PFMB.eng

PFMB7201 : If the error cannot be reset after the above measures are taken, then please contact SMC. [ inP] External input 3 [F20] [r AC] Accumulated flow external reset G1/4 21 mm PFMB7501 Mounting screws Screw is prepared by customer.

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

MHZ

9@0@1 Seal kit MHZ2-(N) MHZ2-(N)1 MHZ2-(N)2 MHZ2-3 MHZ2-D MHZ2-S MHZ2-C MHZ2-DW MHZ2-K MHZ2-M MHZ2-E rty!1!3 Mounting screw MHZ-A1002(N)-1 MHZ-A1602(N)-1 MHZ-A2002(N)-1 MHZ-A2502(N)-1 Finger assembly MHZ-A1002(N)-2 MHZ-A1002-3 MHZ-A1602(N)-2 MHZ-A1602-3 MHZ-A2002(N)-2 MHZ-A2002-3 MHZ-A2502(N)-2 MHZ-A2502-3 MHZ-A4003 MHZ-A3203 MHZ-A1003 MHZ-A1603 MHZ-A2003 MHZ-A2503 Piston assembly wo!0!

Table of Contents

9@0@1 Seal kit MHZ2-(N) MHZ2-(N)1 MHZ2-(N)2 MHZ2-3 MHZ2-D MHZ2-S MHZ2-C MHZ2-DW MHZ2-K MHZ2-M MHZ2-E rty!1!3 Mounting screw MHZ-A1002(N)-1 MHZ-A1602(N)-1 MHZ-A2002(N)-1 MHZ-A2502(N)-1 Finger assembly MHZ-A1002(N)-2 MHZ-A1002-3 MHZ-A1602(N)-2 MHZ-A1602-3 MHZ-A2002(N)-2 MHZ-A2002-3 MHZ-A2502(N)-2 MHZ-A2502-3 MHZ-A4003 MHZ-A3203 MHZ-A1003 MHZ-A1603 MHZ-A2003 MHZ-A2503 Piston assembly wo!0!

MHZ

9@0@1 Seal kit MHZ2-(N) MHZ2-(N)1 MHZ2-(N)2 MHZ2-3 MHZ2-D MHZ2-S MHZ2-C MHZ2-DW MHZ2-K MHZ2-M MHZ2-E rty!1!3 Mounting screw MHZ-A1002(N)-1 MHZ-A1602(N)-1 MHZ-A2002(N)-1 MHZ-A2502(N)-1 Finger assembly MHZ-A1002(N)-2 MHZ-A1002-3 MHZ-A1602(N)-2 MHZ-A1602-3 MHZ-A2002(N)-2 MHZ-A2002-3 MHZ-A2502(N)-2 MHZ-A2502-3 MHZ-A4003 MHZ-A3203 MHZ-A1003 MHZ-A1603 MHZ-A2003 MHZ-A2503 Piston assembly wo!0!

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Vertical operation Inclined operation Horizontal operation CX Review of load weight and operating pressure DW Lo -X Guide First tentative bore size determination F3 D 1.6 x P First tentative bore size determination F1 D 1.6 x P First tentative bore

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Vertical operation Inclined operation Horizontal operation CX Review of load weight and operating pressure DW Lo -X Guide First tentative bore size determination F3 D 1.6 x P First tentative bore size determination F1 D 1.6 x P First tentative bore

1

New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2

Flow Rate Range: 501 (5 to 500 L/min), Thread Type: Rc, Port Size: 04 (1/2), Output Specifications: D (NPN; Analog 4 to 20 mA), Option 1: W (w/Lead Wire w/Connecter + Connector Cover), Unit Specifications: M (SI Unit Only), Option 2: R (With Bracket)

Flow Rate Range: 5 to 500 L/min, Thread Type: Rc, Port Size: 1/2, Output Specifications: NPN; Analog 4 to 20 mA, Option 1: w/Lead Wire w/Connecter + Connector Cover, Unit Specifications: SI Unit Only, Option 2: With Bracket, Calibration Certificate: -

CLA

Auto Switch Mounting Bore size Auto switch D-S5/S6/SS9W BA-04 SA-OS D-G5D IK59/G5 DWIK59W SA-OS SA-OB BA-lO 50 40 63 80 100 D-A5/A6IA59W D-FS D/JS D/FS DW/JS9W BT-04 BT-04 ST-06 ST-OB BT-OB D-FSNTL, FSSAL, FS9F O-A3/A44/G39/K39 BD1-04M BD1 -0SM SD1-0SM SOl-0BM SD1 -l0M D-GSSAUG59F/GSNTL D-A3 DC/A44C/G39CIK39C BA3-0S0 SA3-040 BA3-063 SA3-0BO BA3-100 D-A3 DCfA.44CfG39C/K39C: come With mounting

Possible to transfer a workpiece at low-speed.

A S 3H9 effective depth 2 3H9 effective depth 2 TD 0.6 TC (mm) D (g6) DD (h9) AU A B BA BB BC BD BU H Size Rotation angle 10 15 90, 180 29 12 18 42.4 (8.5) 8.5 17 6.7 2.2 16.7 5 90, 180 31 14 20 53.6 (9.5) 9 26.4 10.6 23.1 6 DW Q S US UW ab M TA TC TD Rotation angle Size 90 56 10 4.5 17 35 44 6 9 15.5 8 15.4 180 69 90 65 15 5.5 20 40 50 7 10 16 9 17.6 180 82 The AU dimension is not the

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8 '" co .W 0 0 , '3~ IK A I -:~ 18 ;8 ,L IL (mm) ; B ;C ; L y 2.5 67 67.5 4 Bellows type Bellows type APplicable tube 00 1'1 .One touch tube fitting -, i'1 One-touch tube fitting Applicable tube 00 I , --, Width across flats 13 ~ Width across flats B M14 X 1 --'" Width across flats 19 M10x1 idth acDw

1

With lock MB Symbol: A17 Symbol: A18 Symbol: A19 Symbol: A20 MB1 CA2 30 30 H1 H1 30 H1 30 H1 Symbol: A1 Symbol: A2 Symbol: A4 Symbol: A3 CS1 X X L C76 X L X K F C C0.5 DA RD L 30 30 L 30 C85 C95 E Symbol: A21 Symbol: A22 Symbol: A26 Symbol: A23 T W1 L L L L CP95 RD 30 DA 30 30 DA H1 H1 DA E NCM H1 Symbol: A5 Symbol: A6 Symbol: A7 Symbol: A8 30 DB DB NCA B C1 H B C T B RD T X LA H C1 DW

MLGP

650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 20 to 32 CNA Body length Manual unlocking bolt CNS LOCK Body length is the same as the standard MGP CLS Holding a clamped condition CLQ Locking direction is selectable MLGP Compact Guide Cylinder with Lock Series MLGP 20, 25, 32, 40, 50, 63, 80, 100 RLQ Extension locking Retraction locking W MLU LOCK ML1C A B B A DW

MXF

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com L2 A4 Fig. (3) Workpiece Mounting Coefficient: K L3 A2 CX Table mounting DW Note) Static moment: Moment generated by gravity Dynamic moment: Moment generated by impact when colliding with stopper Graph (1) Allowable Load Weight Coefficient: -X 20K =

CEx-OMI0064

,PLC ,10100ms ,150ms , ,300ms,, 10100ms (+150ms) ms 300ms 150ms ON ON OFF 10~100ms 10100ms *8 RS-232C ,CEU5 CEU5 2 , ,2 *9 () ,DC 1 , 2.5s ,3s *10 30ms ON 24 - ,,, ,, , 2ROM) 7-4 (E 2ROM (1)E / 2ROM ,E RS-232C NO. 2ROM , ON,E 2ROM ,E 2ROM 80 ,LCD E2FUL SMC (2)E , (3),,LCD E2Err 25 - 8 RS-232C 8-1 RS-232C 1200,2400,4800,9600,19200bps ASCII 1 7 1 8-2 (1) VR DR DW

CG1-SMV13_en

implemented and the power from any appropriate source is cut, and read and understand the specific product precautions of all relevant products carefully. 3) Before machinery/equipment is restarted, take measures to prevent unexpected operation and malfunction. 100 42.2 Jun T TT UT VT DT ET FT 3.4 Lubrication Jul U TU UU VU DU EU FU Caution Aug V TV UV VV DV EV FV Sep W TW UW VW DW

Parallel Type Air Gripper

20,21,22 MHZ2-(N) MHZ-AA1002(N) MHZ-AA1602(N) MHZ-AA2002(N) MHZ-AA2502(N) MHZ2-(N)1 MHZ-AA1002(N)-1 MHZ-AA1602(N)-1 MHZ-AA2002(N)-1 MHZ-AA2502(N)-1 Finger assembly 4,5,6,13 Mounting screw MHZ2-(N)2 MHZ-AA1002(N)-2 MHZ-AA1602(N)-2 MHZ-AA2002(N)-2 MHZ-AA2502(N)-2 MHZ2-3 MHZ-AA1002-3 MHZ-AA1602-3 MHZ-AA2002-3 MHZ-AA2502-3 Piston assembly MHZ-AA1003 MHZ-AA1603 MHZ-AA2003 MHZ-AA2503 2,11,12,14 MHZ2-DW

MHx-OMU0057

MHZ16S-PS MHZ20S-PS MHZ25S-PS 20,21,22 MHZ2-(N) MHZ-AA1002(N) MHZ-AA1602(N) MHZ-AA2002(N) MHZ-AA2502(N) MHZ2-(N)1 MHZ-AA1002(N)-1 MHZ-AA1602(N)-1 MHZ-AA2002(N)-1 MHZ-AA2502(N)-1 4,5,6,13 Ass'y MHZ2-(N)2 MHZ-AA1002(N)-2 MHZ-AA1602(N)-2 MHZ-AA2002(N)-2 MHZ-AA2502(N)-2 MHZ2-3 MHZ-AA1002-3 MHZ-AA1602-3 MHZ-AA2002-3 MHZ-AA2502-3 Ass'y MHZ-AA1003 MHZ-AA1603 MHZ-AA2003 MHZ-AA2503 2,11,12,14 MHZ2-DW