Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

MI-A0801-10 MI-A0801-20 MI-A1201-10 MI-A1201-20 MI-A1201-30 MI-A2001-10 MI-A2001-20 MI-A2001-30 MI-A2501-30 MI-A2501-50 MI-A3201-30 MI-A3201-50 MI-A0802-10 MI-A0802-20 MI-A1202-10 MI-A1202-20 MI-A1202-30 MI-A2002-10 MI-A2002-20 MI-A2002-30 MI-A2502-30 MI-A2502-50 MI-A3202-30 MI-A3202-50 MI-A0803-10 MI-A0803-20 MI-A1203-10 MI-A1203-20 MI-A1203-30 MI-A2003-10 MI-A2003-20 MI-A2003-30 MI-A2503

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

External Grip Internal Grip MHR3-10R/MDHR3-10 MHR3-10R/MDHR3-10 10 10 0.6 MPa Pressure Pressure 0.6 MPa 8 8 Gripping force (N) Gripping force (N) 0.5 MPa External grip 0.5 MPa 6 6 0.4 MPa 0.4 MPa 4 4 0.3 MPa 0.3 MPa 0.2 MPa 0.2 MPa 2 2 0 10 20 30 40 50 0 10 20 30 40 50 Gripping point L (mm) Gripping point L (mm) Internal grip MHR3-15R/MDHR3-15 MHR3-15R/MDHR3-15 20 20 0.6 MPa Pressure Pressure

High Vacuum Angle Valve

Example) -M9NL !

Aluminum High Vacuum Angle Valve

Example) -M9NL !

MHZ

0.6 MPa 100 50 Overhang H (mm) Overhang H (mm) 80 0.3 MPa 0.3 MPa Pressure 0.2 MPa Pressure 0.2 MPa 0.3 MPa 40 0.4 MPa 0.4 MPa 60 0.5 MPa 0.5 MPa 30 0.3 MPa 0.7 MPa 0.7 MPa 0.6 MPa, 0.7 MPa 0.6 MPa, 0.7 MPa 0.4 MPa 0.5 MPa 0.6 MPa, 0.7 MPa 0.4 MPa 40 20 0.5 MPa 20 10 0 10 20 30 40 50 60 0 20 40 60 80 100 120 Gripping point L (mm) Gripping point L (mm) MHZ2-20/11-MHZ2-20 80 Pressure 0.2 MPa

MHZ

point L = 20 mm, at center of stroke.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

m 80 200 60 MSQA3A (High precision type) 50 130 150 40 MSQA30 (High precision type) 20 0 10 20 30 40 50 60 70 18 16 14 12 10 8 6 4 2 0 Load N Load N MSQ7A MSQ50 MSQB50 (Basic type) MSQB7A (Basic type) 100 200 Displacement m Displacement m MSQA7A (High precision type) 80 150 60 120 40 50 MSQA50 (High precision type) 20 24 22 20 18 16 14 12 10 8 6 4 2 0 20 40 60 80 100 120 0 Load N Load N

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-M9NL 7.

XM, XY

) (CF flange) A B K S M J H G A (mm) Model A 123 170 183 217 256 B 48 66 79 100 117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6 x 6.6 8 x 8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type XLA G Fd XL C XLQ (K flange) XM XY XM XY J K H B

(Or None in the Case of No Switch), Lock Unit Built-in Magnet: D (Built-in), Lock Unit Switch Type: M9NL--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, 3M

(Or None in the Case of No Switch), Lock Unit Built-in Magnet: D (Built-in), Lock Unit Switch Type: M9NL--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, 3M

(Or None in the Case of No Switch), Lock Unit Built-in Magnet: D (Built-in), Lock Unit Switch Type: M9NL--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, 3M

(Or None in the Case of No Switch), Lock Unit Built-in Magnet: D (Built-in), Lock Unit Switch Type: M9NL--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, 3M

(Or None in the Case of No Switch), Lock Unit Built-in Magnet: D (Built-in), Lock Unit Switch Type: M9NL--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, 3M

(Or None in the Case of No Switch), Lock Unit Built-in Magnet: D (Built-in), Lock Unit Switch Type: M9NL--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, 3M

(Or None in the Case of No Switch), Lock Unit Built-in Magnet: D (Built-in), Lock Unit Switch Type: M9NL--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, 3M

(Or None in the Case of No Switch), Lock Unit Built-in Magnet: D (Built-in), Lock Unit Switch Type: M9NL--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, 3M

(Or None in the Case of No Switch), Lock Unit Built-in Magnet: Built-in, Lock Unit Switch Type: M9NL--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, 3M

(Or None in the Case of No Switch), Lock Unit Built-in Magnet: Built-in, Lock Unit Switch Type: M9NL--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, 3M

(Or None in the Case of No Switch), Lock Unit Built-in Magnet: Built-in, Lock Unit Switch Type: M9NL--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, 3M