Flow Rate Type: Standard, Operating Temperature Range(°C): -10～60, Operating Humidity Range(%): 35～85, Number of Inputs: 2, Number of Outputs: 1, Analog Voltage Output(V): [DC1-5V] 1-5V, Power Supply Type: DC, Power Supply Voltage(V): [24] 24±10%, Pipe Connection Direction: 2-way, Connecting Tube Diameter: [8] 8(5/16inch), Liquid contact parts material: Resin + Metal, Mounting Hole: Presence

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: None, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: -

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: None, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: Rc1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: None, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/o Flow Adjustment Valve: ZS-33-M

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: Rc1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: None, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: None, Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: Panel Mount Adapter for w/o Flow Adjustment Valve

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: N (None), Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector)

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Symbol N3 N7 M N3 N7 N9 M One-touch fitting for 5/32" NPN output (+COM.) EX510-S002A Nil N EX510-S102A P.1715 to 1717 SY3000 One-touch fitting for 1/4" PNP output (COM.)

1

n = 4 to 24 n = 1 to 3 n = 4 to 24 n = 1 to 3 42.3 62.5 n: Number of stations 3 5 4 3 2 1 1 3 1 2 3 4 5 n: Number of stations Pitch 10.5 Pitch P = 16 (SY5000) P = 19 (SY7000) Make sure to mount in the right direction. Make sure to mount in the right direction. (20) SY5000: SY50M-86-(N) SY7000: SY70M-86-(N) Name plate is the number of stations (1 to 24).

Series SV

A, B port Symbol N1 N3 N7 N3 N7 N9 N7 N9 N11 N9 N11 02N 03N 02T 03T M P, E port Applicable series 1/8" One-touch fitting 5/32" One-touch fitting 1/4" One-touch fitting 5/32" One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting 3/8" One-touch fitting 5/16" One-touch fitting 3/8" One-touch fitting NPT 1/4 NPT 3/8 NPTF 1/4 NPTF 3/8 A

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Model SY3000-37-81A-3-N Single : For 1 to 4 stations SY3000-37-81A-3-6 Double/3 position : For 1 to 4 stations 10-SS5Y3-20SA SY3000-37-81A-2-N Single : For 5 to 8 stations SY3000-37-81A-2-4 Double/3 position : For 5 to 8 stations SY3000-37-81A-3-N Single : For 1 to 8 stations 10-SS5Y5-20SA SY3000-37-81A-3-6 Double/3 position : For 1 to 8 stations SY3000-37-81A-3-N Single : For 1 to 4 stations

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

side: Orange 2(B) port side: Green 12.3 4 x 5.3 (For mounting) L2 5 (Rail mounting hole pitch: 12.5) L1 With option (Station n) (Station 1) Light/surge voltage suppressor 58.4 E 4 A 3/5 3/5 E 4 A 4 A 4 A 82.7 101.2 77.3 2 B 2 B 2 B 2 B 63.8 P 1 P 1 5 5 3 E 1 P 3 E 1 P 12 1 1 1 1 Individual SUP spacer (For DIN rail mounting) (10) Individual EXH spacer 14.7 L Dimension n: Stations L n 2 185.5

SV

P 1 5 3 E 1 P (Station n) (Station 1) Light/Surge voltage suppressor 1 1 Individual SUP spacer SV3000-00Interface regulator Individual EXH spacer 82.7 77.3 63.8 SV3000-M1Interface regulator 12 (For DIN rail mounting) (10) B B B B 14.7 157.9 139.9 A A A A B A B A B A B A L Dimension n: Stations L n 2 185.5 175 121.5 17.5 97 3 198 187.5 142 13.5 117.5 4 223 212.5 162.5 16 138 5 235.5 225 183

SX

Clean appearance P N SS5X3-42 SX340(R) P N SS5X5-41 SX540 P N SS5X5-42 SX540(R) P N SS5X7-42 SX740(R) P N SS5X3-41 SX340 Single base/B mount Common SUP/Common EXH 4 to 12 stations 3 to 12 stations Base Side Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Model Applicable valve Manifold type P (SUP)/R (EXH) Valve stations (1) In case of a flat cable style, each valve is wired on the print board of manifold

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

-01, , N7 N9 C6 C8 Note) [ ]: AC Grommet (G) (With built-in one-touch fitting) N7 N9 C6, C8, 63.5 14 6 L2 L1 21.5 22.5 9.5 Approx. 300 (Lead wire length) 49 (For DIN type: 50.3) 21.5 P P 42.9 71.2[73.4] R R 2-5.5 (For mounting) (4.9) 1/4 (P, R port) (Pitch) P = 19 21 Manual override 1/8 (Station n) (Station 1) (Light/surge voltage suppressor) (Light/surge voltage suppressor) + + + + 67

42

8" PE. port 18 18 17.2 PE 41.7 R2 R1 5 P 1 3 SMC 1/2" 1(P), 5(R1), 3(R2) port 106.5 1/8" External pilot port 178.5 (3-position) 3.5 10.7 164.4 (Double) 96.2 155.4 (Single) M5 x 0.8 Ground screw 71.7 62.5 106 58.2 49.7 9 9 U side 27 12 X n 4 A 2 B 8 1/4", 3/8" C6, C8, C10, C12, N7, N9, N11 4(A), 2(B) port 4 A 2 B A A B A B A B A B A B A SMC SMC SMC SMC SMC SMC SMC 7 A A A A A A A B B B 4

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

SY3000-37-81A-2-N SY3000-37-81A-2-5 SY3000-37-81A-1-N SY3000-37-81A-1-4 SY3000-37-81A-2-N SY3000-37-81A-2-5 SY3000-37-81A-3-N SY3000-37-81A-3-6 SY3000-37-81A-3-7 Single : For 1 to 4 stations Double/3 position : For 1 to 4 stations Single : For 5 to 8 stations Double/3 position: For 5 to 8 stations Single : For 1 to 8 stations Double/3 position : For 1 to 8 stations Single : For 1 to 8 stations

CATALOG

2.48 1.75 4 7/8 2.19 1 1/8 9/16 3/8 325 (3.25) 1 1/8 3.9 1 1/2 1/2 3/8-24 3 3/4 0 1.57 1 1 1 3/8 1 1.18 4 1/4 2.72 2.34 5 53/64 2.76 1 1/2 3/4-16 7/8 1/2 400 (4) 1 1/8 4.7 1 1/2 1/2 3/8-24 4 1/2 0 1.57 1 1 1 3/8 1 1.18 4 1/4 2.72 2.34 5 53/64 3.32 1 1/2 3/4-16 7/8 1/2 D I M E N S I O N S C E N T E R T R U N N I O N T Y P E NC A1T 0 0.001 BA BORE (INCH) KK A AA B C DD E EA G TD TL WF MM D

V

H O W T O O R D E R B O D Y P O R T E D VA LV E S I N G L E U N I T VQ1 L 1 6 0 N C6 5 S U B P L AT E SUP C Y L I N D E R P O R T S C3 One Touch Fittings for 3.2 C4 One Touch Fittings for 4 C6 One Touch Fittings for 6 M5 M5 (10-32Nom) N1 One Touch Fittings 1/8 N3 One Touch Fittings 5/32 N7 One Touch Fittings 1/4 S E R I E S VQ1000 C O N F I G U R AT I O N 1 2 Position single 2 2 Position

0.4

mounting (For manifold) IN side port size OUT side port size D 01 02 C6 C8 N7 N9 01 02 C6 C8 N7 N9 Rc 1/8 Rc 1/4 6 One-touch fitting 8 One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting Rc 1/8 Rc 1/4 6 One-touch fitting 8 One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting F With bracket N Name plate Note) When two or more symbols are specified, indicate them alphabetically