Table of Contents

01T1Station 2Port size C6, C8 Light/Surge voltage suppressor (At FZ) 2-Rc 1/8 (PE port) 2-G 3/4 (Electrical entry) C6: Max. 6 C8: Max. 6.5 6-Rc 1/4 (P, EA, EB port) n: Stations Stations L L1 L2 Formula L1 = 28 x n + 47 L2 = 28 x n + 56 1 75 84 2 103 112 3 131 140 4 159 168 5 187 196 6 215 224 7 243 252 8 271 280 9 299 308 10 327 336 3-5-20 21 5 Port Pilot Operated Solenoid Valve Rubber Seal

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Not required Mounting orientation Unrestricted Shock/Vibration resistance m/s 2 Note 2) 150/30 Dustproof ( M8 connector conforms to IP65.)

SV

B 2 B 2 B 2 B 1 P 1 P V 5 V 1 P 3 E (Station n) (Station 1) Light/Surge voltage suppressor Individual SUP spacer MAX.21 (DIN rail dimension) SV2000-00Interface regulator SV2000-M1Interface regulator Individual EXH spacer 71.5 7.5 68.2 56.5 19.7 Block separation lever B B B B 145.6 127.6 A A A A B A B A B A B A L Dimension n: Stations L n 2 148 137.5 122.5 13 3 173 162.5 138.5 17.5 4 185.5

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com R 3 P 1 30 17 6.5 15 2 2 2 2 2 8 0.5 0.5 P = 11 10 M5: M5 thread 2n-M5 4(A), 2(B) port 35 4 L2 38 L1 42 M plug connector (M) 1 2 3 4 5 n U side D side Stations Direct manual override (Non-locking) 24 15 43 L plug connector (L) Dimensions n: Stations n L 11 12 13 14 15 16 17 18 19 20 28 20 39 31

Table of Contents

(4) C6 (6) M5 (M5 thread) kit C6 (6) N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C6 (6) C8 (8) C8 (8) kit N7 (1/4") N9 (5/16") N9 (5/16") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-82 P. 2

Series VQ Metal Seal/Rubber Seal Body Ported

N 16 16 stations S See p.1.10-67 for details.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

SY3000-37-81A-2-N SY3000-37-81A-2-5 SY3000-37-81A-1-N SY3000-37-81A-1-4 SY3000-37-81A-2-N SY3000-37-81A-2-5 SY3000-37-81A-3-N SY3000-37-81A-3-6 SY3000-37-81A-3-7 Single : For 1 to 4 stations Double/3 position : For 1 to 4 stations Single : For 5 to 8 stations Double/3 position: For 5 to 8 stations Single : For 1 to 8 stations Double/3 position : For 1 to 8 stations Single : For 1 to 8 stations

VQC

1 2 3 4 5 6 7 Stations D-side 8 U-side C10 3(R) port 2-G3/4 Conduit port 2-C12 3(R) port DIN rail clamp screw 77.5 49.5 30 25 10 12 13.5 25 C10 1(P) port (7.5) 45 P = 16 2-C12 1(P) port 2n-C4, C6, C8 C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting Formulas: L1 = 16n + 57, L2 = 16n + 163 n: Stations (maximum 20 stations) n L L1 L2 L3 L4 1 73 179 200 210.5 2 89 195 212.5

SYJ3000/5000/7000

Thread type Nil F N T Rc G NPT NPTF Rated voltage DC AC (50/60 Hz) 5 6 V S R 1 2 3 4 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] A, B port size 01 C6 C8 N7 N9 1/8 One-touch fitting for 6 One-touch fitting for 8 Note) Do not remove the factory installed bracket from models with the bracket option.

5 Port Solenoid Valve, Series VQC

1 2 3 4 5 6 7 Stations D-side 8 U-side C10 3(R) port 2-G3/4 Conduit port 2-C12 3(R) port DIN rail clamp screw 77.5 49.5 30 25 10 12 13.5 25 C10 1(P) port (7.5) 45 P = 16 2-C12 1(P) port 2n-C4, C6, C8 C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting (mm) Formulas: L1 = 16n + 57, L2 = 16n + 163 n: Stations (maximum 20 stations) n L L1 L2 L3 L4 1 73 179 200 210.5 2 89

42

X n VQ 1/2 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B A A A A A A A A B B B B B B B B 8 VQ 4/5 VQ 4/5 SMC SMC SMC SMC SMC SMC SMC 7 VQC 1/2 6 VQC 4/5 5 L2 L1 VQZ 4 SQ 3 VFS 2 P = 25 1 VFR 50.5 44 X Stations VQ7 12 38 27 Cable length (600 or 1500 mm) D side 96.3 47.7 11.7 43.2 178.5 (3-position) 49.7 58.2 96.2 Dimensions Formula: L1 = 25n + 63, L2 = 25n + 76 n: Stations (Maximum 16 stations) n L 1 2

Fieldbus System

How to Order Manifold Assembly Example (SS5Y3-12S6l-l) 2-position single SY3130-5U1-C6 (3 sets) Digital Output Unit EX600-DYPB Digital Input Unit EX600-DXPD P, E port size (One-touch fittings) SI Unit Note) End Plate Note) 2-position double SY3230-5U1-C6 (2 sets) EX600-SDN1A EX600-ED2 SY3000 8 5/16" SY5000 10 3/8" Symbol Nil N 1 0 PE PE X X A B A B A B A B A B 3/5E 4 A 3/5E For N, sizes

VFR

01T1Station 2Port size C6, C8 Light/Surge voltage suppressor (At FZ) 2-Rc 1/8 (PE port) 2-G 3/4 (Electrical entry) C6: Max. 6 C8: Max. 6.5 6-Rc 1/4 (P, EA, EB port) n: Stations Stations L L1 L2 Formula L1 = 28 x n + 47 L2 = 28 x n + 56 1 75 84 2 103 112 3 131 140 4 159 168 5 187 196 6 215 224 7 243 252 8 271 280 9 299 308 10 327 336 3-5-20 21 5 Port Pilot Operated Solenoid Valve Rubber Seal

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

4(A) port side: Orange 2(B) port side: Green L2 5 (Rail mounting hole pitch: 12.5) L1 With option (Station n) (Station 1) Light/surge voltage suppressor 4 A 4 A 4 A 4 A 41 E 3/5 E 3/5 2 B 2 B 2 B 2 B 1 P 1 P 78 68.2 63 E 3 P 1 E 3 P 1 Individual EXH spacer 48 7.5 Individual SUP spacer 19.7 Block separation lever L Dimension n: Stations L n 2 135.5 125 106.5 14.5 3 148 137.5 117 15.5 4 160.5

SZ3000

Note Mounting position Without power supply terminals With power supply terminals 1: Vertical connector 2: Horizontal connector P: Positive common N: Negative common 1 2 1 2 P N D side SZ3000-40-2A-D For D-sub connector SZ3000-40-1A-D 1 2 1 2 P N D side SZ3000-40-4A-D For flat cable 26 pins SZ3000-40-3A-D Note) The assembly part numbers with power supply terminals are 24VDC specifications

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

A A n-One-touch fitting (Pitch) (A port) P=19 21 C6: Applicable tube T0604 C8: Applicable tube T0806 Rc (PT) 1/8 L plug connector (L) M plug connector (M) Manual override (Non-locking) 2-M5 X 0.8 2-M5 X 0.8 (External pilot port) (External pilot port) 69.5 [76] 57.1 50.5 35 8.5 (P/R port) 4-Rc (PT)1/4 63.5 69.5 [76] 63.5 63.5 30.5 30.5 A A 14 21.5 14 21.5 (Pitch) 22.5 9.5 6 6 n-Rc (PT)1/8

SYJ300/500/700

Type 41 Applicable solenoid valve SYJ514SYJ514MSYJ524SYJ524MHow to Order SS3YJ5 41 05 C6 R port 1/8 Stations P, R port thread type A port size 02 : 20 P port 1/8 2 stations : 20 stations A A M5 01 C4 C6 N3 N7 M5 x 0.8 1/8 Nil Rc G NPT NPTF Applicable blanking plate assembly SYJ500-10-3A F N T 4 One-touch fitting 6 One-touch fitting A port M5 x 0.8, 1/8, C4, C6 5/32" One-touch fitting 1/4"

Vacuum System Peripherals:

S U D side D U side 2 to 10 stations B Special specifications M 2 to 20 stations Both sides Made to order. When using both types, specify C4 and C6 specifically; do not just use X marking.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Note Mounting position Without power supply terminals With power supply terminals 1: Perpendicular connector 2: Lateral connector P: Positive common N: Negative common 1 2 D side SZ3000-40-2A-D For D-sub connector 1 2 P N SZ3000-40-1A-D 1 2 1 2 P N D side SZ3000-40-4A-D For flat cable 26 pins SZ3000-40-3A-D Note) The assembly part numbers with power supply terminals are 24VDC specifications

SZ3000

Note Mounting position Without power supply terminals With power supply terminals 1: Perpendicular connector 2: Lateral connector P: Positive common N: Negative common 1 2 1 2 P N SZ3000-42-2A-DSZ3000-42-1A-D For D-sub connector D side 1 2 1 2 P N SZ3000-42-4A-DSZ3000-42-3A-D For flat ribbon cable 26 pins D side Note) The assembly part numbers with power supply terminals are 24 VDC specifications