Aluminum High Vacuum Angle Valve

For details, consult your SMC sales representative. 419 B Aluminum High Vacuum Angle Valve Double Acting/Bellows Seal RoHS XLC/XLCV Series How to Order XLC M9N A 16 Flange size 16, 25, 40 XLC M9N A 50 1 Flange size 50, 63, 80, 100, 160 q t y w e r u XLC16 to 40 q Flange size w Flange type e Pilot port direction Rear flange surface Type KF (NW) K (DN) Applicable flange 16, 25, 40, 50, 63,

NCQ8

Indicator light Lead wires Oilproof vinyl heavyduty cord 0.1" (2.7 mm) x 0.13" (3.2mm) ellipse, 2.3 x 10-4in2 (0.15mm2), 2 cores: D-M9B(V), 3 cores: D-M9N(V), D-M9P(V) Note 1) Refer to page 50 for solid state switch common specifications. Note 2) Refer to page 50 for lead wire lengths.

2–4

-30 -35 -40 -45 -50 -75 -100 CDQMB50-10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CDQMB12-5 -10 -15 -20 -25 -30 CDQMB16-5 -10 -15 -20 -25 -30 CDQMB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB32-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 40 45 50

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

(In-line) LEY32 (Top/Parallel) LEY32D (In-line) Stroke [mm] Note 1) 30, 50, 100, 150, 200, 250, 300, 350, 400 30, 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 30, 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 Work load [kg] Horizontal Note 2) 18 50 50 30 60 60 30 60 60 Vertical 8 16 30 9 19 37 12 24 46 Force [N] Note 3) (Set value: 45 to 90%) 65 to 131 127 to 255 242 to 485 79 to 157

Integrated Controller

Lead 20: EQY25H 100 Min. 25% Max. 50% 10 20 30 40 50 90 70 80 60 0 Model EQY16 EQY25 EQY32 Lead A B C H A B C H A B C Work load [kg] 1 1.5 3 1 2.5 5 10 2 4.5 9 18 Pushing force set value [%] Ambient temperature Pushing force set value [%] Duty ratio [%] Continuous pushing time [min] 40C or less 50 or less 100 Pushing force 45% 50% 70% 42 Battery-less Absolute (Step Motor 24 VDC) Easy to

CQS

Model C D 25 30 35 40 45 50 25 30 35 40 45 50 25 30 35 40 45 50 55 60 65 70 30 35 40 45 50 55 60 65 70 75 C' D' 30 35 40 45 50 55 30 35 40 45 50 55 30 35 40 45 50 55 60 65 70 75 35 40 45 50 55 60 65 70 75 80 Mounting bolt Mounting bolt CQSKB12-5D -10D -15D -20D -25D -30D CQSKB16-5D -10D -15D -20D -25D -30D CQSKB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSKB25-5D -10D -15D -20D -

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

How to Order M9N A 25 XMD XYD Angle type M9N A 25 In-line type 1 2 3 4 5 6 7 2. Flange type 1. Flange size XMD Symbol Nil D C Type KF (NW) K (DN) CF Applicable flange size 25, 40, 50, 63, 80 63, 80 40 (070), 63 (114) XYD V V V V V XMD V V V V V Size 25 40 50 63 80 XYD Nil D KF (NW) K (DN) 25, 40, 50, 63, 80 63, 80 3.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Mounting bolt Model C Mounting bolt Mounting bolt D 40 45 50 55 60 65 40 45 50 55 60 65 40 45 50 55 60 65 70 75 80 85 45 50 55 60 65 70 75 80 85 90 50 55 60 65 70 75 80 85 90 95 130 155 Model C Mounting bolt D 45 50 55 60 65 70 75 80 85 90 125 150 55 60 65 70 75 80 85 90 95 130 155 55 60 65 70 75 80 85 90 95 130 155 C' D' 40 45 50 55 60 65 40 45 50 55 60 65 40 45 50 55 60 65

XM, XY

209 268 483 Stainless steel High Vacuum Angle/In-line Valve Double Acting/Bellows Seal XMC, XYC Series How to Order Angle type M9N A A 16 50 M9N XMC XMC Flange size 16, 25, 40 M9N A 25 1 Flange size 50, 63, 80 XYC XYC Flange size 25, 40 Flange size 50, 63, 80 In-line type A 1 50 M9N Note) The XMC and XYC series with solenoid valve are also available.

Compact Cylinder

63 20 25 32 40 50 63 7 16 8 22 36 22 4 16 22 6.6 2.8 8 38 55 68 M5 27 7 22 M5 7 16 10 26 40 26 4 16 26 6.6 2.8 8 38 60 73 M5 29 7 22 M5 7 16 15 32.5 46 32 4 30 32.5 7 5 10 50 64 32 79 M6 33.5 7 24.5 M6 9 18 17.5 38 52 36 4 35 38 9 5 10 55 72 36 90 M6 38 10 26 M6 9 21 20 46.5 64 45 5 40 46.5 9 6 12 70 90 45 110 M8 45 10 31 M8 9 21 22.5 56.5 74 50 5 45 56.5 9 6 12 80 100 50 120 M8 50 10

10

(n 4) 2 (n = 4, 8, 12, 16) Note 2) 90 + 45 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 100 + 45 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 105 + 45 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 110 + 45 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 115 + 45 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 2 (Different surfaces, same surface) 1 80 85 90 95 100 D-P3DWA n 80 + 50 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 85 + 50 (n 4) 2 (n =

MY1

Therefore, also check the allowable load for the selected conditions. 6.1 10 16 20 25 32 40 MX 0.8 6.1 1.1 0.8 6.1 10.8 3.7 10.8 4.9 3.7 10.8 40 50 40 50 40 50 17.6 MTS 11 17.6 16 11 17.6 MY1H 27.5 23 27.5 26 23 27.5 30 30 30 39.2 MY 39 39.2 50 39 39.2 20 50 39 50 50 50 50 20 20 CY The above values are the maximum allowable values for moment and load.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

40 35 190 190 190 190 190 190 190 10 10 10 10 10 10 10 10 10 10 10 10 10 10 90 80 65 50 45 40 35 60 50 50 40 40 30 20 17 23 27 33 37 44 57 36 50 66 68 78 91 115 40 54 60 72 82 95 19 40 54 60 72 82 95 19 21 27 31 37 41 48 61 21 27 31 37 41 48 61 10 20 30 50 70 100 200 Operating angle m: Value of the operating range Lm of a single auto switch converted to an axial rotation angle.

Rotary Actuator/Vane Type

(Rotation range of single flat (key) when mounting 2 stopper blocks on the other sides groove is the opposite side from and the setting range is within either right 50 or 60 against port A and B.) Four chamfers for wrench Long groove Stopper block Section A-A (Double vane) Section A-A (Single vane) 60 50 Note) For size 40, each stopper block comes with 2 holding screws.

Compact Cylinder with Solenoid Valve/

, 50, 75, 100 5, 10, 15, 20, 25, 30, 35 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35 40, 45, 50, 75, 100 Surge voltage suppressor Diode (Non-polar: Varistor) 32 1 Indicator light LED Note) The S and Z types of surge voltage suppressor have an internal circuit allowing voltage drop, so use within the following allowable voltage range.

Air Slide Table

50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC 10 10 20 20 30 30 Stroke 40 40 50 50 75 75 Page 67 100 Height interchangeable type MXQ 10 10 10 10 10 10

MHZ

2 L MRHQ 0 10 20 30 40 50 60 0 50 100 150 Misc.

MHZ

2 L MRHQ 0 10 20 30 40 50 60 0 50 100 150 Misc.

CHKD/CHKG

CHKGB50 CHKGB20 -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M

ISO Standard Hydraulic Cylinder

1.5 M33 x 2 93 28 66 40 34 3/4 39 45 20 17 40 41 60 46 9 45 41 76 100 25 to 1000 130 96.9 100 M16 x 1.5 M42 x 2 101 36 67 40 3/4 50 20 19 54 56 50 52 72 47 10 50 91 56 Tolerances CD Bore size (mm) Bore size (mm) V S Y ZZ SS f8 H9 32 32 5.5 103 60 182 147 +0.043 0 -0.016 -0.043 40 40 6.5 128 62 211 172 50 50 7 134 67 248 191 +0.052 0 -0.020 -0.053 63 63 12 136 71 265 200 80 80 15 159 77 308