, Calibration

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 04 (1/2), Output Specification/Temperature Sensor: 1T (Out 1 Flow Rate: Analog 1 to 5 V; Out 2 Temperature: Analog 1 to 5 V; Temperature Sensor: w/Temperature Sensor), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: Instantaneous Flow: L/min, Temperature: Â

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: NPT, Port Size: 1/2, Output Specification/Temperature Sensor: Out 1 Flow Rate: Analog 1 to 5 V; Out 2 Temperature: None; Temperature Sensor: None, Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: Instantaneous Flow: L/min, Temperature: °C, Bracket: None, Calibration Certificate: w/

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: NPT, Port Size: 1/2, Output Specification/Temperature Sensor: Out 1 Flow Rate: Analog 1 to 5 V; Out 2 Temperature: Analog 1 to 5 V; Temperature Sensor: w/Temperature Sensor, Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: Instantaneous Flow: L/min, Temperature: °C, Bracket: None,

Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 04 (1/2), Output Specification/Temperature Sensor: 1 (Out 1 Flow Rate: Analog 1 to 5 V; Out 2 Temperature: None; Temperature Sensor: None), Lead Wire: N (w/o Lead Wire and M8 Connector), Unit Specification: Instantaneous Flow: L/min, Temperature: °C, Bracket: None, Calibration

Rated Flow Range: 5 to 40 L/min, Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: NPT, Port Size: 1/2, Output Specification/Temperature Sensor: Out 1 Flow Rate: Analog 1 to 5 V; Out 2 Temperature: None; Temperature Sensor: None, Lead Wire: w/o Lead Wire and M8 Connector, Unit Specification: Instantaneous Flow: L/min, Temperature: °C, Bracket: None, Calibration Certificate: w/Calibration

15

AR/AZ AR/AZ (46 only) AR/AZ AR/AZ *2 FASTECH Co., Ltd. Ezi-SERVO EzM *2 Rockwell Automation, Inc. (Allen-Bradley) MP-/VPMP/VP *1 TL TLY-A AM AM30 *1 AM AM31 *2 AM AM80/AM81 *1 Siemens AG 1FK7 1FK7 *1 Delta Electronics, Inc.

1

15 17 15 7.5 19.5 21 33 14.4 26.4 65 101 106 16 18.3 20 18.3 7.5 24.5 21 38 14.4 31.4 66 104 112 INDEX 374 Series CJ2 Dimensions Double-side bossed (E) CJ2E Bore size Stroke Z NDh8 Mounting nut Section Y detail NDh8 GB YY GA Piping port 2 x M5 x 0.8 NN Y Rod end nut NN MM C B 0 0.3 NB A F NA B 0 0.3 D Section YY detail F H S + Stroke Z + Stroke With air cushion: CJ2E Bore size Stroke AZ

Process Gas Diaphragm Valve

AZ Note) MV6 is bar stock body.

AZ1000

PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.

PF2x2.eng

PF2W520 PF3W520 PF2W540 PF3W540 PF2W511 PF3W511 PF2W504 PF3W504 Function selection mode Safety Instructions Other functions Sensor connector Mounting and Installation PF2D2 series Lever Warning Installation or Channel scan function Peak / Bottom value display Key-lock function PF2D520 PF2D540 PF2D504 Do not disassemble, modify (including changing the printed circuit board) or repair.

PF-OMN0011_C

50 g 100 g 1OFF (2 5 ) 5 100 (24 5 min100 500 min9.5 ) 290(7 s) 390(7 s) -67No.PF-OMN0011CN-C 0100 1 / -10110 1 3F.S. 7 s 2 5F.S. 1090 2 (ZS-40-W) AWG26 0.51 mm 1.00 mm 3.5 mm -68No.PF-OMN0011CN-C / (PF3W704/720740) A B C 1 V 1.5 V 5 V 4 mA 6 mA 20 mA (PF3W711) A B C 1 V 1.4 V 5 V 4 mA 5.6 mA 20 mA (PF3W721) A B C 1 V 1.5 V 5 V 4 mA 5.9 mA 20 mA [L/min] PF3W504 0.5 4 PF3W520

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

containing moisture 2 MPa 100 kPa 1ch 3ch Main screen Sub screen (Right side) Sub screen (Left side) Discharge pressure control for compressors Liquid pressure control of gun drills 1 MPa 5 MPa 1ch 2ch 4ch 2ch 4ch 2 Multi-channel Digital Sensor Monitor PSE200A Series 3-Screen Display Input Range Selection (for Pressure/Flow rate) M For Digital Flow Switch for Water / PF3W511 B A B PF3W504 0 4 PF3W520

Series AP500

Outboard leakage Leak rate Across the seat leak Surface finish Connections Supply pressure effect Installation Internal volume Mass 1) 14 to 194F (10 to 90 C) for Vespel seat. 2) Tested with Helium gas inlet pressure 100 psig (0.7 MPa). 3) Mass, including individual boxed weight, may vary depending on connections or options. 2 Single Stage Compact Regulator for Ultra High Purity Series AP500 AZ