.: 32mm), Output Specification: F (OUT1: PNP; OUT2: Analog 4 to 20mA), Lead Wire: N (w/o Lead Wire w/M8 Connector), Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C)

.: 32mm), Output Specification: B (OUT1: PNP; OUT2: PNP), Lead Wire: N (w/o Lead Wire w/M8 Connector), Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C)

.: 32mm), Output Specification: A (OUT1: NPN; OUT2: NPN), Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C)

.: 32mm), Output Specification: E (OUT1: PNP; OUT2: Analog 1 to 5V), Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C)

Rated Flow Range: 10 to 100 L/min, Port Size, Pipe O.D.: Port Size: 25A, Pipe O.D.: 32mm, Output Specification: OUT1: PNP; OUT2: Analog 4 to 20mA, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 10 to 100 L/min, Port Size, Pipe O.D.: Port Size: 25A, Pipe O.D.: 32mm, Output Specification: OUT1: PNP; OUT2: Analog 4 to 20mA, Lead Wire: w/o Lead Wire w/M8 Connector, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 10 to 100 L/min, Port Size, Pipe O.D.: Port Size: 25A, Pipe O.D.: 32mm, Output Specification: OUT1: PNP; OUT2: PNP, Lead Wire: w/o Lead Wire w/M8 Connector, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: -, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 10 to 100 L/min, Port Size, Pipe O.D.: Port Size: 25A, Pipe O.D.: 32mm, Output Specification: OUT1: NPN; OUT2: NPN, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: -, Calibration Certificate: -, Made to Order: -

PF-OMN0011_C

8370: JIS B 8361: JIS B 9960-1: 1 JIS B 8433-1993: 2) : : : 1. 2. 3. 1. 2. 3. 4

CATALOG

A R B F I T T I N G F O R S O F T T U B E: M-3AU-4 M-5AU-4 M-5AU-6 B A R B E L B O W F O R S O F T T U B E: M-3ALU-4 M-5ALU-6 U N I V E R S A L E L B O W: M-3UL M-5UL 18 female diverted to 9 x M5 MORE SELECTIONS S E E N E X T P A G E P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R H O W T O O R D E R S E E N E X T P

Table of Contents

A B C D L M Y A M D L B Y C Model Model ZPT40B-B-A14 ZPT20B-B5-A10 40 43 34 47.5 24.4 48 16 23.5 32.5 12.4 20 25 22 10.5 19 ZPT50B-B-A14 ZPT25B-B5-A10 50 53 38 51.5 32.4 57 24 33 15.6 25 28 27 ZPT32B-B5-A10 29 38 18.9 32 37 14 34 Dimensions by Stroke Dimensions by Stroke 1 8 E G: M5 x 0.8 G: Rc 40 50 H J F 40 50 H J F K Model 20 25 32 Model G E F E F F E 40 50 ZPTB10-B-A14 ZPTB10-B5-A10 60

ZP

Suffix of how to order (@) U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3A-T2-A5 ZP3A-T2-B5 ZP3A-T2-A10-B5 ZP3A-T2-A10-04 Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet.

V

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

Vacuum

0 . 8 , M 6 x 1 Nr4 x 0.7, N,ls x 0.8 s1O-s16 M 5 x 0 . 8 , M 6 x 1 Mls x 0.8, M6 x 1 a20-a32 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, M8 x 1.25 ..aAO=s5O', M 6 x 1 , M B x 1 M 6 x 1 , M 8 x 1 . 2 5 \4q,r'tirc How to Order ZPY Pad dia.

Vacuum

0 . 8 , M 6 x 1 Nr4 x 0.7, N,ls x 0.8 s1O-s16 M 5 x 0 . 8 , M 6 x 1 Mls x 0.8, M6 x 1 a20-a32 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, M8 x 1.25 ..aAO=s5O', M 6 x 1 , M B x 1 M 6 x 1 , M 8 x 1 . 2 5 \4q,r'tirc How to Order ) ZPY Pad dia.

ZP

A B C D L M Y A M D L B Y C Model Model ZPT40B-B-A14 ZPT20B-B5-A10 40 43 34 47.5 24.4 48 16 23.5 32.5 12.4 20 25 22 10.5 19 ZPT50B-B-A14 ZPT25B-B5-A10 50 53 38 51.5 32.4 57 24 33 15.6 25 28 27 ZPT32B-B5-A10 29 38 18.9 32 37 14 34 Dimensions by Stroke Dimensions by Stroke 1 8 E G: M5 x 0.8 G: Rc 40 50 H J F 40 50 H J F K Model 20 25 32 Model G E F E F F E 40 50 ZPTB10-B-A14 ZPTB10-B5-A10 60

ZP

-A22 ZPT125 50-(B/N/T)01-A22 ZPT125 75-(B/N/T)01-A22 ZPT125 100-(B/N/T)01-A22 ZPB-T1 25-(B/N/T)01 ZPB-T1 50-(B/N/T)01 ZPB-T1 75-(B/N/T)01 ZPB-T1 25-(B/N/T)01 ZPB-T1 50-(B/N/T)01 ZPB-T1 75-(B/N/T)01 ZPB-T2 25-(B/N/T)01 ZPB-T2 50-(B/N/T)01 ZPB-T2 75-(B/N/T)01 ZPB-T2 25-(B/N/T)01 ZPB-T2 50-(B/N/T)01 ZPB-T2 75-(B/N/T)01 ZPB-T3 25-(B/N/T)01 ZPB-T3 50-(B/N/T)01 ZPB-T3 75-(B/N/T)01 ZPB-T3 100-(B

Table of Contents

Solid state switch D-F8 CUJ (As compared with SMC Series CU cylinders without magnet) Dimensions (Without magnet) Series Variations Bore size (mm) A(a) B(b) C(c) Bore size (mm) Rod end configuration Stroke (mm) Clean series 4 6 8 10 15 20 b Action Series Auto switch B Double acting Male thread Without thread None 4 10() 15() 13() 4 Single acting, Spring return 6 13(13) 19(22) 13(33) Double

ZP

N A B C D E M Y E N Y A B C D M Model Model ZPY20B--A10 ZPY40B-6-A14 51.5 12.4 25 23.5 33.5 20 22 16 62 24.4 48 40 43 34 44 10.5 ZPY25B--A10 ZPY50B-6-A14 50 53 38 48 66 32.4 57 19 52 15.6 28 24 34 25 27 ZPY32B--A10 32 34 29 39 57 18.9 37 14 Dimensions by Stroke Dimensions by Stroke 40 50 H Model F G F G Model 20 25 32 H 4 tube 6 tube ZPYB10-6-A14 74 142 78 146 F G F G F G J K L J K L ZPYB20

CU

Lead wire length (m) Load voltage Auto switch part no.