VMx-OMP0001

1.41.6Nm 8 2 VR2110 3 01.0MPa 0.250.8MPa 0.560s (*) 10 (%) F.S. oC( -560 3/ (s C (dm 0.6 [1 (P) 2 (A) ] 0.5 [2 (A) 3 (R) ] bar) ) b 0.2 [1 (P) 2 (A) ] 0.15 [2 (A) 3 (R) ] Rc, NPT, G1/8 ON Delay 480g (*) 4 4 V R 2 1 1 0 01 01 Rc 1/8 N01 NPT 1/8 F01 F01 2 G 1/8 9 5 VR 1 ON Delay 0.560 () () 1 ON OFF 6 (1) 2 0.5MPa 2 10 (2) VR2110 3 )0.25MPa A 60sec (), (S) 0.8MPa 40sec

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: F01 (G1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)]

Type: [Flow Switches] Flow Switch, Fluid Type: Air / Nitrogen Gas / Carbonic Acid Gas / Argon, Flow Range(l/min): 50～Less than 100, Sensor, Monitor Structure: [Separate Type Connector Connection] Separated sensor, Output Method: Analog, Analog Output Specification: Current, Pipe Port Type: Female Thread, Plumbing Thread Type: [G] G, Plumbing Thread Nominal: [1/8] 1/8, Pressure Resistance(

Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: L (-48 kPa), SUP: F01 (Screw-in G 1/8), VAC: F01 (Screw-in G 1/8)

Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: S (-89 kPa), SUP: F01 (Screw-in G 1/8), VAC: F01 (Screw-in G 1/8)

Nozzle Diameter: 07 (ø0.7mm), Vacuum Pressure: L (-48 kPa), SUP: F01 (Screw-in G 1/8), VAC: F01 (Screw-in G 1/8)

Nozzle Diameter: 05 (ø0.5mm), Vacuum Pressure: L (-48 kPa), SUP: F01 (Screw-in G 1/8), VAC: F01 (Screw-in G 1/8)

Nozzle Diameter: 07 (ø0.7mm), Vacuum Pressure: S (-89 kPa), SUP: F01 (Screw-in G 1/8), VAC: F01 (Screw-in G 1/8)

Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: F01 (Screw-in G1/8), VAC: F01 (Screw-in G1/8), EXH: F01 (Screw-in G1/8)

1

) 3/4 [3(R) port] 1/2: 1/2" female thread (Rc, G, NPT/NPTF) 1/2 [1(P) port] 11.5 15.7 101.2 8 95.5 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 77.3 72 56.6 43.5 42.7 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 20.6 21.5 11.5 1/8: 1/8" female thread (Rc, G, NPT/NPTF) 1/8 (External pilot port) 27 31 1/8: 1/8" female thread (Rc, G, NPT/NPTF) 1/8 (Pilot EXH port) 38.7 (6.5) 25 65.5 1/4, 3/8, C8, C10, C12 [4(A), 2(B)

Vacuum

Pad tYPe '--l (Avail diameters: Relerto List O) 5 M5 x 0.8 a o A 6 r , N / 6 x 1 a o a a M 8 x 1 a a , jo o q l d g > N44 x 0.7 o B5 M5 x 0.8 o o o B6 M 6 x 1 o a B8 lVlS x 1 .25 o a B0r '/e PT a a a o n g List O Pad Dia.

Vacuum

19 Cylinder bore (mm) 5 1 0 '15 lo a O o a a o 16 o a a a o a N a o o a o a o o 2 3 : a o o a o o o o t2 o a o o a a a a t0 4 0.66 1.9(4.2) 3.3(7.3) 4.6(10.1) 6 1 .73 5 . 1 { 1 1 . 2 ) 8.6(18.9) 12.1Q6.61 I 2.64 7.9(17.4)13.1(28.8) 18.4(40.5) '10 4 . 1 2 12.3(27.1 20.6(45.3) 28,8(63.4) 1 2 6.91 20.7t45.5\34.5(75.9) r8.3(106.

EXxx-OMW0014CN

-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: (1 : ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4. 4 No.EX-OMW0014CN-A / *3) 1 1.5 3) 1 1 5 No.EX-OMW0014CN-A () () () () 6 No.EX-OMW0014CN-A / () * UL , UL1310 Class2 7 No.EX-OMW0014CN-A * IP65 / *() SI SI

Process Pump

(A) 2 23 (AR) (A) 2 Refer to Best Pneumatics No. 1 for further details. 3 (R) 1 (P) 3 (R) 1 (P) Regulator Series AR Model Specifications Model AR20 Port size 1/8, 1/4 AR25 1/4, 3/8 AR30 1/4, 3/8 AR40 AR20 AR25 AR30 AR40 Model Proof pressure 1.5 MPa 1.0 MPa 0.05 to 0.85 MPa 1/4, 3/8, 1/2 Max. operating pressure Pressure gauge port size 1/8 1/4 Set pressure range Ambient and 5 to 60C (No freezing

Precision Regulator

2) 1 1 23 O-ring NBR JISB2401P16 Note 2) JISB2401P16 Note 2) 2 2 24 Seal (A) NBR P36203015 1 P36203015 1 25 Seal (B) NBR P36203016 3 P36203016 3 26 Fixed throttle Stainless steel P36203017 P36202018 1 1 1 1 P36203017 Repair kit no.

Vacuum System Peripherals:

Series M3, M5, R 1/8 A hose nipple that provides large holding force for tubing.

25

Rc1/8 NPT1/8 G1/8 Symbol 3 Actuation Air operated PAF Tube extension Diaphragm material Symbol 1 Material PTFE PA PB P07 P07N P07F Rc1/8 NPT1/8 G1/8 1/4" tube extension Female thread Tube extension Female thread/ Tube extension PB13 3 A P07 1 3 A 1 S PB13 With nut Port size The pump with nut is recommended when SMC fitting, LQ series, is used.

Cylinder

1ode ' , AI fll I j>~[IH'~ I'L l 1-, MM UI INX Al l A, Model JIlor. siz;'4!!1! "041 8 , NO';'o I,LI L, " MM U, I i:/X I f!> I A, ' Y.POO6 I 6 5 6 3g 040 112 3,5 M3XQ,5 5 3 5 I ~POO6 6 5 6 I 3 I-g040 112 3,5 M3 x Q,5 5 3 5 1 4 -1 -11'(51.0,1 '10 $,~ ~o !

IR1000/2000/3000

Therefore, operate with a silencer (SMC Series AN) mounted on the exhaust port (EXH port). The connection is Rc(PT) 1/2. Precautions for IR100 only Warning 1. When remounting the valve guide after removing it for maintenance, use a tightening torque of no more than 0.6Nm (6kgfcm).

EXxx-OMU0020CN

LED 4M12 (5 ) . 8-1 EX245-DY1 56 No.EX-OMU0020CN 8.2. . 8-1 EX245-DY1 (WLH) mm 5412061 280 g PBT DC24 V SI US2 1.6 V 50 mA 4 x M12 5 (2 /) 0.5 A / 1 2 A / 1 1 8 PNP 57 No.EX-OMU0020CN 8.3. M12 5 . 8-2 EX245-DY1 TOP View 1 N.C. 2 2 n+1 3 5 1 3 0 V ( / ) 4 4 ( n) 5 FE/ SI IP65 IP65 8.4.