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st to 300 st 25 st or less Over 300 st Over 30 st to 100 st Over 100 st to 200 st Over 200 st to 300 st 30 st or less 28 52 300 100 75 77 128 200 128 178 24 52 174 198 42 54 92 80 14.5 25.5 74 28 156 180 140 17.5 M12 x 1.75 32 40 50 63 117 117 12 16 20 25 24 24 24 28 33 34 36 38 200 121 122 124 124 48 48 48 52 45 46 48 50 300 171 172 174 174 83 84 86 88 124 200 200 300 300 105 105 167

Table of Contents

M16 x l 300 M16 x l 300 M16 x l 500 M24 x l 500 M24 x l 500 AT6C AT11C AT22C AT37C AT55C AT75C AT125C AT150C AT220C 1 2 Rc 1/2 Rc 3/4 Rc 1 Rc 1 Rc 1 1/4 Rc 1 1/4 Rc 2 Rc 2 Rc 2 Rc 110 110 110 180 180 180 260 260 Rc 3 4 Rc 1 1 2 1 2 Rc 1 2B (JIS 10kFF) 2B (JIS 10kFF) 3B (JIS 10kFF) 4B (JIS 10kFF) 4B (JIS 10kFF) 14-16-2 1 Heatless Air Dryer Series ID Model Heatless ID series is best when dry

Table of Contents

1.16 VFS Exhaust center VFS5400 VFS5410 55 or less 1.14 300 VS4 Pressure center VFS5500 55 or less VFS5510 1.14 VQ7 300 EVS Double check VFS5610 60 or less 1.99 180 VFN Note 1) Based on JIS B 8375 (once per 30 days) for the minimum operating frequency.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

200 Single rod CQ2 7-6-108 10 to 300 Double acting 125, 140 160, 180 200 Double rod CQ2W 7-6-115 10 to 300 Long Stroke 32, 40, 50 63, 80, 100 Single rod CQ2 Double acting 7-6-121 125 to 300 Anti-lateral Load Single rod CQ2S 32, 40, 50 63, 80, 100 Double acting 32 to 40/5 to 100 50 to 100/10 to 100 7-6-132 With End Lock 20, 25, 32 50, 63, 80 100 Single rod CBQ2 Double acting 20 to 63/10 to

15

(Recommended height 6 mm) LC3F2 Motor Mounting Dimensions [mm] Dimensions [mm] Model n C D E LEJS63N-300 6 1 200 180 LEJS63N-400 8 2 400 80 LEJS63N-500 8 2 400 180 LEJS63N-600 10 3 600 80 LEJS63N-700 10 3 600 180 LEJS63N-800 12 4 800 80 LEJS63N-900 12 4 800 180 LEJS63N-1000 14 5 1000 80 LEJS63N-1200 16 6 1200 80 LEJS63N-1500 18 7 1400 180 Motor type FA FB FD NZ/Mounting type Z M5 x 0.8 7

smcmaintenancepartslist

NBR Valve seal Tube gasket Standard (non-lube) Piston gasket 125 140 160 180 200 250 300 CS1N125A-PS CS1N140A-PS CS1N160A-PS CS1N180A-PS CS1N200A-PS CS1N250A-PS CS1N300A-PS Retaining plate gasket Guide gasket Component part numbers: @3, @5, @6, @7, @8, #0. Seal kit includes a grease pack (125 to 160: 40 g, 180 and 200: 50 g, 250 and 300: 60 g).

Electric Actuators

400 500 600 700 800 900 1000 1200 1500 CABLEVEYOR LJ1S101SC 88 128 116 94 to 300 146 LJ1S202SC 90 130 118 96 to 300 LJ1H101SC 6 48 to 500 LJ1H101PB 2 122 110 44 to 600 104 145 LJ1H101NB 4 46 to 600 LJ1H202SC 124 16 112 58 to 500 LJ1S303SC 146 132 92 120 98 to 300 to 300 to 300 LJ1H202PA 8 50 to 500 124 112 106 LJ1H202NA 12 54 to 500 LJ1H303SE 126 114 22 64 to 500 to 500 to 500 LJ1H202PC

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Y: 4.5 to 7 D: 6 to 8 Applicable cable O.D. 2.3 to 2.8 Single Manual override (Non-locking) 4-Rc 1/4 (EXH port) 300 (Lead wire length) 2-Rc 1/4 (SUP port) (Pitch) 2n-Rc 1/8, 1/4 (CYL port) 4-M5 (Mounting hole) (L) (M) 300 (Lead wire length) 300 (Lead wire length) (Bracket mounting screw) (Pilot EXH) L Dimension n: Stations n L 2 127.5 115.5 99 3 154 142 125 4 180 168 151.5 5 206.5 194.5 178

Table of Contents

Refer to pages starting with 181 for mounting. 95 95 100 8(4)-6.2 B ( ) ( ) (170) 110 20 95 95 A ( ) ( ) (150) A B 100 200 300 400 Stroke Model LG1H212NA-100-F LG1H212NA-200-F LG1H212NA-300-F LG1H212NA-400-F 60 160 260 80 180 280 Dimenstions inside ( ) are for a 100 mm stroke. Positioning Time Guide Positioning time Positioning time (sec.)

CLS

speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa ) P 0.5 MPa ) P 250 4000 4000 3000 3000 200 180 2000 2000 160 250 140 Load weight: m (kg) Load weight: m (kg) 125 200 1000 1000 700 800 900 700 800 900 180 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) 9-9-7 8 Cylinder with Lock Double Acting,

MY1

speed mm/s Piston speed mm/s Piston speed mm/s MY1HT/m MY1HT/m MY1HT/m 1000 1000 1000 500 500 500 300 300 300 MY1HT63 MY1HT63 Load weight kg Load weight kg Load weight kg MY1HT63 100 100 100 MY1HT50 MY1HT50 50 50 50 MY1HT50 40 40 40 30 30 30 20 20 20 10 10 10 100 200 300 400 500 1000 100 200 300 400 500 1000 100 200 300 400 500 1000 Piston speed mm/s Piston speed mm/s Piston speed mm/s

Electric Actuator with Integrated Guide

Positioning distance (mm) 600 300 100 10 1 10 60.5 30.5 10.5 1.5 0.5 100 6.5 3.5 1.5 0.6 0.5 Speed (mm/s) 150 4.5 2.5 1.2 0.6 0.5 300 2.6 1.6 0.9 0.6 0.5 Values will vary slightly depending on the operating conditions.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Stroke range (mm) Bore size (mm) AP AL AK AJ AI AH AG AB AA V U T S N M L K J I B A O P 63 60 12 14 180 158 250 228 25 25 108 192 30 72 100 66 180 135 117 65 228 200 Rc 1/4 M12 x 1.75 depth 23 75, 100, 125 150, 200, 250 300 80 70 16 14 200 178 284 262 27 30 128 224 35 89 115 76 214 160 138 75 262 230 Rc 3/8 M12 x 1.75 depth 28 100 80 16 16 226 200 326 300 30 32 143 262 40 110 125 80 245 190

TABLE OF CONTENTS

Body Brass Body Acetic Acid NR NR NR NR Acetone PP PP PP PP Air (up to +180 F. to +300 F.)

CL

to 300 to 300 0.25 Stroke 105.5 Long stroke/Refer to p.3.1-28 and 3.1-29 for mounting dimensions except table below.

MGG

(mm) Bore size (mm) Stroke range (mm) AL AK AP AJ AI AH AG N AB M AA L K J I V B U T A O P S 63 80 100 12 14 60 180 158 250 228 100 25 66 25 180 135 117 65 108 228 192 30 M12 x 1.75 depth 23 Rc 1/4 200 72 75, 100, 125 150, 200, 250 300 16 14 70 200 178 284 262 115 27 76 30 214 160 138 75 128 262 224 M12 x 1.75 depth 28 Rc 3/8 35 230 89 16 16 80 226 200 326 300 125 30 80 32 245 190 153 85

5 Port Solenoid Valve Series SY3000/5000/7000/9000

SY3120-C6 Horizontal actuation 800 700 600 500 400 300 200 100 0 SY5120-01 800 700 600 500 400 300 200 100 0 SY7120-02 800 700 600 500 400 300 200 100 0 SY9120-03 Base Mounted Bore size Series CJ2 Pressure 0.5 MPa Load rate: 50% Stroke 60 mm Series CS1 Pressure 0.5 MPa Load rate: 50% Stroke 1000 mm 6 10 16 125 140 160 180 200 20 25 32 40 40 50 63 80 100 Series CM2 Pressure 0.5 MPa Load

Ionizer

(High pressure warning label position at 300 mm length) 19.6 25 80 x (n-1) 70 10 25 Emitter cartridge n (Number of emitter cartridges), L Dimension L(mm) 300 380 620 780 1100 1260 1500 1900 2300 n Part no. 3 4 7 9 13 15 18 23 28 (Name plate position at 300 mm length) IZS31-300 IZS31-380 IZS31-620 IZS31-780 IZS31-1100 IZS31-1260 IZS31-1500 IZS31-1900 IZS31-2300 660 A Ionizer Series IZS31 Dimensions

MY1

Allowable Moment MY1HT/M1 MY1HT/M3 1000 1000 500 500 300 300 Moment (Nm) Moment (Nm) MY1HT63 MY1HT63 100 100 MY1HT50 MY1HT50 (2) (4) (1) (3) 50 50 40 40 30 30 20 20 10 10 100 200 300 400 500 1000 100 200 300 400 500 1000 Piston speed (mm/s) Piston speed (mm/s) 8-11-93 89 Mechanically Jointed Rodless Cylinder High Rigidity/High Precision Guide Type Series MY1HT 50, 63 How to Order MY1HT 50

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

(M) DIN terminal (D) M8 connector (WO) 49 49 49 49 57.2[59.4] 36.2 52.2 67[69.2] 58.7 76.1 MAX.10 66.1 77 Pg7 65.2[72.2] Approx. 300 (Lead wire length) 41.1 M8 x 1 58.6 68.1 Approx. 300 (Lead wire length) 38.7 79.4 54.1[61.1] 86.9 Applicable cable O.D. 3.5 to 7 Refer to page 704 for dimensions with connector cable. 3 68 59 80 71 6 116 107 131 122 8 148 139 165 156 10 180 171 199 190 4 84