Air Cylinder

40 155 180 205 230 Bore size Stroke range B E F FX FD FT H 20 Up to 125 40 12 2 28 5.5 6 35 25 Up to 200 44 14 2 32 5.5 7 40 32 Up to 200 53 18 2 38 6.6 7 40 40 Up to 200 61 25 2 46 6.6 8 50 * End boss is machined on the flange for E.

Made to Order

-XC88 -XC89 CA2 Basic: CA2B G 2 x P 2 x Cushion valve G Width across flats KA 4 x J MM D E B C H1 AL WA WA B C B1 A K N ZZ + Stroke S + Stroke N F M H (mm) Bore size (mm) 40 50 63 80 100 AL B B1 C D E F G H1 J K KA M MM N P S WA H ZZ A 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 17.5 15 15 19 19 15 17 17 21 21 8 11 11 13 16 M8

Rotary Actuator/Vane Type

CRA1 B port A port A port B port A CRQ2 29 F 9h9 0 0.036 MSQ A parallel key is used instead of single flat for size 40.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

(Except D-P5DWL) A L F G D MU Bore size 32 40 50 63 80 100 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm DMounting brackets are shipped together, (not assembled).

Electric Actuator/Slider Type

16 6 40 46 25 9.5 48 57.5 32 16 63 79 40 0 68 68 Step motor, Stroke: 300 mm Step motor Top surface of table and motor are level.

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

MHZ

MHZ2-6D/MHZA2-6D MHZ2-25D/MHZL2-25D MHZ 100 Pressure 0.7 MPa Pressure 0.7 MPa 6 MHF Pressure 0.7 MPa Pressure 0.7 MPa 0.6 MPa 0.6 MPa 80 Gripping force (N) Gripping force (N) 0.6 MPa 0.6 MPa 0.5 MPa 0.5 MPa MHL 4 0.5 MPa 0.5 MPa F 60 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MPa MHR 0.3 MPa 0.3 MPa 40 0.3 MPa 0.2 MPa 0.3 MPa 0.2 MPa 2 0.2 MPa 0.2 MPa MHK 20 MHS 0 10 20 30 0 20 40 60 80 100 F Gripping point

MHZ

MHZJ2-6D/MHZAJ2-6D MHZJ2-25D/11-MHZ2-25D 100 Pressure 0.7 MPa Pressure 0.7 MPa 6 Pressure 0.7 MPa Pressure 0.7 MPa 0.6 MPa 0.6 MPa 80 Gripping force (N) Gripping force (N) MHZ 0.6 MPa 0.6 MPa 0.5 MPa 0.5 MPa F 4 0.5 MPa 0.5 MPa 60 0.4 MPa 0.4 MPa MHF 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 40 0.3 MPa 0.2 MPa 0.3 MPa 0.2 MPa MHL 0.2 MPa 0.2 MPa 2 20 MHR F 0 10 20 30 0 20 40 60 80 100 MHK Courtesy

Integrated Controller

Motor Maintain a space of 40 mm or more. e-Actuator rod type built-in magnet portion (Piston) 40 40 40 Maintain a space of 40 mm or more. 40 40 e-Actuator slider type built-in magnet portion (Table unit) An air cylinder with an auto switch cannot be installed in the shaded area. 63 These safety instructions are intended to prevent hazardous situations and/or equipment damage.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Rubber back of the belt is softened and sticky f.

15

14 NY M4 x 0.7 8 70 50 5 46 69.8 61.4 M4 x 12 M5 x 40 11 NX M5 x 0.8 9 63 50 5 49.7 69.8 61.4 M4 x 12 M5 x 40 9 NW M5 x 0.8 9 70 50 5 47.5 69.8 61.4 M4 x 12 M5 x 40 9 NV M4 x 0.7 8 63 50 5 49.7 69.8 61.4 M4 x 12 M5 x 40 9 NU M5 x 0.8 9 70 50 5 47.5 69.8 61.4 M4 x 12 M5 x 40 11 NT M5 x 0.8 9 70 50 5 46 69.8 61.4 M3 x 12 M5 x 40 12 NM2 M4 x 0.7 8 50 36* 4.5* 40.1 69.8 61.4 M4

MY1

direction (2) C2 C K 20 20 JJ M8 x 1.25 M10 x 1.5 LD 11 14 L 7.5 9.5 E4 2.5 2.5 P 16 19 Q E3 2.5 2.5 Model MY-J50 MY-J63 Applicable bore size MY1B50 MY1B63 (mm) 8 9.5 Mounting direction (2) Common G H 3.2 4.5 4.5 Applicable bore size Model D J 35 40 47 MM 5.5 6.5 6.5 A 63 76 92 B C 39 47 56 F 100 124 144 MY1B25 MY1B32 MY1B40 MY-J25 MY-J32 MY-J40 40 55 74 78 94 112 60 80 100 F Mounting direction

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Without auto switch With auto switch Stroke range (mm) Bore size (mm) J K D L C E M I H P M5 x 0.8 A A B F 5.5 Q 11.5 B P F Q 5 10 to 50 75, 100 5 to 50 75, 100 10 to 50 75, 100 30 23 32 40 M8 x 1.25 4.5 33 7.5 Rc 1/8 14 10.5 16 7 13 45 34 60 Rc 1/8 10.5 7.5 40 36.5 46.5 38.5 48.5 33 29.5 39.5 30.5 40.5 40 Rc 1/8 46.5 39.5 M8 x 1.25 5 8 Rc 1/8 14 11 16 7 13 52 40 69 11 8 M10 x 1.5 50 Rc 1

10

Auto switch Mounting type B Basic L Axial foot F Rod flange T Center trunnion Nil Without auto switch Bore size 32 32 mm 40 40 mm 50 50 mm 63 63 mm 80 80 mm 100 100 mm 125 125 mm * For applicable auto switches, refer to the table below.

CQS

Model C D 25 30 35 40 45 50 25 30 35 40 45 50 25 30 35 40 45 50 55 60 65 70 30 35 40 45 50 55 60 65 70 75 C' D' 30 35 40 45 50 55 30 35 40 45 50 55 30 35 40 45 50 55 60 65 70 75 35 40 45 50 55 60 65 70 75 80 Mounting bolt Mounting bolt CQSKB12-5D -10D -15D -20D -25D -30D CQSKB16-5D -10D -15D -20D -25D -30D CQSKB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSKB25-5D -10D -15D -20D -

Air Slide Table

40 40 40 40 40 Stroke 50 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC 10 10 20 20 30 30 Stroke 40 40 50 50 75 75 Page 67 100 Height interchangeable type

Compact Cylinder

Mounting style Through-hole/Both ends tapped common (Standard) Foot style Rod side flange style Head side flange style Single clevis style B L F G C Bore size 20 25 32 40 50 63 Auto switch 20 mm 25 mm 32 mm 40 mm 50 mm 63 mm Nil Without auto switch (Built-in magnet cylinder) For the applicable auto switch model, refer to the table below.

2–4

-30 -35 -40 -45 -50 -75 -100 CDQMB50-10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CDQMB12-5 -10 -15 -20 -25 -30 CDQMB16-5 -10 -15 -20 -25 -30 CDQMB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB32-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 40 45 50

ISO Standard Hydraulic Cylinder

2 (n 4) 2 D-M9/M9W 20 + 40 85 + 40 95 + 40 100 + 40 105 + 40 115 + 40 "n" pcs.

CHKD/CHKG

Rod end male threads (mm) a b c e f g h Bore size (mm) 20 12.5 15 M10 x 1.25 6 10 23 66 25 15.5 18 M12 x 1.25 6 12 26 71 32 22 25 M16 x 1.5 7 14 35 91 40 27 30 M20 x 1.5 7 19 40 105 50 32 35 M24 x 1.5 8 24 46 116 63 42 45 M30 x 1.5 9 30 58 135 80 57 60 M39 x 1.5 14 41 77 165 100 72 75 M48 x 1.5 21 50 101 207 285 CHKG Series Dimensions Foot type/CHKGL 2 x Rc P Width across flats f c R R Lg