1

single Top ported (A) 4 (B) 2 t t q e w r e q w r 2-position single 5 (EA) 3 (EB) 1 (P) 2 (B) 3 (EB) 4 (A) 5 (EA) 1 (P) (A)4 2(B) 1 (P) (EA)5 3(EB) 2-position double t e q w r 2-position double 1 (P) 2 (B) 3 (EB) 4 (A) 5 (EA) 2(B) (A)4 (EA)5 1 (P) 3(EB) 3-position closed center/exhaust center/pressure center t e q w r 3-position closed center 3-position exhaust center 2(B) (A)4 2(B) (A)4

Vacuum

E o.o72 (0.005) 2 0 oI a ZFB10G04 a ?

Vacuum

E o.o72 (0.005) 2 0 oI a ZFB10G04 a ?

Vacuum System Peripherals:

Connection 3.2, 4 6, 8, 10, 12, 16 KQ2 Nylon, Soft nylon, Polyurethane M5, M6, R 1/8 to 1/2 From 100 kPa One-touch fittings One-touch fittings/Manifold Series KM Applicable tubing: Nylon, Soft nylon, Polyurethane Tubing O.D.: 4, 6, 8, 10, 12 Port A piping port Port B port size No. of port A Piping specifications Port A Port B Model Model 4 6 8 8 10 12 Rc Rc 6 8 10 6, R 6, R 6, R 8, R 8, R

Cylinder

R . foX ... oZ ~ . .. l (mm) A A' s i s .D I E I F GA I GsJ H I I Bore Size J MM NN 6 7 9 14 14 3 10.5 8 6 6 17 10 10 12 15 17 5 13 I 8 6 I 7 20 L .. 6 M3x O.5 MlO xlO 7 3.4 1.6 24 16 32 97 ; ~ 4.5 Hi ' 28 1S 10 5.5 1 2.3 36 22 49 ~ 7 I M4X O.7 M12X1 .. 0 15 12 14 20 1 19 6 15.5 I 10 6 I 7 24 9 I M5X O.8 MI4 X tO - Series CJP 2-M5xo.B z H s A F GA G8 A A' jI ~: 1=r=if1+ :' -,LitL*'ft ?

Precision Regulator

0 Setting knob ARM q Diaphragm (A) q w !1 q !1 ARP Steel ball w !1 Bleed !2 Nozzle IR-A @2 w !2 Bleed Diaphragm (B) r !3 @4 Bleed Exhaust u IR IR !7 @3 !2 !5 !4 Diaphragm (C) e OUT (2) SUP (1) OUT (2) OUT (2) SUP (1) IRV SUP (1) @3 !8 Exhaust valve !6 @1 @1 !8 e VEX Main valve e @1 Exhaust tValve guide tValve guide tValve guide SRH IR2120 IR3120 SRP @0 !1 SRF @5 !1 ITV @0 @6 !

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: F01 (G1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: Z (w/o Lead Wire w/Connector)

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: G1/8, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: w/o Lead Wire w/Connector, Option: -

IR1000/2000/3000

P36201021 7 NBR Damper P36202026 P36202026 2.5 x 1 8 NBR O-ring 2 x 1.25 2 x 1.25 9 NBR O-ring 4.5 x 1 4.5 x 1 4.5 x 1 4.5 x 1 10 x 1.3 10 NBR O-ring 27.8 x 1.5 JISB2401 P11 JISB2401 P11 27.8 x 1.5 11 NBR O-ring JISB2401 P5 Note 2) JISB2401 P5 Note 2) 12 NBR O-ring JISB2401 P16 Note 2) JISB2401 P16 Note 2) 13 NBR Seal (A) P36203015 P36203015 14 NBR Seal (B) P36203016 P36203016

Process Pump

(A) 2 23 (AR) (A) 2 Refer to Best Pneumatics No. 1 for further details. 3 (R) 1 (P) 3 (R) 1 (P) Regulator Series AR Model Specifications Model AR20 Port size 1/8, 1/4 AR25 1/4, 3/8 AR30 1/4, 3/8 AR40 AR20 AR25 AR30 AR40 Model Proof pressure 1.5 MPa 1.0 MPa 0.05 to 0.85 MPa 1/4, 3/8, 1/2 Max. operating pressure Pressure gauge port size 1/8 1/4 Set pressure range Ambient and 5 to 60C (No freezing

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: F01 (G1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector)

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: G1/8, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -

Series: 25A-PFM7, Flow Rate Range: 25 [0.5 to 25 (12.5) L/min], Port Size: F01 (G1/8), Piping Entry Direction: Straight, Output Specification: B (2 PNP Outputs), Unit Specification: M (Fixed SI Unit), Operation Manual: With Instruction Manual, Calibration Certificate: None, Connector: W (Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber), Option: R (Bracket for w/o Flow

Number of Ports: 2 Port, Piping Direct., Plunger Length: 0 (Side Ported, Long), Body Option: Side Mounting, Port Size: F01 (G 1/8, Side Ported Only), Actuator Type: 34 (Twist Selector, 2 Position), Suffix: R (Red), Indicator: None, Bracket: B (w/Bracket)

Number of Ports: 3 Port, Piping Direct., Plunger Length: 0 (Side Ported, Long), Body Option: Side Mounting, Port Size: F01 (G 1/8, Side Ported Only), Actuator Type: 34 (Twist Selector, 2 Position), Suffix: R (Red), Indicator: None

Number of Ports: 2 Port, Piping Direct., Plunger Length: 0 (Side Ported, Long), Body Option: Side Mounting, Port Size: F01 (G 1/8, Side Ported Only), Actuator Type: 30 (Push Botton, Mushroom), Suffix: R (Red), Indicator: None

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: Lead Wire w/Connector (2 m), Option: R (Bracket for w/o Flow Adjustment Valve: ZS-33

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: Lead Wire w/Connector (2 m), Option: Bracket for w/o Flow Adjustment Valve: ZS-33-M

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: F01 (G1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: R (Bracket for w/o Flow Adjustment

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: G1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/o Flow Adjustment Valve: ZS-33