Air Cylinder

, 100 80, 100 @0 !

MHZ

Weight (g) End boss type (Symbol) Model E W K M Double acting Single acting MHZL2-10 70 70 80 80 80 MHZL2-16 170 170 180 180 180 MHZL2-20 310 310 330 330 330 MHZL2-25 535 535 580 580 580 12-2-69

MHZ

Weight (g) End boss type (Symbol) Model E W K M Double acting Single acting MHZL2-10 70 70 80 80 80 MHZL2-16 170 170 180 180 180 MHZL2-20 310 310 330 330 330 MHZL2-25 535 535 580 580 580 12-2-69

Air Slide Table

250 300 350 400 L3: Overhang Allowable range: 180 mm L3: Overhang Allowable range: 400 mm Allowable overhang L [mm] Allowable overhang L [mm] MXQ20B-10, 20, 30, 40Z MXQ20B-50, 75Z 10 10 V = mm/s V = mm/s 9 9 8 8 Load mass m [kg] Load mass m [kg] 7 7 V = 100 V = 100 6 6 5 5 4 4 V = 200 V = 200 3 3 V = 300 V = 300 2 2 V = 500 V = 500 1 1 0 0 0 20 40 60 80 100 120 0 20 40 60 80 100 120 140

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Above the line in the graph: Either use a cylinder with a larger bore size or install an external stopper MX Graph (4) up to 300 mm/s Graph (7) up to 300 mm/s 300 MTS 1000 80 80 1000 80 MY 250 800 63 Load weight m (kg) Load weight m (kg) CY 200 63 600 50 63 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area

Air Cylinder

to 150 151 to 200 201 to 250 S ZZ S ZZ S ZZ S ZZ S ZZ 20 8 20 M4 x 0.7 87 120 112 145 137 170 25 8 20 M5 x 0.8 87 120 112 145 137 170 32 12 20 M6 x 1 89 122 114 147 139 172 164 197 40 13 21 M8 x 1.25 113 150 138 175 163 200 188 225 213 250 Symbol * When female thread is used, use a thin wrench when tightening the piston rod. * When female thread is used, use a washer etc. to prevent the

Aluminum High Vacuum Angle Valve

A 16 Flange size 16, 25, 40 XLG M9N A 50 1 Flange size 50, 63, 80, 100, 160 XLG q t y w e r u e Pilot port direction w Flange type q Flange size Symbol Nil K L M Pilot port direction Flange side Left flange surface Rear flange surface Right flange surface Size 16 25 40 50 63 80 100 160 Symbol Applicable flange 16, 25, 40, 50 63, 80, 100, 160 63, 80, 100, 160 Type Rear flange surface Nil

Compact

LEJ 3 4.7 LEL 80 Stroke (80) Origin When LECP1, LECP6 or LECPMJ is used.

2

Purge air flow rate (L/min [ANR]) 180 Existing model 160 Reduction ratio 140 31% IDG50A 120 Purge air flow rate (rated conditions) 100 80 Model Purge air flow rate (L/min [ANR]) Running cost (yen/year) Purge ratio (%) 60 86 125 15 46,440 IDG50A 40 0 Existing model 67,500 20 0.0 0.5 1.0 [Calculation conditions] Air unit price: 3 yen/m3 Operating hours: 12 hours/day Annual operating days: 250

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Strokes Bore size (mm) Standard stroke (mm) Max. stroke Note) 32 40 50 63 80 100 125 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 2000 2000 2000 2000 2000 2000 Minimum Stroke for Auto Switch Mounting 25, 50, 80, 100,

Environment

Lx = 400 mm, Ly = 250 mm, Lz = 1500 mm 4.

Cylinder with Lock

[mm] Bore size Standard stroke Max. stroke 32 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 2000 40 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 2000 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 100 25, 50, 80, 100, 125, 160

CQS

Model C D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 C' D' 35 40 45 50 55 60 35 40 45 50 55 60 40 45 50 55 60 65 70 75 80 85 45 50 55 60 65 70 75 80 85 90 Mounting bolt Mounting bolt CDQSKB12-5D -10D -15D -20D -25D -30D CDQSKB16-5D -10D -15D -20D -25D -30D CDQSKB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQSKB25-5D -10D -15D -20D

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

0 5 10 15 20 25 30 CRA1 0 9 8 7 6 5 4 3 2 1 Load N Load N MSQ2A MSQ20 CRQ2 MSQ 300 MSQB20 (Basic type) MSQB2A (Basic type) 100 MRQ Displacement m Displacement m 80 250 D60 20MSQA2A (High precision type) 10 20 30 40 190 200 40 MSQA20 (High precision type) 20 0 10 20 30 40 50 12 10 8 6 4 2 0 Load N Load N MSQ30 MSQ3A MSQB30 (Basic type) 300 MSQB3A (Basic type) 100 250 Displacement m Displacement

Cylinder with Lock

, 200, 250, 300, 350, 400, 450, 500, 600 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Up to 2500 Cylinder model: MDWBD32-50-NW-M9BW * The manufacturing of intermediate strokes is possible.

JIS Standard Hydraulic Cylinder

0.043 0.025 0.064 40 40 40 36 M20 x 1.5 30 27 22.4 9 19 60 255 25 22 7 14 55 250 M16 x 1.5 18 +0.052 0 0.025 0.064 0.020 0.053 50 50 46 40 M24 x 1.5 35 32 28 11 24 65 285 30 27 9 19 60 280 M20 x 1.5 22.4 63 63 55 46 M30 x 1.5 45 42 35.5 13 30 80 337.5 35 32 11 24 70 327.5 M24 x 1.5 28 0.030 0.076 +0.062 0 0.025 0.064 80 80 65 55 M39 x 1.5 60 57 45 15 41 95 382.5 45 42 13 30 80 367.5 M30

Solid State Auto Switches

Weight (g) Applicable bore size(mm) Weight Applicable bore size(mm) Weight Auto switch model Auto switch model D-A33C-4, A34C-4 D-A33C-5, A34C-5 D-A33C-6, A34C-6 D-A33C-8, A34C-8 D-A33C-10, A34C-10 D-A44C-4 D-A44C-5 D-A44C-6 D-A44C-8 D-A44C-10 162 166 184 210 232 160 164 182 208 230 40 50 63 80 100 40 50 63 80 100 Dimensions (mm) T Applicable bore size (mm) 40 50 63 80 100 C 44 52 64 78 92

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Lead wire containment groove 8-15-80

REA/REB

: Standard Stroke Standard stroke (mm) Maximum manufacturable stroke (mm) Bore size (mm) 25 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 4000 32 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 40 5000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 6000 63 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900,

REA/REB

st: , 251 to 100 st: , 1001 st or longer: Standard Stroke Standard stroke (mm) Maximum manufacturable stroke (mm) Bore size (mm) 25 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 4000 32 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 40 5000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 6000 63 200, 250, 300