Table of Contents 300 100 MI W S 100 300 Speed (mm/s) Speed (mm/s) Speed (mm/s) 300 300 CEP1 Max. 500 mm/s of high speed transfer is possible.
Tie-rod Length Changeable Range CS1 125 140 CA2, CVS, CV3, CBA All bore size 0 300 Model Bore size (mm) M Min. M Max. 200 22 250 26 300 32.5 160 18 180 20.5 270 15.5 Rod side 50 Head side 300 6-17-16 14 Simple Specials: -XC79: Tapped Hole, Drilled Hole, Pinned Hole Machined Additionally These changes are dealt with Simple Specials System.
160 300 150 1000 850 1000 860 400 260 400 250 1200 1050 1200 1060 500 360 500 350 600 460 600 450 Dimensions inside ( ) are for a 100 mm stroke.
to space saving With restriction on exhaust direction (one way only: from valve element side to bellows side) B XL -100/160 Chamber A Model A [mm] B [mm] Weight [kg] Conductance [L/s] XLA-100-X152 108 300 10.6 300 XLA-160-X152 138 315 18.5 800 Vacuum pump Vacuum pump XL -100/160 Variations Leakage [Pam3/s] Flange size Option Model Valve type Operating pressure [Pa(abs)] Internal1 External1
160 300 150 1000 850 1000 860 400 260 400 250 1200 1050 1200 1060 500 360 500 350 600 460 600 450 Dimensions inside ( ) are for a 100 mm stroke.
SY3120-C6 Horizontal actuation 800 700 600 500 400 300 200 100 0 SY5120-01 800 700 600 500 400 300 200 100 0 SY7120-02 800 700 600 500 400 300 200 100 0 SY9120-03 Base Mounted Bore size Series CJ2 Pressure 0.5 MPa Load rate: 50% Stroke 60 mm Series CS1 Pressure 0.5 MPa Load rate: 50% Stroke 1000 mm 6 10 16 125 140 160 180 200 20 25 32 40 40 50 63 80 100 Series CM2 Pressure 0.5 MPa Load
] 0.42 0.33 0.59[0.25] Rc 1/8 3 position VFR 160 VZ520--C8 VP4 Note) [ ]: Denotes the normal position.
301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 30 36 68 81 93 106 131 156 181 12.5 25 37.5 50 75 100 125 143 156 168 181 206 231 256 25 32 36 72 85 97 110 135 160 185 12.5 25 37.5 50 75 100 125 147 160 172 185 210 235 260 32 32 36 72 85 97 110 135 160 185 12.5 25 37.5
D-X 1227 Smooth Cylinder Series CS2Y 125, 140, 160 How to Order 160 CS2 Y L 300 L 300 160 M9BW CDS2 With auto switch Y With auto switch (Built-in magnet) Number of auto switches Nil S 3 n 2 pcs. 1 pc. 3 pcs. n pcs. Smooth Cylinder Made to Order Mounting For details, refer to page 1229.
Mounting: F (Front Flange), Bore Size: 32mm, Thread: Rc, Full Stroke: 300mm, First Stroke: 50mm
Mounting: F (Front Flange), Bore Size: 32mm, Thread: Rc, Full Stroke: 300mm, First Stroke: 70mm
Mounting: F (Front Flange), Bore Size: 32mm, Thread: Rc, Full Stroke: 300mm, First Stroke: 260mm
Mounting: F (Front Flange), Bore Size: 32mm, Thread: Rc, Full Stroke: 300mm, First Stroke: 150mm
Mounting: F (Front Flange), Bore Size: 32mm, Thread: Rc, Full Stroke: 300mm, First Stroke: 170mm
Mounting: Front Flange, Bore Size: 32mm, Thread: Rc, Full Stroke: 300mm, First Stroke: 260mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -
Mounting: Front Flange, Bore Size: 32mm, Thread: Rc, Full Stroke: 300mm, First Stroke: 150mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -
Mounting: Front Flange, Bore Size: 32mm, Thread: Rc, Full Stroke: 300mm, First Stroke: 170mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -
Mounting: Front Flange, Bore Size: 32mm, Thread: Rc, Full Stroke: 300mm, First Stroke: 50mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -
Mounting: Front Flange, Bore Size: 32mm, Thread: Rc, Full Stroke: 300mm, First Stroke: 70mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -
200 70 90 90 110 70 90 90 110 Max. 26 90 115 135 165 Max. 25 8 9 12 14.5 270 320 345 380 250 300 320 350 90 115 135 165 16 18 22 26 Max. 50 145 170 185 205 25 32 32 40 25 32 32 40 160 200 250 320 Max. 160 180 230 270 330 Max. 224 Max. 157 199 242 257 289 125 160 200 250 Max. 209 Min. 35 Max. 31 Max. 25 Max. 50 Max. 220 Max. 280 Max. 195 Max. 209 Min. 35 Max. 31 Max. 35 Max. 50 Max. 260 Max