Table of Contents

and guide section, causing play in the fingers and adversely affecting the gripper's life. 0 20 40 60 80 0 20 40 60 80 100 Gripping point L mm Gripping point L mm MRHQ25 MRHQ25 120 100 Pressure 0.2MPa 100 Pressure 0.2MPa 80 Overhang H mm Overhang H mm 80 60 0.3MPa 0.5MPa 0.6MPa 0.7MPa 60 0.7MPa 0.4MPa 0.3MPa 0.4MPa 40 0.5MPa 40 0.6MPa 20 20 0 20 40 60 80 100 0 20 40 60 80 100 120 Gripping

High Vacuum Angle Valve

XLD-50 XLD-63 XLD-80 XLD-100 XLD-160 50 123 48 1 12 40 26 16 7.5 41 65 170 66 2 11 55 41 20 15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

Table of Contents

Load Weight Allowable Moment MY2H/m3 MY2H/M3 MY2H/M1 MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 20 20 20 20 Load weight kg Moment Nm Moment Nm Moment Nm MY2H40 MY2H40 MY2H40 MY2H40 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 4 4 3 3 3 3 MY2H16 2 2 2 2 0.2 MY2H16 MY2H16 MY2H16 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300 400500 1000 1500 100

Free Mount Cylinder

6.6 25 6.7 32 7.7 Standard Stroke Standard stroke (mm) 20, 30, 40, 50, 60, 70, 80, 90, 100 Bore size (mm) 20, 25, 32 Intermediate strokes are also available upon receipt of order.

ISO Cylinder

20 M22 x 1.5 8 G1/8 16 20 8 44 17 8.2 M8 x 1.25 32 11 24 22 11 13 12 24 25 22 M22 x 1.5 8 G1/8 16 22 8 50 20 10.2 M10 x 1.25 32 11 30 22 11 17 12 28 Bore size S (XC) Z ZZ 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 8 56 (62) 74 (80) 86 (92) 96 (102) 10 56 (60) 74 (78) 86 (90) 96 (100) 12 60 (63.5) 85

Table of Contents

63 63 50, 63 50 50 50, 63 50, 63 10 10 40 40 40 50, 63 40 40 40 32 32 32 32 32 32 5 10 20 30 50 40 51 100 101 300 200 5 10 20 30 50 40 51 100 101 300 200 Stroke (mm) Stroke (mm) MGPL80, 100 MGPL80, 100 50 50 100 100 100 80 80 80 100 100 Load weight m (kg) Load weight m (kg) 80 80 100 10 10 80 5 10 100 20 29 30 49 50 300 200 5 10 100 20 29 30 49 50 300 200 Stroke (mm) Stroke (mm) 8-19-17 Series

Table of Contents

style Double clevis style B L F G D Note) 10 16 20 25 28 10 mm 16 mm 20 mm 25 mm 28 mm 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100 28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

Aluminum High Vacuum Angle Valve

XLD-50 XLD-63 XLD-80 XLD-100 XLD-160 50 123 48 1 12 40 26 16 7.5 41 65 170 66 2 11 55 41 20 15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

Rotary Actuator/Vane Type

Weight [g] Vane type Single vane Double vane Size 10 15 20 30 40 10 15 20 30 40 Rotating angle 90 180 270 90 180 270 90 180 270 90 180 270 90 180 270 90 100 90 100 90 100 90 100 90 100 Rotary actuator body 27 26 26 48 47 46 104 103 101 199 194 189 385 374 363 42 43 55 58 119 142 219 239 398 444 Flange assembly 9 10 19 25 9 10 19 25 Auto switch unit 15 20 28 38 43 15 20 28 38 43 Angle adjuster

Mounting: D (Double Clevis), Bore Size: 32mm, Thread: Rc, Full Stroke: 50mm, First Stroke: 20mm, Auto Switch: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: MBPC (1.0m Cord Length, M8-4 Pin Connector), Number: S (1 pc.)

Mounting: Double Clevis, Bore Size: 32mm, Thread: Rc, Full Stroke: 50mm, First Stroke: 20mm, Auto Switch: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 1.0m Cord Length, M8-4 Pin Connector, Number: 1 pc.

Smooth Cylinder/Low Speed Cylinder

CDQ2YB325 10 15 20 25 30 35 40 45 50 75 -100 CDQ2YB405 10 15 20 25 30 35 40 45 50 75 -100 CDQ2YB5010 15 20 25 30 35 40 45 50 75 -100 CDQ2YB6310 15 20 25 30 35 40 45 50 75 -100 CDQ2YB8010 15 20 25 30 35 40 45 50 75 -100 CDQ2YB10010 15 20 25 30 35 40 45 50 75 -100 CQ-M8 x 70L x 75L x 80L x 85L x 90L x 95L x 100L x 105L x 110L x 135L x 160L CQ-M10 x 75L x 80L x 85L x 90L x 95L x 100L x 105L

Air Cylinder

100 125 147 160 172 185 210 235 260 32 32 36 18 72 85 97 110 135 160 185 12.5 25 37.5 50 75 100 125 149 162 174 187 212 237 262 40 41 46 20 77 90 102 115 140 165 190 12.5 25 37.5 50 75 100 125 181 194 206 219 244 269 294 Bore size Female Rod End (mm) With Rod Boot Boss-cut (mm) (mm) Bore size ZZ Bore size A1 H MM ZZ 20 8 20 M4 x 0.7 95 25 8 20 M5 x 0.8 95 32 12 20 M6 x 1 97 40 13 21 M8 x

Made to Order

(25 to 40) 2001 to 5000 (50, 63) 25, 32, 40, 50, 63 100 to 1000 10 to 100 20, 25, 32 10 15 20 25 100 to 300 100 to 500 100 to 600 100 to 800 301 to 500 501 to 750 601 to 1000 801 to 1200 10, 20, 30, 40, 50 75, 100, 125, 150 10, 15 CY1H CXSW 10, 20, 30, 40, 50, 75, 100 125, 150, 175, 200 20, 25, 32 ML1 25 32 1001 to 1200 1001 to 1500 25, 32, 40 100 to 1000 1001 to 2000 2001 to 4000 (25, 32

5

Nil Rc 20 to 100 TN NPT 20 to 100 TF M5 x 0.8 20, 25 G 32 to 100 Built-in Magnet Cylinder Model * No bracket is provided for the female rod end type. * Rod end bracket is shipped together with the product, but not assembled. * A knuckle joint pin is not provided with the single knuckle joint.

Electric Actuator/Slider Type

Speed: V [mm/s] Vertical LEFS40/Ball Screw Drive Horizontal 60 60 Lead 10 50 50 Work load: W [kg] Work load: W [kg] 40 40 Lead 20 30 30 20 20 Lead 10 10 10 0 0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 Speed: V [mm/s] Speed: V [mm/s] 2 Series LEFS SpeedWork Load Graph (Guide) Step Motor (Servo/24 VDC) The following graph shows the values when moving force is 100%.

e-Rodless Actuator

Load weight Allowable moment E-MY2H/m3 E-MY2H/M3 E-MY2H/M1 E-MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 q r w et 20 20 20 20 Moment (Nm) Moment (Nm) Moment (Nm) Moment (Nm) 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 MY2H16 4 4 3 3 3 3 MY2H16 MY2H16 2 2 2 2 MY2H16 0.2 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300400500 1000 1500 100 200 300400500

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 10-20-78

NCQ8

(1") 125 (1-1/4") to 200 (2") 012 (1/8") to 100 (1") 125 (1-1/4") to 200 (2") 012 (1/8") to 100 (1") 125 (1-1/4") to 200 (2") 012 (1/8") to 100 (1") 125 (1-1/4") to 200 (2") 012 (1/8") to 100 (1") 125 (1-1/4") to 200 (2") 012 (1/8") to 100 (1") 125 (1-1/4") to 200 (2") 0.76 0.67 1.42 1.33 2.50 2.47 056 (9/16") 3.06 075 (3/4") 3.42 106 (1-1/16") 3.73 Single Acting, Spring Extend Unit: lbs

Air Cylinder

D-X Technical Data 291 Air Cylinder: Standard Type Double Acting, Single Rod CG1 Series 20, 25, 32, 40, 50, 63, 80, 100 RoHS How to Order 100 CG1 20 N B Z N B 20 Z M9BW With auto switch CDG1 Bore size 100 With auto switch (Built-in magnet) Pivot bracket Made to Order Mounting Nil None For details, refer to page 293. 20 20 mm 25 25 mm 32 32 mm 40 40 mm 50 50 mm 63 63 mm 80 80 mm 100 100 mm