Rated Control Flow Range: 11 (1 to 100 L/min), Port Size: N2 (1/4 NPT), Input/Output Specification: 2 (Input: Analog 4 to 20mA, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 4 to 20mA), Wire Connector: Q (M12-M12 lead wire with connector (3 m/5 core)), Unit Specification: M (SI units only), Bracket: R (Bracket (mounting position: Side), Operation Manual/Calibration Certificate: K (with

Rated Control Flow Range: 11 (1 to 100 L/min), Port Size: N2 (1/4 NPT), Input/Output Specification: 2 (Input: Analog 4 to 20mA, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 4 to 20mA), Wire Connector: Q (M12-M12 lead wire with connector (3 m/5 core)), Unit Specification: Unit Specification, Bracket: None, Operation Manual/Calibration Certificate: K (with Operation Manual and Calibration

Rated Control Flow Range: 11 (1 to 100 L/min), Port Size: N2 (1/4 NPT), Input/Output Specification: 1 (Input: Analog 1 to 5 V, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 1 to 5V or 0 to 10V), Wire Connector: N (Without Lead Wire w/Function), Unit Specification: M (SI units only), Bracket: R (Bracket (mounting position: Side)

ZP

2.5 R 1 R 2 2 1.2 6 8 2 6.7 8.8 3 Applicable pad B06MU/B08MU/B10MU/B15MU ZP2-B10MU ZP2-B15MU 9 8 6 6 4 4 R 4 2 2 1.2 2 2 2 8 R 7 2 2 4 2 2 6 15 10 Note) R part has to be smooth with no corners.

ZP

2.5 R 1 R 2 2 1.2 6 8 2 6.7 8.8 3 Applicable pad B06MU/B08MU/B10MU/B15MU ZP2-B10MU ZP2-B15MU 9 8 6 6 4 4 R 4 2 2 1.2 2 2 2 8 R 7 2 2 4 2 2 6 15 10 Note) R part has to be smooth with no corners.

D-F6N/D-F6P/D-F6B

Auto switch 1 Auto switch 1 Blue Blue Brown Brown Auto switch 2 Auto switch 2 Blue Blue Load voltage at ON = Power supply voltage Residual voltage x 2 pcs. = 24 V 4 V x 2 pcs. = 16 V Load voltage at OFF = Leakage current x 2 pcs. x Load impedance = 1 mA x 2 pcs. x 3 k = 6 V Example: Load impedance is 3 k. Leakage current from auto switch is 1 mA.

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

D C 2 2 A A Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B B Dimensions Dimensions (mm) (mm) D Y F A B C E A B C D E N F Model Model ZPR10F-0-B5 ZPR20F-0-B5 M5 x 0.8 1.5 39.5 12.5 10 12 10 23.4 20 22 ZPR13F-0-B5 ZPR20F-0-B8 M8 x 1.25 13 15 2 40 23.9 13 10.5 12.5

Solid State Switch with Prewired Connector Series D– mmPC

in-line Rotary actuator P P Water resistant H7BA, G5BA S991/2, S9P1/2, T991/2 P P Grommet perpendicular P P G5NT S99V1/2, T99V1/2 With timer P P P P G5NB Wide area detection P P F59, F5P, J59 2 color indicator P P F59W, F5PW, J59W Tie-rod mount Diagnostic output P P F5LF, F59F P P F5BA Water resistant P P F5NT With timer Connector Pin Layout Lead wire colors Connector number

NVZseies

'SpecialOrder Only Specifications Common SUP, EXH. 2-20 stations Blank plate ass'y blank plat manilold base. appropnare Tfupe and Eow ta Order ADdlcaue valvs NVZ3!2-OOO-M5 NVZ312M-O60-M5 Top portsd NW3Z3-2(}01 NW3Z3-20-ffir-OOr *,*l oal, stattr^ -TiA|*rk plet dy: oxTr70-25-1A ll there are more than 6 shtions, rupply air and exhaust fYofi both 6ids ol manitold.

3 Way,3 Port Solenoid Valve NVZ Series

'SpecialOrder Only Specifications Common SUP, EXH. 2-20 stations Blank plate ass'y blank plat manilold base. appropnare Tfupe and Eow ta Order ADdlcaue valvs NVZ3!2-OOO-M5 NVZ312M-O60-M5 Top portsd NW3Z3-2(}01 NW3Z3-20-ffir-OOr *,*l oal, stattr^ -TiA|*rk plet dy: oxTr70-25-1A ll there are more than 6 shtions, rupply air and exhaust fYofi both 6ids ol manitold.

. ~ 2 1/2in., 11 mounting options available, Auto switch capable, CYL. NON ROT, OVR SZ ROD, SPL, ACTUATOR, NCA1 TIE-ROD CYLINDER, RK, 3.25 INCH NCA1 NON-ROTATING, .00000 lb

LEC-OM02704CN

CC-LinkRYnARYnERY(n2)3RY(n2)5RY(n2)CRY(n2)E 2. PC461(A97) 3. (RYn1)ON(RXnC)RYn1 4. 13(RY(n2)C)3(RY(n2)E)(RYn1) 13 5. *1 *2 *3 1 3 1 1 1 2 2 3 1 2 0 2 0 3 1 1 3 0 6. PD26RXn1PC35 7.

Compact 5-Port Solenoid Valve

C6: 6 (SMC) (Station n) (Station 1) 0 BUS 13.6 9.1 D D B 2 1 59.9 3/5 E 3/5 60 B 2 B 2 B 2 B 2 E 2 P 1 PWR 25.8 23.9 A 4 A 4 A 4 A 4 A 4 1 P 3 S 13.2 8.9 (21) (7.5) (11.8) (For DIN rail mounting) 4 x M8 3-pin socket 2 x M12 M3 (Pitch) P = 9 23 11.5 Manifold block internal wiring specifications Nil: Double wiring S : Single wiring L1 = 9 x n1 + 139 + 21 x n2 L2 = 9 x n1 + 43.4 L4 = L3 10.5

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Mounting same side MGC D-C7 D-C8 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 50+45(n2) 50 15 10 15+45( n2 ) (n=2, 4, 6) MGF 2 60+45(n2) 60 15 10 CY1 15+50( n2 ) (n=2, 4, 6) MY1 2 65 15 10 65+50(n2) 20+50( n2 ) (n=2, 4, 6) 2 65 20 D-H7LF 10 15+50( n2 ) (n=2, 4, 6) 2 D-B5/B6 D-G5NTL 10 75 15 75+55(n2) 20+50( n2 ) (n=2, 4, 6) 2 15 75 20 D-B59W D-A3A D-G39A D-K39A D-A44A 10 100+100(n2) 35+30

Fieldbus System

A), 2(B) port> C2: 2 One-touch fitting C3: 3.2 One-touch fitting C4: 4 One-touch fitting N1: 1/8" One-touch fitting N3: 5/32" One-touch fitting L2 = L1 10.5 L3 = 8.5 x n1 + 46 L4 = L3 + 97.5 + 47 x n2 L5 = (L1 L4)/2 L6 = 8.5 x n1 + 31 L7 = 47 x n2 + 86.1 DIN rail clamping screw L1: DIN Rail Overall Length (mm) Valve stations I/O Unit stations (n2) 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16

MB

+ 30 (n2) n = 2, 4, 6, 8 70 + 50 (n2) n = 2, 4, 6, 8 75 + 30 (n2) n = 2, 4, 6, 8 80 + 30 (n2) n = 2, 4, 6, 8 85 + 30 (n2) n = 2, 4, 6, 8 75 + 50 (n2) n = 2, 4, 6, 8 80 + 50 (n2) n = 2, 4, 6, 8 85 + 50 (n2) n = 2, 4, 6, 8 90 + 30 (n2) n = 2, 4, 6, 8 90 + 50 (n2) n = 2, 4, 6, 8 90 n (Different sides) D-A44 n (Same side) 1 2 (Different sides or Same side) 1 70 75 80 85 105 80 110 115 115 60

Air Cylinder Series MB

) 2 (n2) 2 (n2) 2 20 + 55 n = 2,4,6,8... 25 + 55 n = 2,4,6,8... 25 + 55 n = 2,4,6,8... n (same side) D-A59W 1 15 25 25 D-F5 D-J5 D-F5 W D-J59W D-F5BAL D-F59F 2 (different side or same side) 15 25 25 (n2) 2 (n2) 2 (n2) 2 15 + 55 n = 2,4,6,8... 25 + 55 n = 2,4,6,8... 25 + 55 n = 2,4,6,8... n (same side) 1 10 25 25 25 30 2 (different side or same side) 15 (n2) 2 (n2) 2 (n2) 2 D-F5NTL D-F5LF

Electric Actuator with Integrated Guide

15 40 5 72 Stroke + 135 Work piece mounting reference plane1 Stroke + 219 Motor unit2 5.8 46 3.3 1 4 4.9 19 36 74 20.5 Body mounting reference plane1 Pitch = 100 Section AA E section detail (Switch rail T-slot dimensions) (n1-1) x pitch 67.5 n1 100 200 300 400 500 n2 1 1 1 1 2 n1 600 700 800 900 1000 n2 2 2 2 2 2 Stroke Model LTF8FPH100--X10 LTF8FPH200--X10 LTF8FPH300--X10 LTF8FPH400--X10

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

B 2 B 2 B 2 B 2 49.9 30.6 E E 25.2 A 4 A 4 A 4 A 4 A 4 20.5 12 7.5 (Pitch) P = 16 One-touch fitting [4(A), 2(B) port] L2 = L1 10.5 L3 = 16 x n1 + 60 L4 = L3 + 81 + 47 x n2 L5 = (L1 L4)/2 L6 = 16 x n1 + 48 L7 = 47 x n2 + 81.5 17.5 20.5 Applicable tubing O.D.: 4, 5/32" 6, 1/4" 8, 5/16" L1: DIN Rail Overall Length Valve stations (n1) I/O Unit stations (n2) 2 3 4 5 6 7 8 9 10 11 12 13 14 15

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Compatibility with the PFG300 digital flow monitor 0.01 0.02 0.05 1 2 0.1 0.3 0.5 5 10 20 25 50 100 150 200 300 500 600 1000 2000 3000 6000 12000 PF2M7(-L) 0.001 L/min 0.01 1 0.02 2 0.01 L/min 0.05 5 Dry air N2 Ar CO2 0.1 10 Thermal type (MEMS) 0.3 25 0.1 L/min 0.5 50 1 100 1 L/min 2 200 PFMB 2 200 Thermal type (MEMS) 5 500 Dry air N2 1 L/min PFG300 10 1000 Bypass flow type 20 2000 PFMC