VM

8 NPT N01 1 8 Be sure to read before handling.

PSxx-OMU0005CN

B -15No.PS-OMU0005CN-C (a)(a) (b) (ZS-46-B) +(ZS-46-D) 90 -16No.PS-OMU0005CN-C (-M5) 1/6~1/4 1~1.5Nm (ZS-46-N) -01-N01 23 3~5 Nm -C4L-C6L 1/61/4 1~1.5Nm -17No.PS-OMU0005CN-C -18No.PS-OMU0005CN-C () TU0425( 42.5) -19No.PS-OMU0005CN-C FG -20No.PS-OMU0005CN-C Z/ISE20B(F)-S/-R () NPN 2 Max.28 V80 mA 1 V R15 V 1 k S420 mA 12 V 300 24 V 600 50 -S/-R () NPN 2 Max.28 V80 mA 1 V -X () -S

PSxx-OMU0002CN

DC(+) 5 OUT1 4 OUT2 3 FUNC 2 DC(-) 1 -19No.PS-OMU0002CN-D Z/ISE20A(F)-S/-R () DC(+) NPN 2 Max.28 V80 mA 1 V R15 V OUT1 1 k OUT2 S420 mA DC(-) 12 V 300 24 V 600 50 DC(+) -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) DC(+) -X () -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) -20No.PS-OMU0002CN-D -V/-T () DC(+) PNP 2 Max.80 mA 1 V T15 V OUT1 1 k OUT2 V420 mA DC(

PSxx-OMS0006CN

(ZS-46-A1) 3X8L A B(ZS-46-A2) 3X8L B -14No.PS-OMS0006CN-G (a)(a) (b) (ZS-46-B) +(ZS-46-D) 90 -15No.PS-OMS0006CN-G (-M5) 1/6~1/4 1~1.5Nm (ZS-46-N) -01-N01 23 3~5 Nm -C4H-C6H-N7H-C4L-C6L-N7L 1/61/4 1~1.5Nm -16No.PS-OMS0006CN-G -17No.PS-OMS0006CN-G ,FG -18No.PS-OMS0006CN-G Z/ISE20(F)-N NPN 1 Max.28 V80 mA 1 V -P PNP 1 Max.80 mA 1 V -19No.PS-OMS0006CN-G [] 3 0.2 [] / OUT1 OUT1 [F10]30 (

PSE540/560

Port size ISA2 R 1/8 (With M5 female thread) R 1/4 (With M5 female thread) Rc 1/8 NPT 1/8 (With M5 female thread) NPT 1/4 (With M5 female thread) URJ 1/4 TSJ 1/4 01 02 C01 N01 N02 A2 B2 IS Option/Part No. Output specifications Part no. Note Connector for PSE200 Description ZS-26-E-4 ZSM Voltage output type 1 to 5 V Current output type 4 to 20 mA Nil 28 1 pc. ZS-28-C 1 pc.

ZSE30A(F)/ISE30A

Suction Verification High Vacuum Suction Work 1 Work 2 Work n Max. A Formula for Obtaining the Set-Value P-1 P_1 or P_2 H_1 or H_2 H-1 P_1 (P_2) = A (A-B)/4 n_1 (n_2) = B + (A-B)/4 H_1 (H_2) = | (A-B)/2| n-1 Min.

ZP

(mm) ZP40HN ZP50HN ZP63HN ZP80HN ZP100HN ZP125HN 40 50 63 80 100 125 27 15 1 1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 Misc.

PSxx-OML0002CN

DC(-) DC(+) OUT1 OUT2 -B PNP 2 Max.80 mA 1 V FUNC DC(-) -19No.PS-OML0002CN-G DC(+) OUT1 -C OUT2 NPN 1 Max.28 V80 mA 1 V 1 k FUNC DC(-) DC(+) -D OUT1 NPN 1 Max.28 V80 mA 1 V 12 V 300 24 V 600 50 OUT2 FUNC DC(-) DC(+) OUT1 -E OUT2 PNP 1 Max.80 mA 1 V 1 k FUNC DC(-) DC(+) -F OUT1 PNP 1 Max.80 mA 1 V 12 V 300 24 V 600 50 OUT2 FUNC DC(-) -20No.PS-OML0002CN-G

100

2 Supply valve/Release valve Vacuum pressure sensor Ejector q Supply (P), Vacuum (V) port/ One-touch fitting connection size w Exhaust method Nil Silencer exhaust P Rc1/2 port exhaust PF G1/2 port exhaust*2 Symbol Supply (P) port Vacuum (V) port Pressure gauge unit*1 Nil 6 (Metric) 12 (Metric) kPa N 1/4" (Inch) 1/2" (Inch) inHgpsi PN 1/2-14NPT port exhaust *2 The thread ridge shape is in

PFxx-OMJ0005CN

MPa -16No.PF-OMJ0005CN-I FG 1 DC(+) 2 OUT2// 3 OUT1 4 DC(-) -17No.PF-OMJ0005CN-I NPN(2 ) PFM7--ADC(+) OUT1 OUT2 DC(-) Max.28 V80 mA 1 V NPN(1 )(15 V) PFM7--CNPN(1 )(420 mA) PFM7--DDC(+) OUT1 DC(-) Max.28 V80 mA 1 V C15 V 1 k D420 mA 600 50 NPN(1 ) PFM7--GDC(+) OUT1 DC(-) Max.28 V80 mA 1 V ()30 ms -18No.PF-OMJ0005CN-I PNP(2 ) PFM7--BDC(+) OUT1 OUT2 DC(-) Max.80 mA 1.5 V PNP(

VM

8 NPT N01 1 8 Be sure to read before handling.

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: V (Panel Mount Adapter for w/Flow Adjustment Valve)

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: Panel Mount Adapter for w/Flow Adjustment Valve

•

I '-1 'N . ,." " H1 H2 01 02 03 l1 M odel ~ T1 T2 ' ~ f . 9 4 ' 3 ~9 . 2~q .. ~ " 6 8" 41,-'1; " W }?'.." 48.7' 42.6, 10.9 46.4 2B,2 " . . '118:'7 ~7 .3 .70~ .2M .. Ii' .. , . t ~ .230 42.2 25.8 38.9 ' 39.5 33.9 44.7 28.2 35. 1 10.5 17 ~ 35 A SP330F-N01-07S 1/4" NPT1 /8 10-32UNF ASP330F-N01 -09$ 5/16" ~ 14.2 118 15.8 15 .2 :.g 1/2' 8 NP'W~ " ~ NE?'T, lta ".,I:SP'43oFi!

IR1000/2000/3000

VE Ozone resistant VY1 IRM 10 3 G 4 For High/Low Temperature Environments Set pressure and quantity Stations G 0 1 2 0.2 MPa setting 1 to n pcs. 0.4 MPa setting 1 to n pcs. 0.8 MPa setting 1 to n pcs. 2 2 stations Standard model no.

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: N (None)

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: None, Calibration Certificate: -, Connector: -, Option: -

IR10-OM00007

/ M Pa/ m M Pa/ ( S) () m 2 1 1 m N MPa M Pa N m (A) / N ( B) /N () m 2 ( A) m 2 N -5- 1 SUP OUT 2 %F.S. 3 , 4 R B(P36201023) G 2 3 Rc,F N IR1000G33-2-01 G33-P2-N01-X30 IR1010G33-4-01 G33-P4-N01-X30 IR1020G33-10-01 G33-P10-N01-X30 011/84 Rc NNPT FG 00.0050.2MPa 10.010.4MPa 20.010.8MPa PRECI SI O N REG U LATO R I R101BG M AX.

IR20-OM00008

(B),2 (C),(B)(A), () (B)(C) (A) BLEED (B) (C) OUT SUP SUP. 1 1 M Pa/ m ( B) m 2 N / m m m M Pa M Pa/ m m M Pa B m /N (A) ) ( N N m / N ( C) m 2 N ( A) m 2 N -5- 3. 1 SUP OUT 2 %F.S 3 4 R B(P36202028) G 2 3 Rc,F N IR2000G43-2-01 G43-P2-N01-X30 IR2010G43-4-01 G43-P4-N01-X30 IR2020G43-10-01 G43-P10-N01-X30 021/44 Rc NNPT FG 00.0050.2MPa 1: 0.010.4MPa 20.010.8MPa

IR30-OM00013

Rc1/8 [2 ] 0.64 (1) (0.1MPa) (2) IR3000:0.2MPa (3)2 ON-OFF () (4) 4- (C) (C) (A) (A) (C) (A) (C) BLEED SUP OUT SU P N/ M Pa/ ( S) N N m 1 1 M Pa/m ( ) m 2 M Pa M Pa (A) /N (B) / ( ) m 2 ( A ) m 2 5- I R 3 0 0 1 SUP OUT 2 3%F.S. 3 R B(P36203018) G 2 3 RcF N IR3000G43-2-01 G43-P2-N01-X30 IR3010G43-4-01 G43-P4-N01-X30 IR3020G43-10-01 G43-P10-N01-X30 02:1/4 03