ZSE30/ISE30

Piping Specifications Part N7L C6L C4L N7H C6H C4H T1 01 NPT 1/8 M5 x 0.8 R 1/8 M5 x 0.8 Port size One-touch fitting Straight type 4 mm 5/32 inch 1/4 inch 6 mm One-touch fitting Elbow type 4 mm 5/32 inch 1/4 inch 6 mm Sensor pressure receiving area: Silicon, Piping port: C3602 (Electroless nickel plated), O-ring: HNBR Wetted part material O-ring: NBR, fitting: PBT O-ring: NBR With lead

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: L (Bottom), Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: N (None)

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: ø6 One-touch Fitting, Piping Entry Direction: Bottom, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: None, Calibration Certificate: -, Connector: -, Option: -

Table of Contents

Effective area (mm2) Port size Weight (kg) Model Type of actuation 3.3 1 1 1 1 1 1 1 120 280 300 120 280 300 110 VP4150 1 4 1 2 Single 9.5 2 position 3 position VP4170 3.8 VP4250 1 4 1 2 Double 10 VP4270 4.4 VP4350 Closed center 4.4 Exhaust center 1 110 VP4450 3-6-2 3 Large Size 5 Port Solenoid Valve Rubber Seal Series VP450/470 How to Use DIN Terminal Precautions 1.

VQ7-6/7-8

Applicable cable O.D.: 8 to 10 3(1) VK SOL.A ZNR VZ 1(4) DC: Single VF COM 3(1) VFR SOL.B SOL.A ZNR ZNR VP4 1 (4) 2 (2) DC: Double VZS 3(1) ~ + VFS SOL.A ~ ZNR 1(4) VS4 100 VAC: Single VQ7 COM ~ ~ 3 (1) + + Holding screw SOL.A EVS SOL.B ~ ~ ZNR ZNR Ground nut VFN 1 (4) 2 (2) Housing Washer 100 VAC: Double 3 (1) Grommet (Rubber) ~ + SOL.A ~ ZNR 1 (4) 200 VAC or more: Single Terminal block

VQ7-6/7-8

Spacer (1) Spacer (2) Spacer (1) VQ7 Spacer (1) Throttle valve spacer Spacer (1) Spacer (1) Throttle valve spacer Note 2) Note 3) Note 3) Note 1) EVS Note 1) A throttle valve spacer and double check spacer (including those with residual pressure release valve) cannot be combined.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

(42) 30 (42) 3/8, 1/2, 3/4 1 port 3/8, 1/2, 3/4 1 port Dimension inside is for rubber seal.

VS7-6

Port size P, A, B R1, R2 Piping Model Side Side Bottom Bottom 1 4 3 8 VS7-1-A02 VS7-1-A03 VS7-1-B02 VS7-1-B03 3 8 1 4 3 8 3 8 1.19-8 Series VS7-6 Manifold Manifold: Series VV71 Standard Specifications SV ISO size q Series ISO size q 1 to 10 Manifold block size Applicable solenoid valve Number of stations SY 1 4 3 8 One-touch fitting: 12 1 4 3 8 A, B-port P, R1, R2-port One-touch fitting:

® 2-Color Display High-Precision Digital Pressure Switch ZSE30A ( F ) /ISE30A Series

1 G.

1 digitVariable (0 or above) Note 1)Variable (0 or above) Note 1)0.6 to 5 V ?2.5% F.S.?1% F.S. or lessApprox. 1 k 2.4 to 20 mA ?2.5% F.S.?1% F.S. or lessMaximum load impedance: Power supply voltage 12 V: 300 , Power supply voltage 24 V: 600 Minimum load impedance: 50 4-digit, 7-segment, 2-color LCD (Red/Green)?2% F.S. ?1 digit (Ambient temperature of 25 ?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)45 mA or lessNPN or PNP open collector 2 outputs (Selectable)80 mA28 V (at NPN output)1 V or less2.5 ms (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above) Note 1)Variable (0 or above) Note 1)0.6 to 5 V ?2.5% F.S.?1% F.S. or lessApprox. 1 k 2.4 to 20 mA ?2.5% F.S.?

Rated Vacuum Range: -101 to 0 kPa, Output Specification: P (PNP Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: C6L (ø6 One-touch Fitting, Elbow Type), Option 1: w/o Lead Wire, Option 2: A1 (Bracket A, Vertical Mounting)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: P (PNP Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: C6L (ø6 One-touch Fitting, Elbow Type), Option 1: L (Lead Wire w/Connector, 2m)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: P (PNP Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: C6L (ø6 One-touch Fitting, Elbow Type), Option 1: L (Lead Wire w/Connector, 2m), Option 2: A2 (Bracket B, Horizontal Mounting)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: N (NPN Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: C6L (ø6 One-touch Fitting, Elbow Type), Option 1: L (Lead Wire w/Connector, 2m), Option 2: A1 (Bracket A, Vertical Mounting)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: N (NPN Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: C6L (ø6 One-touch Fitting, Elbow Type), Option 1: w/o Lead Wire, Option 2: B (Panel Mount Adapter)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: N (NPN Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: C6L (ø6 One-touch Fitting, Elbow Type), Option 1: w/o Lead Wire, Option 2: D (Panel Mount Adapter + Front Protection Cover)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: N (NPN Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: C6L (ø6 One-touch Fitting, Elbow Type), Option 1: L (Lead Wire w/Connector, 2m), Option 2: D (Panel Mount Adapter + Front Protection Cover)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: N (NPN Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: C6L (ø6 One-touch Fitting, Elbow Type), Option 1: w/o Lead Wire, Option 2: B (Panel Mount Adapter)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: N (NPN Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: C6L (ø6 One-touch Fitting, Elbow Type), Option 1: L (Lead Wire w/Connector, 2m)