Aluminum High Vacuum Angle Valve

Uniform baking temperature 108 154 10.6 300 138 200 18.5 800 Common to all series.

5

, 175, 200, 250, 300, 350, 400, 450, 500 1000 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 1000 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 1000 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 1000 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 1000 100 25, 50, 75, 100, 125

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

, 175, 200, 250, 300 Be sure to read before handling.

MY1

Wn 111 210 X-axis Xn Y-axis Yn Z-axis Zn Z Wa 0.88 kg 0 mm 5 mm 65 mm Y Wb 4.35 kg 0 mm 42.5 mm 150 mm Wc 0.795 kg 111 mm 42.5 mm 150 mm X Wd 0.5 kg 210 mm 42.5 mm 150 mm 65 150 n = a, b, c, d 3.

10

, 175, 200, 250, 300, 350, 400, 450, 500 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 Refer to pages 425 to 432 for cylinders with auto switches. 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600

Air Slide Table

= 100 V = 100 3 3 V = 200 V = 200 2 2 V = 300 V = 300 V = 500 1 1 0 0 50 100 150 200 250 300 0 0 50 100 150 200 250 300 350 400 L3: Overhang Allowable range: 300 mm L3: Overhang Allowable range: 400 mm Allowable overhang L [mm] Allowable overhang L [mm] 167 Model Selection MXQ Series Determine the overhang.

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 300/150, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Block shape, Additional Function: With Intermediate Stop Function / Stroke with Adjustment, Environment, Applications: Standard, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～1.0, Support bracket:

Mounting: D (Double Clevis), Bore Size: 50mm, Thread: TN (NPT Thread), Full Stroke: 300mm, First Stroke: 150mm

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 300/150, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Block shape, Additional Function: With Intermediate Stop Function / Stroke with Adjustment, Environment, Applications: Standard, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～1.0, Support bracket:

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

, 175 200, 250, 300 350, 400, 450, 500 600, 700, 800 20, 25 2032, 40, 50 63, 80 75, 100, 125, 150, 175 200, 250, 300 350, 400, 450, 500, 600 700, 800, 900,1000 Data Intermediate strokes and strokes shorter than 75 mm are also available.

Compact

250, 300, 350, 400, 450, 500, 550, 600, 700, 800, 900, 1000, (1100), 1200, (1300), (1400), 1500, (1600), (1700), (1800), (1900), 2000 48 20 1000 Page 170 32 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600, (700), (800), (900), (1000) Page 170 2000 10 25 LEMH Linear guide single axis type 48 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600, (700), (800), (900), (1000),

e-Rodless Actuator

(Wn) Weight (mn) Y-axis Yn Z-axis Zn X-axis Xn Z X Wa 5 mm 0.88 kg 0 mm 65 mm 111 Wb 42.5 mm 4.35 kg 0 mm 150 mm Y 210 Y Wc 42.5 mm 0.795 kg 111 mm 150 mm Wd 42.5 mm 1.0 kg 210 mm 150 mm n = a, b, c, d 3 Calculation of composite center of gravity m3 = mn = 0.88 + 4.35 + 0.795 + 1.0 = 7.025 kg 1 m3 X = x (mn x xn) 1 7.025 = (0.88 x 65 + 4.35 x 150 + 0.795 x 150 + 1.0 x 150) = 139.4 mm 1

2

150 Nil C D Nil H L S 300 300 75 Auto-drains listed on page 95 are attached.

MXQ

30 MXQ20-30 MXQ20-125 MXQ20-125 MXQ20-125 0.04 0.04 MXQ20-20 MXQ20-20 MXQ20-20 MXQ20-20 MXQ20-20 MXQ20-20 MXQ20-100 MXQ20-100 MXQ20-100 MXQ20-10 MXQ20-10 MXQ20-10 0.04 MXQ20-10 MXQ20-10 MXQ20-10 0.02 0.02 0 0 400 500 600 100 200 300 0 100 200 300 100 200 300 Load (N) Load (N) Load (N) 25 25 25 Lr = 200 mm 0.08 MXQ25-150 MXQ25-150 MXQ25-150 MXQ25-10 MXQ25-10 MXQ25-20 MXQ25-20 MXQ25-30 MXQ25

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

200 300 400500 1000 1500 Piston speed mm/s Piston speed mm/s Piston speed mm/s Piston speed mm/s 8-13-13 14 Mechanically Jointed Rodless Cylinder Cam Follower Guide Type Series MY2C 16, 25, 40 How to Order MY2 G 16 C 300 L M9N Number of auto switches Guide type C Cam follower guide 2 pcs. 1 pc. n pcs.

CQS

175, 200 75, 100, 125, 150 175, 200, 250, 300 25 Standard Non-rotating Rod Anti-lateral Load Reed switch D-A90/A90V D-A93/A93V D-A96/A96V Series CQSW 12 16 5, 10, 15, 20 25, 30 7-4-20 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 7-4-12 Solid state switch D-M9N/M9NV D-M9P/M9PV D-M9B/M9BV D-F9NW/F9NWV D-F9PW/F9PWV D-F9BW/F9BWV D-F9BAL Series CQSK 12

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

200 300 400 500 600 700 800 900 1000 50 100 150 200 300 400 500 600 700 800 900 32 40 50 63 80 100 125 48 4 15 75 250 225 200 175 188 313 150 163 288 125 138 263 23 100 113 238 36 75 100 213 54 12.5 37.5 50 88 54 4 17 75 250 225 200 175 188 313 150 163 288 125 138 263 23 100 113 238 36 75 100 213 54 12.5 25 37.5 50 88 69 5 24 87 250 225 200 175 200 325 150 175 300 125 150 275 25 100 125

MHZ

0.4 MPa 0.4 MPa 10 0.4 MPa 0.3 MPa 0.2 MPa 0.4 MPa 0.3 MPa 0.3 MPa 0.3 MPa MRHQ 100 L 0.2 MPa 0.2 MPa 0.2 MPa 5 Misc. 50 D0 10 20 30 40 50 0 50 100 150 Gripping point L (mm) Gripping point L (mm) 20MHZ2-16D/MHZL2-16D MHZ2-40D 400 Pressure 0.7 MPa Pressure 0.7 MPa Pressure 0.7 MPa Pressure 0.7 MPa 50 350 0.6 MPa 0.6 MPa 0.6 MPa 0.6 MPa Gripping force (N) 300 Gripping force (N) 40 0.5 MPa

MHZ

0.4 MPa 0.4 MPa 10 0.4 MPa 0.3 MPa 0.2 MPa 0.4 MPa 0.3 MPa 0.3 MPa 0.3 MPa MRHQ 100 L 0.2 MPa 0.2 MPa 0.2 MPa 5 Misc. 50 D0 10 20 30 40 50 0 50 100 150 Gripping point L (mm) Gripping point L (mm) 20MHZ2-16D/MHZL2-16D MHZ2-40D 400 Pressure 0.7 MPa Pressure 0.7 MPa Pressure 0.7 MPa Pressure 0.7 MPa 50 350 0.6 MPa 0.6 MPa 0.6 MPa 0.6 MPa Gripping force (N) 300 Gripping force (N) 40 0.5 MPa

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

150 100 50 200 250 Load (N) 150 100 100 400 500 Load (N) 300 200 8-8-10 10 Precision Air Slide Table Series MXP Table Accuracy Traveling parallelism C C side parallelism to A side D M D side parallelism to B side B W A Port C MX M MTS B Distance from 0 of gauge dial when guide block is moved to full stroke after body is fixed on a base.