5 Port Solenoid Valve Series SV1000/2000/3000/4000 Gasket SY5000-11-18 SY9000-11-2 o SY7000-11-14 SY3000-11-25 For valve mounting (Matt nickel plated) Round head combination screw SV2000-21-1 (M3 x 30) SV3000-21-1 (M4 x 35) SX3000-22-2 (M2 x 24) SV2000-21-2 (M3 x 40) Note) Round head combination screw requires 2 pcs. per one valve for Series SV1000, SV2000, SV3000.
(Example) For M3: L1 = 6 mm Applicable shaft type: W CRB2 CRBU2 Q1 = M L1 + (3 x P) (mm) CRB1 Y Q2 Size (mm) Y = L1 = 15 X Q1 M3 Size 1.5 to 9 MSU 15 20 M3, M4 1.5 to 18 M3 1.5 to 10 L2 + (3 x P) L2 = 20 30 M3, M4, M5 1.5 to 20 M3, M4 X = 2 to 13 CRJ 30 40 Q2 = M M3, M4, M5 2 to 22 M3, M4, M5 4.5 to 15 CRA1 Symbol: A3 The long shaft can be further shortened by machining male threads into
L1 (3 x P) Q1 = M C2 = C Y = C1 = C C2 Y = L2 = L2 (3 x P) C2 = C L2 = Q2 = M L1 = X = DD2 = (mm) (mm) (mm) Y 1 to 9 1 to 10 D2 Q1 M3, M4 M3, M4, M5 Q2 M3, M4 M3, M4, M5 L2 max Y Y Y 6 to 9 7.5 to 10 X 8 to 18 9.5 to 20 L1 max X 2 X 2 L2 max Y Y Size 10 15 Size 10 15 Size 10 15 3.5 to 4.9 3.5 to 5.9 257 Series CRQ2 (Size: 10, 15, 20, 30, 40) Simple Specials: -XA1 to -XA24: Shaft Pattern
Applicable shaft type: W L1 (3 x P) Q1 = M C2 = C Y = DC1 = C C2 Y = L2 = L2 (3 x P) C2 = C L2 = Q2 = M L1 = X = D2 = (mm) (mm) (mm) Y 1 to 9 1 to 10 L2 max Y Y D2 L1 max X 2 X 2 L2 max Y Y Q1 M3, M4 M3, M4, M5 Q2 M3, M4 M3, M4, M5 Y 6 to 9 7.5 to 10 X 8 to 18 9.5 to 20 Size 10 15 Size 10 15 Size 10 15 3.5 to 4.9 3.5 to 5.9 319 CRQ2X Series (Size: 10, 15, 20, 30, 40) Simple Specials: -
Q1= M L1 (3 x P) C1 = C C2 = C Y = C2 Y = L2 = C2 = C L2 = L2 (3 x P) L1 = X = Q2 = M D2 = (mm) (mm) (mm) Y 1 to 9 1 to 10 D2 Q1 M3, M4 M3, M4, M5 Q2 M3, M4 M3, M4, M5 L2 max Y Y Y 6 to 9 7.5 to 10 Size 10 15 Size 10 15 Size 10 15 L1 max X 2 X 2 X 8 to 18 9.5 to 20 L2 max Y Y 3.5 to 4.9 3.5 to 5.9 11-8-13 14 Series CRQ2 (Size: 10, 15, 20, 30, 40) Simple Specials: -XA1 to -XA24: Shaft Pattern
(M3 x 40) VZ1000-11-4SV3000-69A : Manifold stations Manifold Specification Sheets Refer to DIN rail dimension tables on page 85.
C2 SJ3l60-C2 SJ2l60-C2 2 onetouch fitting 2 onetouch fitting 3 position 4 position 3 position 4 position 71 65 73 46 41 44 2 position 2 position C4 C4 SJ3l60-C4 SJ2l60-C4 4 onetouch fitting 4 onetouch fitting 3 position 4 position 3 position 4 position 77 48 73 61 69 44 39 42 2 position 2 position C6 SJ3l60-C6 SJ2l60-M3 6 onetouch fitting M3 x 0.5 3 position 4 position 3 position 4 position
M3 x 0.5 8.5 Model Vacuum inlet direction q Pad dia.
Connections 1/4 NPT (S, C1, C2), converts also ND91_ connections to1/4 NPT. RC03 H127093 Cable assembly remote mount sensor cable 30 m, angle connector D3 D3B As D3 but two pressure gauges with connections 1/4 NPT (S, C2).
Note 1) Sampling air flow rate: Number of particles contained in 75l of air Note 2) Actuator: 1 million cycles Solenoid valve: 2 million cycles Particle generation characteristics of CM2 Particle generation characteristics of CXSL Particle generation characteristics of CY1B 106 106 106 Particle concentration (particles/m3) Particle concentration (particles/m3) Particle concentration (particles
CQ-M3 x 30L x 35L x 40L x 45L x 50L x 55L CQ-M3 x 30L x 35L x 40L x 45L x 50L x 55L CQ-M5 x 30L x 35L x 40L x 45L Mounting bolt part no. CQ-M5 x 50L x 55L x 60L x 65L x 70L x 75L CQ-M5 x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L Mounting method: Mounting bolt for through-hole mounting style of CQSYB is available as an option.
With External Pilot Specifications (Pitch) 24 P = 24 48.6 11 25 11.8 20 14.5 13.7 E 3/5 E 3/5 E 3 E 3 4 A A 4 A 4 A 4 A 4 A 4 A 4 A 4 4 A A 4 35.8 40.4 35 58.3 63.9 74.8 B 2 B 2 B 2 B 2 B 2 P 1 P 1 B 2 B 2 B 2 B 2 P 1 P 1 B 2 C2 C2 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 3/8" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 8, 5/16" 10, 3/8" 12 X PE X PE
x 0.35 x 19 M3 x 0.35 x 23 M3 x 0.35 x 24 M3 x 0.35 x 28 M3 x 0.35 x 68 M3 x 0.35 x 72 M3 x 0.35 x 73 M3 x 0.35 x 77 y u Components Ejector unit + Vacuum switch/Filter unit i o For nozzle size 10, 13, 15 M3 x 0.35 x 84 4 [For ZSE4 spec.]
Bracket Mounting Procedure
x 0.35 x 19 M3 x 0.35 x 23 M3 x 0.35 x 24 M3 x 0.35 x 28 M3 x 0.35 x 68 M3 x 0.35 x 72 M3 x 0.35 x 73 M3 x 0.35 x 77 y u Components Ejector unit + Vacuum switch/Filter unit i o For nozzle size 10, 13, 15 M3 x 0.35 x 84 4 [For ZSE4 spec.]
M3 x 0.5 x 3L M8 x 1.25 x 8L (Bolt holder) (Hexagon socket head set screw) 31 0.5 45 45 3 3 5.3 5.3 250.2 250.2 16 32 2-M3 x 0.5 through 6.5 counter bore depth 5 (Same on the opposite side) 3.4 through 3 3 45 45 5.5 M2.5 x 0.45 x 6L (Cap screw) M3 x 0.5 x 12.5L (Hexagon bolt) and M3 x 0.5 (Hexagon nut) 2-M3 x 0.5 through Steel ball Plug 2-M3 x 0.5 through 2.75 (11) (10+ST) 250.2 4 Part no
EXH.1 (C1) 2 (C2) 4 93.7 23 19 VH 18.5 18.5 12 CYL.2 CYL.1 14 12 21 20 3 (E1) 1 (S) 5 (E2) VHS 0.5 MPa supply 30.5 26.4 3 x 1/4 VHS T.T.
(Example) For M3: L1 = 6 Applicable shaft types: S, Y L2 + (3 x P) L1 + ( 3 x P) Q1 = M Y axis S axis (mm) (mm) Q1 Q2 L1 = Shaft type Shaft type S Y S Y Size Size L2 + (3 x P) L2 = 50 50 M3, M4, M5, M6 M3, M4, M5 M3, M4, M5 L2= 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6, M8 M4, M5, M6 Q2 = M M4, M5, M6 100 100 M5, M6, M8, M10 M5, M6, M8 M5, M6, M8 Symbol: A33 Machine
With external pilot specifications (Pitch) P = 10.5 13.5 46.9 18.3 11.8 14.1 8.4 8.6 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 10 19.7 24.6 23 5 3 E 5 3 E 3 5 E 3 5 E 43.2 43 56.5 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 C2 C2 1 P 1 P 1 P 1 P One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 8 5/16" PE PE X X C1 C1 2 x M12 One-touch fitting [PE: Pilot EXH port] Applicable tubing
max (from 3 of graph MY2H/M3) = 60 (Nm) MX M3 = m3 x g x X = 7.525 x 9.8 x 140.1 x 10-3 = 10.33 (Nm) m3 M3 MTS Load factor 3 = M3/M3 max = 10.33/60 = 0.17 MY 5.